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    • 4. 发明授权
    • Probe opening fabricating apparatus, and near-field optical microscope using the same
    • 探头开口制造装置和使用其的近场光学显微镜
    • US06812449B2
    • 2004-11-02
    • US10796088
    • 2004-03-10
    • Tsutomu InoueFuminori SatoYoshihito Narita
    • Tsutomu InoueFuminori SatoYoshihito Narita
    • H01J4014
    • G01Q60/22
    • An opening fabricating apparatus for creating an opening with desired dimensions at a mask tip of a near-field optical microscope, and a near-field optical microscope using the same are provided. The apparatus comprising: a light source 116; reflection means 140, light detection means 124; press means 128, 130 pressing a probe tip against said reflection means; storage means 142; calculation means 144 figuring out the quantity of light of the reflected light for the acquisition of said opening with desired dimensions from the calibration information stored in said storage means; and press control means 126 controlling pressing of said probe tip against said reflection means so as to allow the quantity of light of said reflected light to become equal to the quantity figured out by said calculation means. The probe opening fabricating apparatus is capable of readily fabricating an opening of desired dimensions with a high reproducibility.
    • 提供了一种用于在近场光学显微镜的掩模尖端处产生具有期望尺寸的开口的开口制造装置和使用其的近场光学显微镜。 该装置包括:光源116; 反射装置140,光检测装置124; 按压装置128,130将探针尖端压靠在所述反射装置上; 存储装置142; 计算装置144根据存储在所述存储装置中的校准信息计算用于从所述开口获取所需开口的反射光的光量; 以及按压控制装置126,控制所述探头尖靠在所述反射装置上,以便使所述反射光的光量等于由所述计算装置计算出的量。 探头开口制造装置能够以高再现性容易地制造所需尺寸的开口。
    • 7. 发明授权
    • Fiber, probe and optical head of multiple optical path array type and methods for manufacturing the same
    • 多光路阵列型光纤,探头和光头及其制造方法
    • US06813402B2
    • 2004-11-02
    • US10076302
    • 2002-02-19
    • Yoshihito NaritaTsutomu Inoue
    • Yoshihito NaritaTsutomu Inoue
    • G02B612
    • G01Q60/22G02B6/241G02B6/245Y10S977/862
    • It is an object of the present invention to provide a probe that may correspond to various styles of measurement when used in microscopes and that is also applicable to recording devices and an optical head using the same, as well as to provide a method for manufacturing such a probe in a simple and costless manner; for achieving such objects, the method for manufacturing a multiple optical path array type probe according to the present invention is arranged in that in a light guiding material including a substrate that functions as a clad and a light guiding path formed of a component that functions as a core for guiding light or as a waveguide, the light guiding material includes a plurality of light guiding paths aligned to be parallel to each other within the substrate that functions as a clad, and tip end portions of the light guiding paths are sharpened through chemical etching of an end surface that is orthogonal to the plurality of light guiding paths.
    • 本发明的目的是提供一种探针,其可以对应于在显微镜中使用时的各种测量方式,并且也可应用于记录装置和使用其的光学头,以及提供用于制造这样的方法 以简单而无成本的方式进行探索; 为了实现这些目的,根据本发明的多光路阵列型探针的制造方法的特征在于,在具有作为包层的基板的导光材料和由作为包层的部件形成的导光路径 用于引导光或作为波导的芯,所述导光材料包括在所述基板内彼此平行排列的多个导光路径,所述导光路径用作包层,并且所述导光路径的末端部分通过化学 蚀刻与多个导光路径正交的端面。