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    • 6. 发明授权
    • Optical image measurement device
    • 光学图像测量装置
    • US07643154B2
    • 2010-01-05
    • US11961195
    • 2007-12-20
    • Tsutomu KikawaHiroaki OkadaTakefumi HayashiHisashi TsukadaYasufumi Fukuma
    • Tsutomu KikawaHiroaki OkadaTakefumi HayashiHisashi TsukadaYasufumi Fukuma
    • G01B11/02
    • G01B9/02068A61B3/10A61B3/102A61B3/12G01B9/0203G01B9/02044G01B9/02064G01B9/02089G01B9/02091G01B2290/65
    • An optical image measurement device comprises: a light source configured to emit a low-coherence light; an interference-light generator configured to generate an interference light, by splitting the low-coherence light into a signal light and a reference light, and superimposing the signal light passed through a measurement object and the reference light passed through a reference object; a changer configured to change a difference in optical path length; a detector configured to detect the interference light; an image forming part configured to form an image of the measurement object within a predetermined frame based on the result of the detection; an analyzer configured to analyze the image, and specify a position of the image within the frame; and a controller configured to control the changer based on the specified position to change the difference so that an image newly formed is placed in a predetermined position within the frame.
    • 光学图像测量装置包括:被配置为发射低相干光的光源; 干涉光发生器,被配置为通过将低相干光分解为信号光和参考光来产生干涉光,并且叠加通过测量对象的信号光和通过参考对象的参考光; 更换器,被配置为改变光路长度的差异; 检测器,被配置为检测干涉光; 图像形成部,被配置为基于检测结果在预定帧内形成测量对象的图像; 分析器,其被配置为分析所述图像,并且指定所述图像在所述帧内的位置; 以及控制器,其被配置为基于所述指定位置来控制所述更换器以改变所述差异,使得新形成的图像被放置在所述帧内的预定位置。