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1. 发明授权

US5203924A Method of and apparatus for synthesizing diamondlike thin film 失效
标题翻译：用于合成DIAMONDLIKE薄膜的方法和装置
公开(公告)号：US5203924A
公开(公告)日：1993-04-20
申请号：US558241
申请日：1990-07-26
申请人： Tsutomu Mitani , Hirokazu Nakaue , Hideo Kurokawa
发明人： Tsutomu Mitani , Hirokazu Nakaue , Hideo Kurokawa
IPC分类号： C23C16/26 , C23C16/452 , C23C16/54 , H01J37/32
CPC分类号： H01J37/32449 , C23C16/26 , C23C16/452 , C23C16/545 , H01J37/32082 , H01J37/32357 , H01J2237/338 , H01J2237/339 , Y10S427/106
摘要： A method of and an apparatus for synthesizing a diamondlike thin film on a substrate, the method comprising the steps of: generating plasma of gas containing hydrocarbon gas, in a first vacuum vessel having an inflow portion and an outflow portion for the gas such that the substrate is provided in a second vacuum vessel maintained at a pressure lower, by one figure or more, than that of the first vacuum vessel due to flow resistance of the gas between the outflow portion and the substrate; and irradiating the plasma onto the substrate by pressure difference between the first vacuum vessel and the second vacuum vessel while an AC power is being applied to at least one of the substrate and an internal electrode provided in the first vacuum vessel.

2. 发明授权

US5360483A Plasma CVD apparatus and method therefor 失效
标题翻译：等离子体CVD装置及其方法
公开(公告)号：US5360483A
公开(公告)日：1994-11-01
申请号：US030557
申请日：1993-03-12
申请人： Hideo Kurokawa , Tsutomu Mitani , Hirokazu Nakaue
发明人： Hideo Kurokawa , Tsutomu Mitani , Hirokazu Nakaue
IPC分类号： C23C16/26 , C23C16/452 , C23C16/50 , C23C16/00
CPC分类号： C23C16/26 , C23C16/452 , C23C16/50
摘要： A plasma CVD apparatus for continuously forming a diamond-like film on a length of magnetic tape, includes a first vacuum vessel, a plasma generating vessel for transforming a gaseous medium into a plasma, and an electrode for accelerating ions of the plasma toward the substrate. The plasma generating vessel has a gas outflow port of a shape complementary to that of the portion of the magnetic tape readied for deposition. A portion of the plasma generating vessel is disposed within the vacuum vessel, with the gas outflow port facing the substrate. A gap between the substrate and the gas outflow port is set to maintain the pressure of plasma in the gap uniform.
摘要翻译：一种用于在一段磁带上连续形成类金刚石膜的等离子体CVD装置包括第一真空容器，用于将气体介质转换成等离子体的等离子体发生容器和用于将等离子体的离子加速至衬底的电极。等离子体发生容器具有与准备用于沉积的磁带部分的形状互补的形状的气体流出口。等离子体发生容器的一部分设置在真空容器内，气体流出口面向衬底。衬底和气体流出口之间的间隙被设定为使间隙中的等离子体的压力保持均匀。

3. 发明授权

US5674573A Method of synthesizing diamond-like carbon thin films 失效
标题翻译：合成类金刚石碳薄膜的方法
公开(公告)号：US5674573A
公开(公告)日：1997-10-07
申请号：US174169
申请日：1993-12-29
申请人： Tsutomu Mitani , Hirokazu Nakaue , Hideo Kurokawa
发明人： Tsutomu Mitani , Hirokazu Nakaue , Hideo Kurokawa
IPC分类号： C23C16/26 , C23C16/452 , C23C16/54 , H01J37/32 , B05D3/06
CPC分类号： H01J37/32449 , C23C16/26 , C23C16/452 , C23C16/545 , H01J37/32082 , H01J37/32357 , H01J2237/338 , H01J2237/339 , Y10S427/106
摘要： A method for synthesizing a hard diamond-like thin film on a rotating substrate, the method comprising the steps of: generating plasma of gas containing hydrocarbon gas, in a first vacuum vessel having an inflow portion and an outflow portion for the gas such that the substrate is provided in a second vacuum vessel maintained at a pressure lower, by a factor of 10 or more, than that of the first vacuum vessel due to flow resistance of the gas between the outflow portion and the substrate; and irradiating the plasma onto the substrate by pressure difference between the first vacuum vessel and the second vacuum vessel while an AC power is being applied to a mesh-shaped internal electrode provided in the first vacuum vessel.
摘要翻译：一种用于在旋转基板上合成硬质金刚石薄膜的方法，所述方法包括以下步骤：在具有用于气体的流入部分和流出部分的第一真空容器中产生含有烃气体的等离子体，使得衬底被提供在第二真空容器中，由于流出部分和衬底之间的气体的流动阻力，保持在比第一真空容器低10倍或更多的压力的压力下; 并且在将AC功率施加到设置在第一真空容器中的网状内部电极的同时，通过第一真空容器和第二真空容器之间的压力差将等离子体照射到基板上。

4. 发明授权

US5378285A Apparatus for forming a diamond-like thin film 失效
标题翻译：用于形成类金刚石薄膜的装置
公开(公告)号：US5378285A
公开(公告)日：1995-01-03
申请号：US015587
申请日：1993-02-10
申请人： Tsutomu Mitani , Hideo Kurokawa , Hirokazu Nakaue
发明人： Tsutomu Mitani , Hideo Kurokawa , Hirokazu Nakaue
IPC分类号： C23C16/26 , C23C16/513
CPC分类号： C23C16/513 , C23C16/26
摘要： A diamond-like thin film of good quality is prepared homogeneously and fast in a deposition. A mesh-like acceleration electrode is provided at the opening of a chamber including a filament, and a plasma is generated in the chamber. Because the chamber is isolated electrically from the electric system of the apparatus, the high density and the equilibrium state are maintained, and the plasma density and the potential are homogenized around the mesh-like electrode. In this state, a bias potential is applied to the substrate, and the ions are accelerated according to the potential difference between the plasma and the substrate to deposit a diamond-like thin film on the substrate. Preferably, a negative potential electrode is provided before or around the substrate. Further, an insulating member is provided to surround a flight path of ions between the chamber and the substrate.
摘要翻译：在沉积中均匀且快速地制备质量好的类金刚石薄膜。在包括灯丝的室的开口设有网状加速电极，在室内产生等离子体。因为室与设备的电气系统电隔离，所以保持高密度和平衡状态，等离子体密度和电位在网状电极周围均匀化。在该状态下，向衬底施加偏置电位，并且根据等离子体和衬底之间的电位差来加速离子，以在衬底上沉积金刚石状薄膜。优选地，在基板之前或周围提供负电极。此外，设置绝缘构件以围绕室和衬底之间的离子的飞行路径。

5. 发明授权

US5370292A Magnetic tape driving mechanism having a capstan with a surface made of carbon film including diamond-bonded carbons 失效
标题翻译：磁带驱动机构具有带有包含金刚石键合碳的碳膜表面的绞盘
公开(公告)号：US5370292A
公开(公告)日：1994-12-06
申请号：US118695
申请日：1993-09-10
申请人： Hideo Kurokawa , Tsutomu Mitani , Hirokazu Nakaue , Hideaki Yoshio , Hideyuki Hashi , Yuji Nakamura
发明人： Hideo Kurokawa , Tsutomu Mitani , Hirokazu Nakaue , Hideaki Yoshio , Hideyuki Hashi , Yuji Nakamura
IPC分类号： G11B15/29 , B65H20/00
CPC分类号： G11B15/29
摘要： A tape driving mechanism for a magnetic recording apparatus has a capstan rotated to advance a magnetic tape by pinching the magnetic tape between the capstan and a pinch roller. The pinch roller is pressed onto the magnetic tape against the capstan. The capstan surface is coated with a diamond-like carbon film which is smooth and highly wear-resistant. The difference between the tangential speed of the capstan and the tape transfer speed is almost zero. Thus, the state of contact is static. A static frictional coefficient between the diamond-like carbon film of the capstan and the magnetic tape is almost equal to twice the static frictional coefficient between the metal surface of the capstan and the magnetic tape in the conventional tape driving mechanism. The tape driving force thus remains sufficient even if the pressure exerted by the pinch roller is reduced to half the value employed in the conventional tape driving mechanism. The diamond-like carbon film may be coated on a rough surface of the capstan.
摘要翻译：用于磁记录装置的磁带驱动机构具有旋转的主导轴，以通过将磁带夹在主导轴和夹送辊之间来推进磁带。夹紧辊压靠在磁带上的磁带上。绞盘表面涂覆有平滑且高度耐磨的类金刚石碳膜。主导轴的切向速度与磁带传送速度之差几乎为零。因此，接触状态是静态的。主导轴的类金刚石碳膜与磁带之间的静态摩擦系数几乎等于传统磁带驱动机构中主导轴的金属表面与磁带之间的静态摩擦系数的两倍。因此，即使由夹送辊施加的压力减小到传统的带驱动机构中所使用的值的一半，带驱动力仍然足够。类金刚石碳膜可以涂覆在绞盘的粗糙表面上。

6. 发明授权

US5168023A Photosensitive element used in electrophotography 失效
标题翻译：用于电子照相的感光元件
公开(公告)号：US5168023A
公开(公告)日：1992-12-01
申请号：US724887
申请日：1991-07-02
申请人： Tsutomu Mitani , Hirokazu Nakaue , Hideo Kurokawa
发明人： Tsutomu Mitani , Hirokazu Nakaue , Hideo Kurokawa
IPC分类号： G03G5/14 , G03G5/147
CPC分类号： G03G5/14704 , G03G5/14
摘要： A photosensitive body has an electrically conductive substrate, and a photoconductive film formed on the substrate. A multiple optical film is formed on the photosensitive layer. The multiple optical film allows permeation of light beams in specific wavelength. Further, a diamond-like carbon film is formed on the multiple optical film. The diamond-like carbon film has thickness of at least 1,500.ANG. and Noop hardness of at least 1,000 kg/mm.sup.2. The multiple optical film and the diamond-like carbon film are provided in order to improve resistance against wear, ozone, and light.

7. 发明授权

US4835070A Magnetic recording medium and method of producing the same 失效
标题翻译：磁记录介质及其制造方法
公开(公告)号：US4835070A
公开(公告)日：1989-05-30
申请号：US772629
申请日：1985-09-04
申请人： Hideo Kurokawa , Tsutomu Mitani , Kazuo Yokoyama , Taketoshi Yonezawa
发明人： Hideo Kurokawa , Tsutomu Mitani , Kazuo Yokoyama , Taketoshi Yonezawa
IPC分类号： G11B5/66 , C08J7/00 , C08J7/04 , C08J7/06 , C09D165/00 , C10M105/50 , C10M107/38 , C10N40/18 , C10N70/00 , G11B5/64 , G11B5/65 , G11B5/72 , G11B5/725 , G11B5/78 , G11B5/84
CPC分类号： G11B5/72 , G11B5/84 , Y10S428/90 , Y10T428/265
摘要： A magnetic recording medium has a non-magnetic substrate, a magnetic layer formed on the surface of the substrate containing a ferromagnetic material, and a protective film formed on the magnetic layer. The protective film is constituted by a singular layer of continuous or dispersed molecular structures in which carbon and an element constituting the magnetic layer are bonded directly or indirectly through oxygen and at least one fluorine is bonded to the carbon. This magnetic recording medium can be produced by a method comprising preparing a substrate of a non-magnetic material, forming a magnetic layer of a ferromagnetic material on the surface of the substrate, and forming, by a plasma CVD method, a protective film of a fluorine-containing molecular body having a thickness not greater than a value equivalent to 5 .ANG. on the surface of the magnetic layer.
摘要翻译：磁记录介质具有非磁性基板，在含有铁磁材料的基板的表面上形成的磁性层和形成在磁性层上的保护膜。保护膜由连续或分散的分子结构的单一层构成，其中碳和构成磁性层的元素直接或间接地通过氧结合，并且至少一个氟与碳结合。该磁记录介质可以通过以下方法制造：制备非磁性材料的基板，在基板的表面上形成铁磁材料的磁性层，并通过等离子体CVD法形成保护膜含氟分子体的厚度不大于磁性层表面上的5 ANGSTROM的值。

8. 发明授权

US4833031A Magnetic recording medium 失效
标题翻译：磁记录介质
公开(公告)号：US4833031A
公开(公告)日：1989-05-23
申请号：US27895
申请日：1987-03-19
申请人： Hideo Kurokawa , Tsutomu Mitani , Masaru Odagiri , Taketoshi Yonezawa
发明人： Hideo Kurokawa , Tsutomu Mitani , Masaru Odagiri , Taketoshi Yonezawa
IPC分类号： G11B5/706 , G11B5/72
CPC分类号： G11B5/72 , G11B5/706 , Y10S428/90 , Y10T428/265 , Y10T428/30
摘要： A magnetic recording medium is provided with a protective film made of a diamond like carbon film and an organic compound film on a ferromagnetic metal recording film; and it realizes excellent durability and small spacing loss or the like; and as a result high density magnetic recording is obtainable.
摘要翻译：磁记录介质在铁磁性金属记录膜上设置有由类金刚石碳膜和有机化合物膜制成的保护膜; 并且实现优异的耐久性和小的间隔损耗等; 并且因此可以获得高密度磁记录。

9. 发明授权

US4717622A Magnetic recording media 失效
标题翻译：磁记录媒体
公开(公告)号：US4717622A
公开(公告)日：1988-01-05
申请号：US838814
申请日：1986-03-11
申请人： Hideo Kurokawa , Tsutomu Mitani , Taketoshi Yonezawa
发明人： Hideo Kurokawa , Tsutomu Mitani , Taketoshi Yonezawa
IPC分类号： G11B5/66 , G11B5/64 , G11B5/72 , G11B5/84
CPC分类号： G11B5/72 , Y10S428/90 , Y10T428/30 , Y10T428/31536
摘要： A magnetic recording medium has a protective layer made of high hardness carbon synthesized under a low-temperature and a low-pressure by blowing hydrocarbon gas plasma onto a magnetic recording layer. The resistance thereof is large, and therefore, high density magnetic recording can be realized in a magnetic recording system wherein the magnetic head contacts the magnetic recording medium. Durability of the magnetic recording medium is substantially improved.
摘要翻译：磁记录介质具有通过将烃气等离子体吹入磁记录层而在低温低压下合成的高硬度碳制成的保护层。其电阻大，因此可以在磁头与磁记录介质接触的磁记录系统中实现高密度磁记录。磁记录介质的耐久性显着提高。

10. 发明授权

US4645977A Plasma CVD apparatus and method for forming a diamond like carbon film 失效
标题翻译：等离子体CVD装置和形成类金刚石碳膜的方法
公开(公告)号：US4645977A
公开(公告)日：1987-02-24
申请号：US803001
申请日：1985-11-29
申请人： Hideo Kurokawa , Tsutomu Mitani , Taketoshi Yonezawa
发明人： Hideo Kurokawa , Tsutomu Mitani , Taketoshi Yonezawa
IPC分类号： C23C16/26 , C23C16/452 , H01J37/32 , H01J7/24
CPC分类号： H01J37/32623 , C23C16/26 , C23C16/452 , H01J37/32357
摘要： A plasma CVD apparatus comprises a first vacuum enclosure with a plasma generating means, an accelerating means for accelerating ions in a plasma toward a substrate and a second vacuum enclosure connected to the first vacuum enclosure, so that the plasma gas flows into the second vacuum enclosure and forms a film of uniform and superior quality at high speed.
摘要翻译：等离子体CVD装置包括具有等离子体产生装置的第一真空外壳，用于将等离子体中的离子加速朝向基板的加速装置和连接到第一真空外壳的第二真空外壳，使得等离子体气体流入第二真空外壳并以高速形成均匀优质的电影。

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