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1. 发明授权

US4653352A Automatic transmission system for automobiles having hydraulic and electronic control systems 失效
标题翻译：具有液压和电子控制系统的汽车自动变速箱系统
公开(公告)号：US4653352A
公开(公告)日：1987-03-31
申请号：US683805
申请日：1984-12-19
申请人： Toshiyuki Nakao , Tamotsu Furukawa , Masanori Mori
发明人： Toshiyuki Nakao , Tamotsu Furukawa , Masanori Mori
IPC分类号： B60W30/18 , F16H63/30 , B60K20/10 , B60K20/12 , B60K20/14
CPC分类号： B60W30/18 , B60W10/02 , B60W10/06 , B60W10/10 , F16H63/3023 , B60W2710/021 , B60W2710/0605 , B60W2710/1005 , F16H2061/308 , F16H61/0009 , Y10T477/639 , Y10T477/6392 , Y10T477/6394 , Y10T74/19251 , Y10T74/19274
摘要： An automatic transmission system in an automobile having an engine, a brake, a throttle valve, a shift lever, a clutch, and transmission gears associated with synchromesh systems. The automatic transmission system includes a throttle actuator for actuating the throttle valve, a clutch actuator for actuating the clutch, a gear selection actuator for selectively actuating the synchromesh systems to shift the transmission gears, a fluid-pressure control unit for applying working fluid pressures to the gear selection actuator, and an electronic control unit for issuing control signals to the throttle actuator, the clutch actuator, and the fluid-pressure control unit in response to detected signals indicative of a rotational speed of the engine, an operation of the brake, an operative position of the throttle valve, a selected position of the shift lever, a releasing position of the clutch, and a speed of travel of the automobile.
摘要翻译：一种具有发动机，制动器，节流阀，变速杆，离合器和与同步啮合系统相关联的传动齿轮的汽车中的自动变速器系统。自动变速器系统包括用于致动节流阀的节气门致动器，用于致动离合器的离合器致动器，用于选择性地致动同步啮合系统以移动传动齿轮的齿轮选择致动器，用于将工作流体压力施加到齿轮选择致动器和电子控制单元，用于响应于表示发动机的转速的检测信号，制动器的操作，向油门致动器，离合器致动器和流体压力控制单元发出控制信号，节流阀的操作位置，变速杆的选定位置，离合器的释放位置以及汽车的行驶速度。

2. 发明授权

US08958062B2 Defect inspection method and device using same 有权
标题翻译：缺陷检查方法和装置使用相同
公开(公告)号：US08958062B2
公开(公告)日：2015-02-17
申请号：US13701834
申请日：2011-07-01
申请人： Yukihiro Shibata , Toshiyuki Nakao , Yuta Urano , Toshifumi Honda
发明人： Yukihiro Shibata , Toshiyuki Nakao , Yuta Urano , Toshifumi Honda
IPC分类号： G01N21/00 , G01N21/956 , G01N21/88 , G01N21/95
CPC分类号： G01N21/956 , G01N21/8806 , G01N21/9501
摘要： In order to enable inspections to be conducted at a sampling rate higher than the pulse oscillation frequency of a pulsed laser beam emitted from a laser light source, without damaging samples, a defect inspection method is disclosed, wherein: a single pulse of a pulsed laser beam emitted from the laser light source is split into a plurality of pulses; a sample is irradiated with this pulse-split pulsed laser beam; scattered light produced by the sample due to the irradiation is focused and detected; and defects on the sample are detected by using information obtained by focusing and detecting the scattered light from the sample. Said defect inspection method is configured such that the splitting a single pulse of the pulsed laser beam into a plurality of pulses is controlled in such a manner that the peak values of the split pulses are substantially uniform.
摘要翻译：为了使得能够以高于从激光光源发射的脉冲激光束的脉冲振荡频率的采样率进行检查，而不损害样品，公开了一种缺陷检查方法，其中：脉冲激光的单个脉冲从激光光源发射的光束被分成多个脉冲; 用脉冲分割脉冲激光束照射样品; 聚焦和检测由于照射产生的样品产生的散射光; 通过使用通过聚焦和检测来自样品的散射光获得的信息来检测样品上的缺陷。所述缺陷检查方法被配置为使得将脉冲激光束的单个脉冲分裂成多个脉冲以使得分离脉冲的峰值基本上均匀的方式被控制。

3. 发明授权

US08711347B2 Defect inspection method and device therefor 有权
标题翻译：缺陷检查方法及其设备
公开(公告)号：US08711347B2
公开(公告)日：2014-04-29
申请号：US13701030
申请日：2011-05-25
申请人： Toshifumi Honda , Yuta Urano , Yukihiro Shibata , Toshiyuki Nakao
发明人： Toshifumi Honda , Yuta Urano , Yukihiro Shibata , Toshiyuki Nakao
IPC分类号： G01N21/00
CPC分类号： G01N21/8806 , G01N21/9501 , G01N2021/8874
摘要： Disclosed is a defect inspection method which makes it possible to scan the entire surface of a sample and detect minute defects without causing thermal damage to the sample. A defect inspection method in which a pulse laser emitted from a light source is subjected to pulse division and irradiated on the surface of a sample which moves in one direction while the divided-pulse pulse laser is rotated, reflection light from the sample irradiated by the divided-pulse pulse laser is detected, the signal of the detected reflection light is processed to detect defects on the sample, and information regarding a detected defect is output to a display screen, wherein the barycentric position of the light intensity of the divided-pulse pulse laser is monitored and adjusted.
摘要翻译：公开了一种缺陷检查方法，其可以扫描样品的整个表面并检测微小缺陷而不会对样品造成热损伤。对从光源射出的脉冲激光进行脉冲分割并照射在分割脉冲激光器旋转时在一个方向上移动的样品的表面的缺陷检查方法中，检测出分割脉冲脉冲激光，检测出反射光的信号，以检测样本上的缺陷，将与检测到的缺陷有关的信息输出到显示画面，其中分割脉冲的光强度的重心位置脉冲激光被监测和调整。

4. 发明授权

US08670116B2 Method and device for inspecting for defects 有权
标题翻译：用于检查缺陷的方法和装置
公开(公告)号：US08670116B2
公开(公告)日：2014-03-11
申请号：US13700520
申请日：2011-05-20
申请人： Toshiyuki Nakao , Junguo Xu , Yuki Shimizu , Toshihiko Nakata , Toshifumi Honda , Yukihiro Shibata , Yuta Urano
发明人： Toshiyuki Nakao , Junguo Xu , Yuki Shimizu , Toshihiko Nakata , Toshifumi Honda , Yukihiro Shibata , Yuta Urano
IPC分类号： G01N21/95
CPC分类号： G01N21/95 , G01N21/9501 , G01Q60/22 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： A defect inspecting method is provided which comprises a pre-scan defect inspecting process including a pre-scan irradiating step for casting irradiation light onto the surface of a sample, a pre-scan detecting step for detecting the scattered lights, and a pre-scan defect information collecting step for obtaining information on preselected defects present on the sample surface on the basis of the scattered lights; a near-field defect inspecting process including a near-field irradiating step in which the distance between the sample surface and a near-field head is adjusted so that the sample surface is irradiated, a near-field detecting step for detecting near-field light response, and a near-field defect information collecting step for obtaining information on the preselected defects on the basis of the near-field light response; and a merging process for inspecting defects present on the sample surface by merging the pieces of information on the preselected defects.
摘要翻译：提供一种缺陷检查方法，其包括预扫描缺陷检查处理，其包括用于将照射光投射到样品表面上的预扫描照射步骤，用于检测散射光的预扫描检测步骤，以及预扫描缺陷信息收集步骤，用于基于散射光获得在样品表面上存在的预选缺陷的信息; 包括近场照射步骤的近场缺陷检查处理，其中调整样品表面和近场磁头之间的距离以照射样品表面;近场检测步骤，用于检测近场光响应和近场缺陷信息收集步骤，用于基于近场光响应获得关于预选缺陷的信息; 以及通过合并关于预选缺陷的信息来检查存在于样品表面上的缺陷的合并过程。

5. 发明授权

US08514388B2 Flaw inspecting method and device therefor 有权
标题翻译：缺陷检查方法及其装置
公开(公告)号：US08514388B2
公开(公告)日：2013-08-20
申请号：US13387120
申请日：2010-07-28
申请人： Shigenobu Maruyama , Toshifumi Honda , Toshiyuki Nakao , Yuta Urano
发明人： Shigenobu Maruyama , Toshifumi Honda , Toshiyuki Nakao , Yuta Urano
IPC分类号： G01N21/95
CPC分类号： G01N21/9501 , G01N21/47
摘要： In order to maximize the effect of signal addition during inspection of foreign substances in wafers, a device structure including line sensors arranged in plural directions is effective. Low-angle detection optical systems that detect light beams in plural azimuth directions, the light beams being scattered in low angle directions among those scattered from a linear area on a sample illuminated by illuminating means, each include a combination of a first imaging lens group (330) and a diffraction grating (340) and a combination of a second imaging lens group (333) and an image detector (350) having a plurality of light receiving surfaces. A signal processing unit processes signals from the image detectors of the low-angle detection optical systems by adding the signals from the light receiving surfaces corresponding between the image detectors.
摘要翻译：为了最大限度地发挥在晶片中异物检查期间信号增加的效果，包括沿多个方向布置的线传感器的装置结构是有效的。检测在多个方位方向上的光束的低角度检测光学系统，所述光束在从由照明装置照射的样品上的线性区域散射的那些中以低角度方向散射，各自包括第一成像透镜组（ 330）和衍射光栅（340）以及具有多个光接收表面的第二成像透镜组（333）和图像检测器（350）的组合。信号处理单元通过将来自相应于图像检测器之间的光接收表面的信号相加来处理来自低角度检测光学系统的图像检测器的信号。

6. 发明申请

US20130107247A1 Inspecting Method and Inspecting Apparatus For Substrate Surface 有权
标题翻译：基板表面检查方法及检查装置
公开(公告)号：US20130107247A1
公开(公告)日：2013-05-02
申请号：US13672742
申请日：2012-11-09
申请人： Akira Hamamatsu , Yoshimasa Oshima , Shunji Maeda , Hisae Shibuya , Yuta Urano , Toshiyuki Nakao , Shigenobu Maruyama
发明人： Akira Hamamatsu , Yoshimasa Oshima , Shunji Maeda , Hisae Shibuya , Yuta Urano , Toshiyuki Nakao , Shigenobu Maruyama
IPC分类号： G01B11/30
CPC分类号： G01B11/303 , G01N21/47 , G01N21/94 , G01N21/9501
摘要： An inspecting method and apparatus for inspecting a substrate surface includes illuminating a light to the substrate surface having a film, detection of a scattered light or reflected light from a plurality of positions of the substrate surface to obtain a plurality of electrical signals, comparison of the plurality of electrical signals and a database which indicates a relationship between the electrical signals and surface roughness, and calculation of a surface roughness value based on the result of comparison.
摘要翻译：用于检查基板表面的检查方法和装置包括将光照射到具有膜的基板表面，从基板表面的多个位置检测散射光或反射光以获得多个电信号，多个电信号和指示电信号和表面粗糙度之间的关系的数据库，以及基于比较结果的表面粗糙度值的计算。

7. 发明申请

US20110080578A1 Method and Its Apparatus For Inspecting Defects 有权
标题翻译：检测缺陷的方法及其设备
公开(公告)号：US20110080578A1
公开(公告)日：2011-04-07
申请号：US12964249
申请日：2010-12-09
申请人： Yuta Urano , Toshiyuki Nakao , Yoshimasa Oshima
发明人： Yuta Urano , Toshiyuki Nakao , Yoshimasa Oshima
IPC分类号： G01N21/88
CPC分类号： G01N21/9501 , G01N21/9503
摘要： A defect inspection apparatus is capable of inspecting an extremely small defect present on the top and edge surfaces of a sample such as a semiconductor substrate or a thin film substrate with high sensitivity and at high speed. The defect inspection apparatus has an illumination optical system, a plurality of detection optical units and a signal processor. One or more of the detection optical units receives either light diffracted from an edge portion of the sample or light diffracted from an edge grip holding the sample. The one or more of the detection optical units shields the diffracted light received by the detection optical unit based on a signal obtained by monitoring an intensity of the diffracted light received by the detection optical unit in order to inspect a sample portion located near the edge portion and a sample portion located near the edge grip.
摘要翻译：缺陷检查装置能够以高灵敏度和高速检查诸如半导体衬底或薄膜衬底的样品的顶部和边缘表面上存在的极小缺陷。缺陷检查装置具有照明光学系统，多个检测光学单元和信号处理器。一个或多个检测光学单元接收从样品的边缘部分衍射的光或从夹持样品的边缘把手衍射的光。一个或多个检测光学单元基于通过监视由检测光学单元接收的衍射光的强度而获得的信号来屏蔽由检测光学单元接收的衍射光，以便检查位于边缘部分附近的样本部分以及位于边缘把手附近的样品部分。

8. 发明授权

US07869024B2 Method and its apparatus for inspecting defects 有权
公开(公告)号：US07869024B2
公开(公告)日：2011-01-11
申请号：US12414727
申请日：2009-03-31
申请人： Yuta Urano , Toshiyuki Nakao , Yoshimasa Oshima
发明人： Yuta Urano , Toshiyuki Nakao , Yoshimasa Oshima
IPC分类号： G01N21/00 , G01J4/00
CPC分类号： G01N21/9501 , G01N21/9503
摘要： A defect inspection apparatus is capable of inspecting an extremely small defect present on the top and edge surfaces of a sample such as a semiconductor substrate or a thin film substrate with high sensitivity and at high speed. The defect inspection apparatus has an illumination optical system, a plurality of detection optical units and a signal processor. One or more of the detection optical units receives either light diffracted from an edge portion of the sample or light diffracted from an edge grip holding the sample. The one or more of the detection optical units shields the diffracted light received by the detection optical unit based on a signal obtained by monitoring an intensity of the diffracted light received by the detection optical unit in order to inspect a sample portion located near the edge portion and a sample portion located near the edge grip.

9. 发明授权

US07675613B2 Defect inspection method 失效
标题翻译：缺陷检查方法
公开(公告)号：US07675613B2
公开(公告)日：2010-03-09
申请号：US12362950
申请日：2009-01-30
申请人： Toshiyuki Nakao , Yoshimasa Oshima , Yuta Urano
发明人： Toshiyuki Nakao , Yoshimasa Oshima , Yuta Urano
IPC分类号： G01N21/00
CPC分类号： G01N21/9501 , G01N2021/887
摘要： A method for inspecting a defect of a surface of a sample includes irradiating a laser beam on the sample surface a plurality of times so that at least part of an illumination field of the laser beam on the sample surface illuminates a first area of the sample surface each of the plurality of times, detecting a plurality of scattered light rays from the first area caused by the plurality of times of irradiations, correcting errors of detection timings for the plurality of detected scattered light rays, correcting at least one of adding and averaging the plurality of scattered light rays, determining a defect on the sample surface based on a calculation result in accordance with the at least one of the adding and averaging.
摘要翻译：用于检查样品表面的缺陷的方法包括：将激光束多次照射在样品表面上，使得样品表面上的激光束的照明场的至少一部分照射样品表面的第一区域多次检测由多次照射引起的来自第一区域的多个散射光线，校正多个检测到的散射光线的检测定时的误差，校正至少一个加法和平均化多个散射光线，根据加法和平均中的至少一个，基于计算结果确定样品表面上的缺陷。

10. 发明授权

US4878400A Bias ratio levelling apparatus of a worm gear type differential 失效
标题翻译：蜗轮差速器的偏置比调平装置
公开(公告)号：US4878400A
公开(公告)日：1989-11-07
申请号：US250744
申请日：1988-09-29
申请人： Junzo Kimura , Toshiyuki Nakao
发明人： Junzo Kimura , Toshiyuki Nakao
IPC分类号： F16H1/48 , F16H48/28 , F16H48/29 , F16H48/38
CPC分类号： F16H48/29
摘要： A bias ratio levelling apparatus for a worm gear type differential include first and second shafts mounted on a common axis first and second worm gears fixedly provided in the rotational direction at opposed end portions of the two shafts, a first worm wheel directly intersected with the shafts and engaged with the first worm gear, a second worm wheel directly intersected with the shafts and engaged with the second worm gear, a rotatable member for rotatably bearing the first and second worm wheel about a central axis and for rotating first and second worm wheel about the first and second shafts. A spur gear is fixedly connected to each worm wheel for transmitting the rotation of one worm wheel to the other worm wheel by synchronization, and a spacer is interposed between the first and second worm gears and axially fixed to the rotational member in the direction of the first and second shafts.
摘要翻译：用于蜗轮式差速器的偏置比调平装置包括安装在公共轴上的第一和第二轴以及在两个轴的相对端部处沿旋转方向固定地设置的第二蜗轮，第一蜗轮与轴直接相交并与第一蜗轮啮合，与第二蜗轮直接相交并与第二蜗轮啮合的第二蜗轮，一可旋转构件，用于围绕中心轴线可旋转地支承第一和第二蜗轮，并使第一和第二蜗轮绕第第一和第二轴。正齿轮固定地连接到每个蜗轮上，用于通过同步将一个蜗轮的旋转传递到另一个蜗轮，并且间隔件插入在第一和第二蜗轮之间并沿着方向轴向地固定到旋转构件第一和第二轴。

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