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    • 2. 发明授权
    • Micro-shape transcription method, micro-shape transcription apparatus, and optical-component manufacture method
    • 微型转录法,微型转录装置,光学元件制造方法
    • US06989114B1
    • 2006-01-24
    • US09609250
    • 2000-06-30
    • Tsuguhiro KorenagaMakoto UmetaniHiroyuki Asakura
    • Tsuguhiro KorenagaMakoto UmetaniHiroyuki Asakura
    • B29D11/00
    • B29D11/00769B29C43/021B29C59/022B29C2043/025B29C2059/023B29D11/00B29K2995/0034B29L2011/00B29L2011/0075
    • A micro-shape transcription method has preparing a mold having a transcription face on which a concavo-convex pattern is formed, pressing the transcription face against a base material softened by heating, then forcibly separating the mold from the base material to transcribe a reverse pattern of the concavo-convex pattern to the surface of the base material, wherein when assuming a temperature for pressing the mold against the base material as T1 (° C.), a temperature for separating the mold from the base material as T2 (° C.), thermal expansion coefficients of the mold and the base material as αa and αb, and the maximum distance between the transcription center of the transcription face and the concavo-convex pattern as d (mm), the following relations (1) and (2): T1≧T2   (1) |αa−αb|·(T1−T2)·d≦4×10−2   (2) are simultaneously satisfied.
    • 微型转印方法制备具有形成凹凸图案的转录面的模具,将转印面压在通过加热软化的基材上,然后强制地将模具与基材分离以转印反转图案 的凹凸图案的基底材料的表面,其中当假设将模具压在基材上的温度为T 1℃(℃)时,将模具分离的温度 基材作为T 2(℃),模具和基材的热膨胀系数为αα和αB 2, 和转录面的转录中心与凹凸图案之间的最大距离为d(mm),以下关系式(1)和(2):<?in-line-formula description =“In-Line Formulas” end =“lead”?> T <1> = T 2(1)<?in-line-formula description =“In-line Formulas”end =“tail” ?> <?in-line-fo rmulae description =“In-line Formulas”end =“lead”?> | a a (2)<?in-line-formula description =“在线公式”end =“tail”?>同时 满意。