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    • 7. 发明申请
    • Substrate cleaning apparatus
    • 基材清洗装置
    • US20070089767A1
    • 2007-04-26
    • US11585136
    • 2006-10-24
    • Yoshiharu Yamamoto
    • Yoshiharu Yamamoto
    • B08B3/00
    • B08B3/02H01L21/67051H01L21/68728
    • An apparatus for cleaning a whole substrate by ejecting a cleaning liquid from a nozzle while rotating the substrate, the apparatus comprising: two or more linear reciprocating driving sources capable of generating outputs independently of one another; a rotation shaft; two or more cam mechanisms for converting the outputs into rotating forces; two or more sets of rotation columns fixed to the rotation shaft rotatably about their respective axes to horizontally support the substrate and sandwich or release the side surface of the substrate in cooperation with one another along with their rotation; two or more transfer members capable of transferring the rotating force to the sets of rotation columns in conjunction with the cam mechanisms, respectively; and a stopper causing the rotation of the cam mechanisms to be related to the rotation of the rotation shaft.
    • 一种用于通过在旋转衬底的同时从喷嘴喷射清洁液体来清洁整个衬底的装置,该装置包括:能够彼此独立地产生输出的两个或更多个线性往复式驱动源; 旋转轴 用于将输出转换成旋转力的两个或多个凸轮机构; 两组或多组旋转柱相对于它们各自的轴线可旋转地固定到旋转轴上以水平地支撑基板并且彼此配合地夹着或释放基板的侧表面以及它们的旋转; 两个或更多个转移构件,其能够分别与凸轮机构一起将旋转力传递到旋转柱组; 并且使得凸轮机构的旋转与旋转轴的旋转相关联的止动件。
    • 8. 发明授权
    • Surface foreign matter inspecting device
    • 表面异物检查装置
    • US07046354B2
    • 2006-05-16
    • US10482544
    • 2003-02-24
    • Syunsuke KimuraYoshiharu Yamamoto
    • Syunsuke KimuraYoshiharu Yamamoto
    • G01N21/00
    • G01N21/94G01N21/8806G01N21/9501
    • A surface foreign matter inspection device is provided with which the NA can be enlarged with a simple configuration, and a shortening of the time required for foreign matter inspection as well as a high detection sensitivity can be achieved. The device is provided with an optical detection means 6 that irradiates light from an radiation optical system onto the surface of an object under inspection on a stage, reflects light scattered by foreign matter on the object under inspection and turns the reflected light into parallel light, condenses the parallel light with a condensing lens, and detects the condensed light, as well as an information processing device 100 for processing an electrical signal from the optical detection means 6 and position information regarding the foreign matter on the object under inspection 4.
    • 提供了一种能够以简单的结构扩大NA的表面异物检查装置,并且可以实现异物检查所需的时间的缩短以及高的检测灵敏度。 该装置设置有光检测装置6,其将来自辐射光学系统的光照射到被检查物体的表面上,将被异物散射的光反射到检查对象上,并将反射光转换为平行光, 将聚光透镜平行的光聚光并且检测聚光,以及用于处理来自光学检测装置6的电信号的信息处理装置100,以及关于被检查物体4上的异物的位置信息。
    • 10. 发明授权
    • Illuminating device and projector using it and built-in display unit
    • 照明装置和投影机使用它和内置的显示单元
    • US07006163B2
    • 2006-02-28
    • US10048382
    • 2001-05-24
    • Yoshiharu YamamotoMotonobu Yoshikawa
    • Yoshiharu YamamotoMotonobu Yoshikawa
    • H04N5/74
    • G02B27/104G02B26/10G02B27/1053G02B27/145H04N9/3117H04N9/3129
    • An illuminating device comprising a light source for emitting a plurality of light beams (207, 208, 209) of different colors, a plurality of rotating beam scanners (102, 103, 104) and a plurality of scanning lenses (109, 110, 111). The beam scanners have spiral reflection surfaces (102, 103, 204) formed on the outer peripheries of cylindrical bodies, Each colored light beam is shone onto each reflection surface from a direction parallel to a rotating axis, and magnified by each scanning lens after reflected to scan an illuminated area with a plurality of beams of different colors one after another. Accordingly, the illuminating device can enhance scanning linearity, reduce noise due to a minimal windage loss, and decrease costs and power consumption.
    • 一种照明装置,包括用于发射不同颜色的多个光束(207,208,209)的光源,多个旋转束扫描器(102,103,104)和多个扫描透镜(109,110,111 )。 光束扫描器具有形成在圆柱体外周上的螺旋反射面(102,103,204),每个彩色光束从平行于旋转轴的方向照射到每个反射面上,并被反射后的每个扫描透镜放大 以多个不同颜色的光束依次扫描照明区域。 因此,照明装置可以提高扫描线性,减少由于风阻的降低引起的噪音,降低成本和功耗。