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    • 2. 发明授权
    • Method and apparatus for correcting axial coma in electron microscopy
    • 电子显微镜矫正轴向彗差的方法和装置
    • US5258617A
    • 1993-11-02
    • US898440
    • 1992-06-15
    • Toshikatsu KaneyamaToshikazu Honda
    • Toshikatsu KaneyamaToshikazu Honda
    • H01J37/04H01J37/153H01J37/26
    • H01J37/265H01J37/153
    • Method and apparatus for correcting the axial coma in the image created by an electron microscope without requiring skillfulness or any other peripheral device. The microscope is equipped with a beam wobbler and brings the voltage center or current center into the middle of the final image by controlling the deflection coils. The amount of the deviation of the voltage center or current center from the coma-free axis is previously found and stored in an area of a memory. This beam is tilted by the amount of the deviation read from the memory. For this purpose, a deflecting signal corresponding to the amount of the deviation is produced to the deflection coils. Therefore, once the deviation is found, the axial coma can be corrected simply and routinely by correcting the beam tilt by the amount of deviation after the voltage center or current center is brought into the middle of the final image.
    • 用于校正由电子显微镜产生的图像中的轴向彗差的方法和装置,而不需要熟练程度或任何其它外围设备。 显微镜配备有光束摆动器,并通过控制偏转线圈将电压中心或当前中心放入最终图像的中间。 预先找到电压中心或当前中心与空白轴的偏差量,并将其存储在存储器的一个区域中。 该光束被从存储器读取的偏差量倾斜。 为此,对偏转线圈产生对应于偏差量的偏转信号。 因此,一旦发现偏差,则可以简单且常规地校正轴向彗差,通过将电压中心或当前中心进入最终图像的中间之后的偏移量校正光束倾斜。
    • 3. 发明授权
    • Specimen-driving apparatus for electron microscope which tilts and
translates while preventing contact damage
    • 用于电子显微镜的样品驱动装置,其在防止接触损伤的同时倾斜和平移
    • US5264705A
    • 1993-11-23
    • US862528
    • 1992-04-02
    • Toshikazu HondaMikio NaruseToshikatsu KaneyamaYu IshibashiIkuya Nishimura
    • Toshikazu HondaMikio NaruseToshikatsu KaneyamaYu IshibashiIkuya Nishimura
    • G01Q30/02G01Q30/20H01J37/20
    • H01J37/20
    • A specimen-driving apparatus used with an electron microscope. The apparatus can translate or tilt the specimen holder while preventing it from being damaged if a human operator performs any erroneous operation. The device has X, Y, Z translation directive devices, and a tilt directive device for permitting the operator to enter instructions for translating and tilting the specimen holder. A contact detector senses that the holder is in contact with the upper magnetic pole piece. A tilt condition decision portion determines whether the holder has tilted into the positive or negative domain. A Z domain decision portion determines whether the Z coordinate of the holder lies in the positive or negative domain. When the contact of the holder with the pole piece is detected, reverse movement of the holder along the Z-axis is inhibited. Also, reverse tilting movement of the holder is inhibited. When the holder comes out of contact with the pole piece, these reverse movements are permitted.
    • 用电子显微镜使用的试样驱动装置。 如果操作人员执行任何错误的操作,该装置可以平移或倾斜试样架,同时防止其受损。 该装置具有X,Y,Z平移指示装置和倾斜指令装置,用于允许操作者输入用于平移和倾斜试样架的指令。 接触检测器感测到保持器与上磁极片接触。 倾斜条件决定部分确定保持器是否已经倾斜到正或负域。 Z域决定部分确定持有者的Z坐标是否位于正或负域。 当保持器与极片的接触被检测到时,保持器沿Z轴的反向运动被抑制。 此外,保持器的反向倾斜运动被抑制。 当支架与极片脱离接触时,允许这些反向运动。
    • 5. 发明申请
    • Electron microscope
    • 电子显微镜
    • US20050242284A1
    • 2005-11-03
    • US11102483
    • 2005-04-08
    • Toshikatsu Kaneyama
    • Toshikatsu Kaneyama
    • H01J37/05H01J37/153H01J37/26H01J47/00
    • H01J37/26H01J2237/05H01J2237/2522
    • There is disclosed an electron microscope that achieves low-magnification imaging while the objective lens is kept at high excitation in the same way as during high-magnification imaging. An objective minilens located immediately behind the objective lens demagnifies a specimen image magnified by the objective lens. Consequently, a sharply focused electron beam enters the first intermediate lens. This greatly reduces the effects of off-axis aberrations in the intermediate lenses. The first, second, and third intermediate lenses create a crossover image and a microscope image in the entrance window plane and entrance image plane, respectively, of an energy filter. The energy filter focuses the microscope image and crossover image onto the exit image plane and exit window plane, respectively. The output image from the filter is projected onto the final image plane by first and second projector lenses.
    • 公开了以与高倍率成像时相同的方式在物镜保持高激发的同时实现低倍率成像的电子显微镜。 位于物镜后面的物镜微缩镜使由物镜放大的样本图像缩小。 因此,尖锐聚焦的电子束进入第一中间透镜。 这大大降低了中间透镜中离轴像差的影响。 第一,第二和第三中间透镜分别在能量过滤器的入射窗平面和入射图像平面中产生交叉图像和显微镜图像。 能量过滤器将显微镜图像和交叉图像分别聚焦到出射图像平面和出射窗口平面。 来自滤波器的输出图像由第一和第二投影仪透镜投射到最终的图像平面上。
    • 6. 发明授权
    • Transmission electron microscope equipped with energy filter
    • 透射电子显微镜配有能量过滤器
    • US06720558B2
    • 2004-04-13
    • US10056218
    • 2002-01-24
    • Toshikatsu Kaneyama
    • Toshikatsu Kaneyama
    • H01J4944
    • H01J37/26H01J37/05
    • A transmission electron microscope (TEM) equipped with an energy filter, the microscope being characterized in that rotation of the created image or diffraction pattern is prevented. The microscope has 6 lens systems, i.e., an objective lens system, four intermediate lens systems, and a projector lens system. If the mode of operation is varied, the total sum of the products of the numbers of turns of wire on the coils of the lenses of the various lens systems including the objective lens system, the four intermediate lens systems, and the projector lens system, and their respective excitation currents is kept constant.
    • 配备有能量过滤器的透射电子显微镜(TEM),显微镜的特征在于防止了所产生的图像或衍射图案的旋转。 显微镜具有6个透镜系统,即物镜系统,四个中间透镜系统和投影透镜系统。 如果操作模式改变,则包括物镜系统,四个中间透镜系统和投影透镜系统的各种透镜系统的透镜的线圈的线圈数的乘积的总和, 并且它们各自的激励电流保持恒定。
    • 7. 发明授权
    • Energy filter
    • 能量过滤器
    • US5952656A
    • 1999-09-14
    • US982718
    • 1997-12-02
    • Toshikatsu Kaneyama
    • Toshikatsu Kaneyama
    • H01J37/248G01Q10/06G01Q30/00G21K1/087G21K1/10H01J37/05H01J37/244H01J49/44G21K3/00G21K1/08
    • H01J37/05H01J37/26H01J37/265H01J2237/055H01J2237/057
    • There is disclosed an .OMEGA.-filter for use with an electron microscope. This filter has only one parameter that controls the exciting currents supplied to four magnets M.sub.1 -M.sub.4. Only those electrons of incident electrons that have a given energy pass through the successive magnets and emerge from the filter. The coils of the magnets M.sub.1 and M.sub.4 are identical in number of turns and connected in series. Similarly, the coils of the magnets M.sub.2 and M.sub.3 are identical in number of turns and connected in series. When a human operator specifies an exciting current i.sub.1 through an entry device, a controller causes a power supply P.sub.1 to produce this exciting current i.sub.1, thus exciting the magnets M.sub.1 and M.sub.4. The controller calculates an exciting current i.sub.2 from the exciting current i.sub.1, and causes a power supply P.sub.2 to produce this exciting current i.sub.2, thus exciting the magnets M.sub.2 and M.sub.3.
    • 公开了一种用于电子显微镜的OMEGA过滤器。 该滤波器只有一个参数可以控制提供给四个磁体M1-M4的励磁电流。 只有具有给定能量的入射电子的那些电子通过连续的磁体并从滤光器出射。 磁铁M1和M4的线圈匝数相同并串联连接。 类似地,磁体M2和M3的线圈的匝数相同并串联连接。 当操作人员通过进入装置指定激励电流i1时,控制器使电源P1产生该励磁电流i1,从而激励磁体M1和M4。 控制器从励磁电流i1计算励磁电流i2,并使电源P2产生该励磁电流i2,从而激励磁体M2和M3。
    • 8. 发明授权
    • Electron microscope
    • 电子显微镜
    • US07977630B2
    • 2011-07-12
    • US11102483
    • 2005-04-08
    • Toshikatsu Kaneyama
    • Toshikatsu Kaneyama
    • H01J44/00
    • H01J37/26H01J2237/05H01J2237/2522
    • There is disclosed an electron microscope that achieves low-magnification imaging while the objective lens is kept at high excitation in the same way as during high-magnification imaging. An objective minilens located immediately behind the objective lens demagnifies a specimen image magnified by the objective lens. Consequently, a sharply focused electron beam enters the first intermediate lens. This greatly reduces the effects of off-axis aberrations in the intermediate lenses. The first, second, and third intermediate lenses create a crossover image and a microscope image in the entrance window plane and entrance image plane, respectively, of an energy filter. The energy filter focuses the microscope image and crossover image onto the exit image plane and exit window plane, respectively. The output image from the filter is projected onto the final image plane by first and second projector lenses.
    • 公开了以与高倍率成像时相同的方式在物镜保持高激发的同时实现低倍率成像的电子显微镜。 位于物镜后面的物镜微缩镜使由物镜放大的样本图像缩小。 因此,尖锐聚焦的电子束进入第一中间透镜。 这大大降低了中间透镜中离轴像差的影响。 第一,第二和第三中间透镜分别在能量过滤器的入射窗平面和入射图像平面中产生交叉图像和显微镜图像。 能量过滤器将显微镜图像和交叉图像分别聚焦到出射图像平面和出射窗口平面。 来自滤波器的输出图像由第一和第二投影仪透镜投射到最终的图像平面上。