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    • 1. 发明申请
    • Laser device
    • 激光设备
    • US20050152430A1
    • 2005-07-14
    • US11023419
    • 2004-12-29
    • Toshikazu OnishiKazutoshi OnozawaShinji YoshidaDaisuke Ueda
    • Toshikazu OnishiKazutoshi OnozawaShinji YoshidaDaisuke Ueda
    • H01S3/105G01N21/84H01S3/08H01S5/068H01S5/10H01S5/183
    • H01S5/18394H01S5/1046H01S5/18319H01S5/1835
    • According to the present invention, a first p-side electrode 7A made of metal which is provided with regularly arranged holes 10 having a diameter smaller than a laser oscillation wavelength and a second p-side electrode 7B arranged around the periphery of the first p-type electrode 7A are used as a p-side mirror of a surface-emitting laser. Light in a resonator formed of a p-side electrode 7 and an n-type mirror 2 is first converted to a surface plasmon and then reconverted to the light by the p-side electrode 7A, and then emitted outside the resonator. This improves the light transmittance, thereby permitting use of metal which is considered to have inherently low light transmittance as a material for the p-side electrode 7. If the p-side electrode 7 is made of metal, operating voltage is reduced and heat dissipation improves, without causing a spike in a valence band, which occurs when a semiconductor layer is used. Further, due to the nonlinear effect of the mirror, optical feedback to the inside of the resonator is controlled, whereby a laser device with excellent noise characteristic is obtained.
    • 根据本发明,由金属制成的第一p侧电极7A,其具有规则排列的直径小于激光振荡波长的孔10,第二p侧电极7B布置在第一 p型电极7A用作表面发射激光器的p侧反射镜。 首先将由p侧电极7和n型反射镜2形成的谐振器中的光转换为表面等离子体,然后通过p侧电极7A再次转换为光,然后发射到谐振器外部。 这提高了透光率,从而允许使用被认为具有固有的低透光率的金属作为p侧电极7的材料。 如果p侧电极7由金属制成,则工作电压降低,散热改善,而不会在使用半导体层时发生价带的尖峰。 此外,由于反射镜的非线性效应,对谐振器内部的光反馈被控制,从而获得具有优异噪声特性的激光器件。