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    • 8. 发明授权
    • Method of forming light-emitting element
    • 形成发光元件的方法
    • US07550305B2
    • 2009-06-23
    • US11874452
    • 2007-10-18
    • Kenji YamagataTakao YoneharaYoshinobu SekiguchiKojiro Nishi
    • Kenji YamagataTakao YoneharaYoshinobu SekiguchiKojiro Nishi
    • H01L21/00H01L21/30H01L21/46
    • H01L33/0079H01L33/08H01L33/20
    • An object of the present invention is to provide a method of forming a light-emitting element at a lower cost than a conventional cost with suppressing the deterioration of the substrate due to thermal distortion in comparison with a conventional method of recycling a substrate and further having an effect equal to that of the method of recycling a substrate. The method of forming a light-emitting element by growing a separation layer and a light-emitting layer in this order on a first substrate, bonding the light-emitting layer onto a second substrate, and removing the separation layer to form the light-emitting layer on the second substrate, includes growing a plurality of groups each containing the separation layer and light-emitting layer on the first substrate; patterning the light-emitting layer existing as a uppermost layer into an island shape, and then bonding the light-emitting layer onto the second substrate, and etching the separation layer adjacent to the light-emitting layer patterned into the island shape to form the light-emitting layer patterned into the island shape on the second substrate.
    • 本发明的目的是提供一种以比常规成本低的成本形成发光元件的方法,与常规的基板再循环方法相比,可以抑制由于热变形引起的基板的劣化,并且还具有 其效果与回收基材的方法相同。 通过在第一基板上依次生长分离层和发光层来形成发光元件的方法,将发光层接合到第二基板上,并且去除分离层以形成发光 包括在第一基板上生长各自包含分离层和发光层的多个基团; 将作为最上层存在的发光层图案化为岛状,然后将发光层接合到第二基板上,并且蚀刻与图案化为岛状的发光层相邻的分离层,以形成光 在第二基板上图案化成岛状的发光层。