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1. 发明申请

US20110266274A1 QUARTZ ENCAPSULATED HEATER ASSEMBLY 审中-公开
标题翻译： QUARTZ加热加热器总成
公开(公告)号：US20110266274A1
公开(公告)日：2011-11-03
申请号：US12312755
申请日：2007-11-26
申请人： Toshiki Ebata , Sridhar R. Prasad , Ajay Rao , Takeshi Higuchi , Kensuke Fujimura , Akira Miyahara , Eric Witenberter
发明人： Toshiki Ebata , Sridhar R. Prasad , Ajay Rao , Takeshi Higuchi , Kensuke Fujimura , Akira Miyahara , Eric Witenberter
IPC分类号： H05B3/68
CPC分类号： H01L21/68757 , H01L21/67115 , H05B3/14
摘要： The current invention relates to a semiconductor wafer heater assembly having a frosted clear quartz material for the wafer susceptor (6) that is placed between the heater (8) and the wafer (7) such that at certain wavelengths of the emitted radiant energy from the heater (8), the frosted clear quartz material is ‘thermally transmissive’ to the thermal radiation from the infrared region. The heater assembly is characterized in that the top quartz plate or susceptor (6) on which the wafer (7) is supported is made of a material that is not “optically transmissive” but is more than 90% “thermally transmissive” to infrared emission that is shorter than 3.5 micrometer wavelength and having higher tolerance and mechanical strength than conventional clear quartz material.
摘要翻译：本发明涉及一种半导体晶片加热器组件，其具有用于晶片基座（6）的磨砂透明石英材料，晶片基座（6）放置在加热器（8）和晶片（7）之间，使得在某些波长的辐射能量加热器（8），磨砂透明石英材料对来自红外区域的热辐射是“热传导的”。加热器组件的特征在于，其上支撑晶片（7）的顶部石英板或基座（6）由不是“光学透射”但对红外发射超过90％“热传导”的材料制成短于3.5微米波长，并且具有比常规透明石英材料更高的公差和机械强度。

2. 发明申请

US20080066683A1 Assembly with Enhanced Thermal Uniformity and Method For Making Thereof 审中-公开
标题翻译：具有增强的热均匀性的组装及其制造方法
公开(公告)号：US20080066683A1
公开(公告)日：2008-03-20
申请号：US11554573
申请日：2006-10-30
申请人： Kensuke Fujimura , Akira Miyahara , Takeshi Higuchi
发明人： Kensuke Fujimura , Akira Miyahara , Takeshi Higuchi
IPC分类号： C23C16/00
CPC分类号： H01L21/67103 , H05B3/143
摘要： An assembly is provided for regulating the temperature of and supporting a heating target such as semiconductor substrate or a metal/ceramic mold or other industrial processes that require temperature regulations such as degassing or annealing. In one embodiment, the assembly comprises a heating target support for supporting the heating target ; a ceramic heating element for heating the heating target to a temperature of at least 300° C.; a first thermally conductive layer disposed between the substrate support and the ceramic heating layer; a second layer disposed below the ceramic heating layer. Both the first layer and the second layer in the heater assembly have an elastic modulus of less than 5 GPa, for biasing the ceramic heating layer without causing damage to the ceramic layer while still providing uniform and excellent heating to the substrate.
摘要翻译：提供了一种组件，用于调节加热目标如半导体基板或金属/陶瓷模具的温度和其他需要诸如脱气或退火等温度规定的工业过程。在一个实施例中，组件包括用于支撑加热靶的加热靶支撑件; 用于将加热靶加热到至少300℃的陶瓷加热元件; 设置在所述基板支撑件和所述陶瓷加热层之间的第一导热层; 设置在陶瓷加热层下方的第二层。加热器组件中的第一层和第二层都具有小于5GPa的弹性模量，用于偏压陶瓷加热层而不会对陶瓷层造成损害，同时仍然对基板提供均匀和优异的加热。

3. 发明授权

US08164028B2 Resistance heater 有权
标题翻译：电阻加热器
公开(公告)号：US08164028B2
公开(公告)日：2012-04-24
申请号：US12321284
申请日：2009-01-16
申请人： Yuji Morikawa , Yoshihiko Matsui , Akinobu Otaka , Takeshi Higuchi , Kensuke Fujimura
发明人： Yuji Morikawa , Yoshihiko Matsui , Akinobu Otaka , Takeshi Higuchi , Kensuke Fujimura
IPC分类号： H05B3/68
CPC分类号： H05B3/143 , H01L21/67103
摘要： A heater has a smooth heating surface and a recess formed on a second surface opposite to the heating surface. The recess is formed between opposite side walls in a lengthwise direction of the heater. Formation of the recess improves the electrical resistance of the heater and the opposite side walls reinforce the heater and prevent deformation of the heater when it is subjected to high temperatures in a semiconductor wafer processing device. The heater has substantially the same width along its lengthwise direction. This improves the control of heat pattern design, because the terminal end portions do not have an expanded shape.
摘要翻译：加热器具有平滑的加热表面和形成在与加热表面相对的第二表面上的凹部。凹部在加热器的长度方向上形成在相对的侧壁之间。凹部的形成提高了加热器的电阻，相对的侧壁加强了加热器，并且防止了加热器在半导体晶片处理装置中受到高温时的变形。加热器沿其长度方向具有基本上相同的宽度。这样可以改善热图案设计的控制，因为终端部分不具有扩展形状。

4. 发明授权

US08993939B2 Resistance heater 有权
标题翻译：电阻加热器
公开(公告)号：US08993939B2
公开(公告)日：2015-03-31
申请号：US13424947
申请日：2012-03-20
申请人： Yuji Morikawa , Yoshihiko Matsui , Akinobu Otaka , Takeshi Higuchi , Kensuke Fujimura , Zhong-Hao Lu
发明人： Yuji Morikawa , Yoshihiko Matsui , Akinobu Otaka , Takeshi Higuchi , Kensuke Fujimura , Zhong-Hao Lu
IPC分类号： H05B3/02 , H05B3/14 , H01L21/67
CPC分类号： H05B3/143 , H01L21/67103
摘要： A resistance heater is shown and described. The resistance heater may include a body. The body may include at least one heating surface, the heating surface being generally smooth and generally flat and a recess formed in the body, at least a portion of the body having a cross-sectional shape selected from the group consisting of: generally U shape, generally I-shape, and generally H-shape, and where the cross-sectional shape extends along at least a portion of the body.
摘要翻译：显示和描述电阻加热器。电阻加热器可以包括主体。主体可以包括至少一个加热表面，加热表面大致平滑且大致平坦，并且在主体中形成凹部，主体的至少一部分具有选自以下的横截面形状：大致U形通常为I形，通常为H形，并且其中横截面形状沿主体的至少一部分延伸。

5. 发明申请

US20090200288A1 Heater 有权
标题翻译：加热器
公开(公告)号：US20090200288A1
公开(公告)日：2009-08-13
申请号：US12321284
申请日：2009-01-16
申请人： Yuji Morikawa , Yoshihiko Matsui , Akinobu Otaka , Takeshi Higuchi , Kensuke Fujimura
发明人： Yuji Morikawa , Yoshihiko Matsui , Akinobu Otaka , Takeshi Higuchi , Kensuke Fujimura
IPC分类号： H05B3/68
CPC分类号： H05B3/143 , H01L21/67103
摘要： A heater has a smooth heating surface and a recess formed on a second surface opposite to the heating surface. The recess is formed between opposite side walls in a lengthwise direction of the heater. Formation of the recess improves the electrical resistance of the heater and the opposite side walls reinforce the heater and prevent deformation of the heater when it is subjected to high temperatures in a semiconductor wafer processing device. The heater has substantially the same width along its lengthwise direction. This improves the control of heat pattern design, because the terminal end portions do not have an expanded shape.
摘要翻译：加热器具有平滑的加热表面和形成在与加热表面相对的第二表面上的凹部。凹部在加热器的长度方向上形成在相对的侧壁之间。凹部的形成提高了加热器的电阻，相对的侧壁加强了加热器，并且防止了加热器在半导体晶片处理装置中受到高温时的变形。加热器沿其长度方向具有基本上相同的宽度。这样可以改善热图案设计的控制，因为终端部分不具有扩展形状。

6. 发明申请

US20120223069A1 RESISTANCE HEATER 有权
标题翻译：电阻加热器
公开(公告)号：US20120223069A1
公开(公告)日：2012-09-06
申请号：US13424947
申请日：2012-03-20
申请人： Yuji Morikawa , Yoshihiko Matsui , Akinobu Otaka , Takeshi Higuchi , Kensuke Fujimura , Zhong-Hao Lu
发明人： Yuji Morikawa , Yoshihiko Matsui , Akinobu Otaka , Takeshi Higuchi , Kensuke Fujimura , Zhong-Hao Lu
IPC分类号： H05B3/02
CPC分类号： H05B3/143 , H01L21/67103
摘要： A resistance heater is shown and described. The resistance heater may include a body. The body may include at least one heating surface, the heating surface being generally smooth and generally flat and a recess formed in the body, at least a portion of the body having a cross-sectional shape selected from the group consisting of: generally U shape, generally I-shape, and generally H-shape, and where the cross-sectional shape extends along at least a portion of the body.
摘要翻译：显示和描述电阻加热器。电阻加热器可以包括主体。主体可以包括至少一个加热表面，加热表面大致平滑且大致平坦，并且在主体中形成凹部，主体的至少一部分具有选自以下的横截面形状：大致U形通常为I形，通常为H形，并且其中横截面形状沿主体的至少一部分延伸。

7. 发明授权

US07221860B2 Vacuum insulated heater assembly 失效
标题翻译：真空绝热加热器总成
公开(公告)号：US07221860B2
公开(公告)日：2007-05-22
申请号：US11267771
申请日：2005-11-04
申请人： Kensuke Fujimura , John Mariner
发明人： Kensuke Fujimura , John Mariner
IPC分类号： F24H1/10 , H05B3/40
CPC分类号： H05B3/04 , H05B3/44 , H05B3/50
摘要： A vacuum heater assembly for heating fluids flowing within; the assembly comprises an inner member having a heating surface with an average cross-sectional area with an aspect ratio of at least 2. The inner member is disposed within an outer member and with a vacuum drawn in the space between the inner member and the outer member, the heat transfers toward the center of the inner member, heating the fluids flowing within.
摘要翻译：用于加热流体内的流体的真空加热器组件; 该组件包括具有平均横截面积至少为2的纵横比的加热表面的内部构件。内部构件设置在外部构件内并且在内部构件和外部构件之间的空间中被抽真空热量传递到内部构件的中心，加热流入其中的流体。

8. 发明授权

US4291549A Method of dispersing a liquid into another liquid 失效
标题翻译：将液体分散到另一种液体中的方法
公开(公告)号：US4291549A
公开(公告)日：1981-09-29
申请号：US105014
申请日：1979-12-19
申请人： Kensuke Fujimura , Naomichi Yamamoto , Masahiro Ogawa , Nobuyoshi Tanigawa
发明人： Kensuke Fujimura , Naomichi Yamamoto , Masahiro Ogawa , Nobuyoshi Tanigawa
IPC分类号： B01F5/02 , B01D9/00 , B01F3/04 , B01F3/08 , B01F7/00 , B01F7/02 , C02F1/22 , B01D9/04
CPC分类号： C02F1/22 , B01D9/0009 , B01F3/04588 , B01F3/0857 , B01F7/024 , B01F2003/0888 , B01F7/0025 , B01F7/02
摘要： A hollow, rotating drum is horizontally supported in a vessel or crystallizer containing a brine such as sea water and has a plurality of nozzles projecting radially outwardly therefrom and having orifices having a smaller diameter than the nozzles. A liquified refrigerant is introduced through a conduit and a hollow shaft into the drum and is discharged as droplets into the brine while the drum is being rotated at high speeds in the brine. Upon getting into the brine, the refrigerant is vaporized and takes away heat of the brine, which is then refrigerated to form small crystals of ice.
摘要翻译：中空旋转的滚筒水平地支撑在容纳海水等盐水的容器或结晶器中，并且具有从喷嘴径向向外突出的多个喷嘴，并具有直径比喷嘴小的孔。液化的制冷剂通过导管和空心轴引入滚筒中，并且当滚筒在盐水中以高速旋转时，液滴的制冷剂以液滴的形式被排放到盐水中。在进入盐水时，制冷剂被蒸发并吸收盐水的热量，然后将其冷却以形成小的冰晶体。

9. 发明授权

US08311123B2 TV signal processing circuit 有权
标题翻译：电视信号处理电路
公开(公告)号：US08311123B2
公开(公告)日：2012-11-13
申请号：US11946626
申请日：2007-11-28
申请人： Tetsuo Kosuge , Kensuke Fujimura , Naoki Tanahashi
发明人： Tetsuo Kosuge , Kensuke Fujimura , Naoki Tanahashi
IPC分类号： H04N7/12 , H04N7/01
CPC分类号： H04N5/4401 , H04N5/46 , H04N19/423 , H04N19/44 , H04N21/44004
摘要： When data is an HDTV signal, a buffer memory is used as two banks and pipeline processing is performed. When data is an SDTV signal, on the other hand, the buffer memory is used as a bankless buffer memory, and the pipeline processing is not performed.
摘要翻译：当数据是HDTV信号时，使用缓冲存储器作为两个存储体，并执行流水线处理。另一方面，当数据是SDTV信号时，缓冲存储器被用作无库缓冲存储器，并且不执行流水线处理。

10. 发明申请

US20080130743A1 TV SIGNAL PROCESSING CIRCUIT 有权
标题翻译：电视信号处理电路
公开(公告)号：US20080130743A1
公开(公告)日：2008-06-05
申请号：US11946626
申请日：2007-11-28
申请人： Tetsuo Kosuge , Kensuke Fujimura , Naoki Tanahashi
发明人： Tetsuo Kosuge , Kensuke Fujimura , Naoki Tanahashi
IPC分类号： H04N11/02
CPC分类号： H04N5/4401 , H04N5/46 , H04N19/423 , H04N19/44 , H04N21/44004
摘要： When data is an HDTV signal, a buffer memory is used as two banks and pipeline processing is performed. When data is an SDTV signal, on the other hand, the buffer memory is used as a bankless buffer memory, and the pipeline processing is not performed.
摘要翻译：当数据是HDTV信号时，使用缓冲存储器作为两个存储体，并执行流水线处理。另一方面，当数据是SDTV信号时，缓冲存储器被用作无库缓冲存储器，并且不执行流水线处理。

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