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    • 1. 发明申请
    • MANUFACTURING METHOD OF DISPLAY DEVICE
    • 显示装置的制造方法
    • US20120082941A1
    • 2012-04-05
    • US13251353
    • 2011-10-03
    • Toshimasa IshigakiFumio TakahashiToshiki Kaneko
    • Toshimasa IshigakiFumio TakahashiToshiki Kaneko
    • G03F7/20
    • G03F7/0392G03F7/40
    • An organic passivation film having a high transmittance and capable of setting a taper angle of a through hole within a predetermined range in a liquid crystal display device. A pixel electrode and a source electrode of a TFT are connected by way of a through hole formed in an organic passivation film. The organic passivation film having high productivity, high transmittance, and a predetermined taper angle θ of a through hole can be formed by using a chemical amplification photosensitive resin composition comprising, as a base material, an acrylic resin having a molecular weight of 4,000 to 20,000 and containing 1 to 6 wt % of a photoacid generator as the material for the organic passivation film, performing exposure and development for forming a through hole, and then performing post exposure, prebaking, and baking under appropriate conditions.
    • 一种具有高透射率并且能够将通孔的锥角设定在液晶显示装置内的预定范围内的有机钝化膜。 TFT的像素电极和源电极通过形成在有机钝化膜中的通孔连接。 有机钝化膜具有高生产率,高透射率和预定的锥角度; 可以通过使用化学增幅感光性树脂组合物形成化学增幅感光性树脂组合物,其包含作为基材的分子量为4,000〜20,000的丙烯酸树脂,含有1〜6重量%的光酸产生剂作为有机物质 钝化膜,进行曝光和显影以形成通孔,然后在合适的条件下进行后曝光,预烘烤和烘烤。
    • 2. 发明授权
    • Manufacturing method of display device
    • 显示装置的制造方法
    • US08652766B2
    • 2014-02-18
    • US13251353
    • 2011-10-03
    • Toshimasa IshigakiFumio TakahashiToshiki Kaneko
    • Toshimasa IshigakiFumio TakahashiToshiki Kaneko
    • G03F1/00G03F7/00
    • G03F7/0392G03F7/40
    • An organic passivation film having a high transmittance and capable of setting a taper angle of a through hole within a predetermined range in a liquid crystal display device. A pixel electrode and a source electrode of a TFT are connected by way of a through hole formed in an organic passivation film. The organic passivation film having high productivity, high transmittance, and a predetermined taper angle θ of a through hole can be formed by using a chemical amplification photosensitive resin composition comprising, as a base material, an acrylic resin having a molecular weight of 4,000 to 20,000 and containing 1 to 6 wt % of a photoacid generator as the material for the organic passivation film, performing exposure and development for forming a through hole, and then performing post exposure, prebaking, and baking under appropriate conditions.
    • 一种具有高透射率并且能够将通孔的锥角设定在液晶显示装置内的预定范围内的有机钝化膜。 TFT的像素电极和源电极通过形成在有机钝化膜中的通孔连接。 可以通过使用化学放大型感光性树脂组合物形成具有高生产率,高透射率和预定锥形角度的有机钝化膜,该化学增幅感光性树脂组合物包含分子量为4000〜20,000的丙烯酸树脂作为基材 并含有1至6重量%的光酸产生剂作为有机钝化膜的材料,进行用于形成通孔的曝光和显影,然后在合适的条件下进行后曝光,预烘烤和烘烤。
    • 4. 发明授权
    • Manufacturing method of liquid crystal display device
    • 液晶显示装置的制造方法
    • US08377765B2
    • 2013-02-19
    • US13067281
    • 2011-05-20
    • Hideo TanabeMasaru TakabatakeToshiki KanekoAtsushi HasegawaHiroko Sehata
    • Hideo TanabeMasaru TakabatakeToshiki KanekoAtsushi HasegawaHiroko Sehata
    • H01L21/00
    • G02F1/133345G02F1/133305G02F1/133504G02F1/133555G02F1/134363G02F1/136213G02F1/136227G02F1/1368G02F2001/13685H01L27/124H01L27/1248H01L29/78675
    • The present invention provides a liquid crystal display device having a large holding capacitance in the inside of a pixel. A liquid crystal display device includes a first substrate, a second substrate arranged to face the first substrate in an opposed manner, and liquid crystal sandwiched between the first substrate and the second substrate. The first substrate includes a video signal line, a pixel electrode, a thin film transistor having a first electrode thereof connected to the video signal line and a second electrode thereof connected to the pixel electrode, a first silicon nitride film formed above the second electrode, an organic insulation film formed above the first silicon nitride film, a capacitance electrode formed above the organic insulation film, and a second silicon nitride film formed above the capacitance electrode and below the pixel electrode. The second silicon nitride film is a film which is formed at a temperature lower than a forming temperature of the first silicon nitride film. The first silicon nitride film and the second silicon nitride film form a contact hole therein by etching both of the first silicon nitride film and the second silicon nitride film collectively by dry etching. The second electrode and the pixel electrode are connected to each other via the contact hole. A potential different from a potential applied to the pixel electrode is applied to the capacitance electrode, and a holding capacitance is formed by the pixel electrode, the second silicon nitride film and the capacitance electrode.
    • 本发明提供一种在像素内部具有大的保持电容的液晶显示装置。 液晶显示装置包括第一基板,以相对的方式与第一基板相对地布置的第二基板和夹在第一基板和第二基板之间的液晶。 第一基板包括视频信号线,像素电极,具有连接到视频信号线的第一电极的薄膜晶体管和连接到像素电极的第二电极,形成在第二电极上方的第一氮化硅膜, 形成在第一氮化硅膜上方的有机绝缘膜,形成在有机绝缘膜上方的电容电极和形成在电容电极上方和像素电极下方的第二氮化硅膜。 第二氮化硅膜是在低于第一氮化硅膜的形成温度的温度下形成的膜。 第一氮化硅膜和第二氮化硅膜通过干法蚀刻同时蚀刻第一氮化硅膜和第二氮化硅膜两者而形成接触孔。 第二电极和像素电极经由接触孔相互连接。 将施加到像素电极的电位不同的电位施加到电容电极,并且由像素电极,第二氮化硅膜和电容电极形成保持电容。