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    • 8. 发明授权
    • Method of making a multi-level interconnect having a refractory metal wire and a degassed oxidized, TiN barrier layer
    • 制造具有难熔金属线和脱气氧化的TiN阻挡层的多层互连的方法
    • US06204167B1
    • 2001-03-20
    • US09159601
    • 1998-09-24
    • Toshio Taniguchi
    • Toshio Taniguchi
    • H01L214763
    • H01L23/53257H01L23/53223H01L2924/0002Y10S438/927H01L2924/00
    • A multi-level wiring structure having: a first wiring formed on an insulating surface, the first wiring containing refractory metal as a main composition thereof; an inter-level insulating film formed to cover the first wiring and having a contact hole at a predetermined region of the first wiring; a second wiring formed over said inter-level insulating film to be electrically connected to an upper surface of the first wiring at a region of the contact hole, the second wiring containing Al as a main composition thereof; and a barrier layer disposed at an interface where the first and second wirings are electrically connected, the barrier layer being made of a material different from, and substantially not reacting with, both Al and the refractory metal constituting the main composition of the first wiring. It is possible to suppress an increase of contact resistance between an upper level wiring and a lower level wiring even if refractory metal is used as the lower level wiring and heat treatment is performed after the upper level wiring is formed.
    • 一种多级布线结构,具有:形成在绝缘表面上的第一布线,所述第一布线包含难熔金属作为其主要组成; 形成为覆盖所述第一布线并且在所述第一布线的预定区域具有接触孔的层间绝缘膜; 形成在所述层间绝缘膜上的第二布线,以在所述接触孔的区域电连接到所述第一布线的上表面,所述第二布线以Al为主要成分; 以及阻挡层,其设置在所述第一和第二布线电连接的界面处,所述阻挡层由与构成所述第一布线的主要组成的所述难熔金属不同且基本上不反应的材料制成。 即使使用难熔金属作为下层布线,也可以抑制上层布线和下层布线之间的接触电阻的增加,并且在形成上层布线之后进行热处理。
    • 9. 发明授权
    • Assembly for one-way clutch, with outer ring and stator shaped so as to
reduce effects of thermal shrinkage
    • 用于单向离合器的组装,外圈和定子成形,以减少热收缩的影响
    • US5760514A
    • 1998-06-02
    • US738163
    • 1996-10-25
    • Toshio TaniguchiMasanori ArimaMasanobu UmezawaKatsumi Sekine
    • Toshio TaniguchiMasanori ArimaMasanobu UmezawaKatsumi Sekine
    • F16H41/24F16D41/06
    • F16H41/24F16H2041/246
    • The present invention is intended to provide a one-way clutch capable of preventing the inner circumferential surface of the outer ring of the one-way clutch from being deformed even when the outer ring of the one-way clutch for a stator constituting a torque converter is integrally formed with the stator made of plastic. To attain the object, in the one-way clutch for the plastic stator, wherein the bearing support portion of the stator is integrally formed in the inner circumferential direction at or near one axial end of the boss portion of the stator and the outer ring is inserted in and formed on the inner circumferential side of the boss portion so as to be integrally held, the thickness of the outer ring on the side opposite to the bearing support portion is made smaller than that on the side of the bearing support portion, or the outer diameter of the outer ring is gradually decreased in the axial direction from the end of the outer ring on the side of the bearing support portion to the other end, or a ring-shaped step portion is provided at the other axial end on the outer circumferential surface of the outer ring so that the amount of thermal shrinkage at the plastic portion on the side of the bearing support portion of the stator is made almost equal to the thermal shrinkage at the plastic portion on the opposite side.
    • 本发明旨在提供一种单向离合器,其能够防止单向离合器的外圈的内周面变形,即使构成变矩器的定子用单向离合器的外圈 与由塑料制成的定子一体形成。 为了实现该目的,在用于塑料定子的单向离合器中,其中定子的轴承支撑部分在内周方向上在定子的凸台部分的一个轴向端处或附近一体地形成,并且外圈是 插入并形成在凸台部的内周侧上以一体地保持,使外圈的与轴承支撑部相对的一侧的厚度小于轴承支撑部侧的厚度,或者 外圈的外径在轴承方向上从轴承支承部侧的端部向轴向方向逐渐减小,另一端的另一方的轴向端部设置有环状台阶部 外圈的外周面,使得定子的轴承支撑部侧的塑料部的热收缩量几乎等于塑料波的热收缩 在对面。