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    • 5. 发明申请
    • SURFACE EMITTING LASER
    • 表面发射激光
    • US20120008659A1
    • 2012-01-12
    • US13176921
    • 2011-07-06
    • Yasumasa KAWAKITAHitoshi SHIMIZUTakeo KAGEYAMA
    • Yasumasa KAWAKITAHitoshi SHIMIZUTakeo KAGEYAMA
    • H01S5/323H01S5/18
    • H01S5/18311H01S5/02208H01S5/02284H01S5/02288H01S5/0425H01S5/18322H01S5/18369H01S2304/04
    • A surface emitting laser includes a cavity region formed on a group-III-V compound substrate, which includes an active layer and a current confinement layer that has an aluminum oxide compound and confines a current path through which a current is injected into the active layer, an upper DBR mirror and a lower DBR mirror formed on the substrate, sandwiching the cavity region, and a graded-composition layer disposed to contact the current confinement layer, which has an aluminum composition ratio decreasing monotonically as a distance from the current confinement layer increases. The graded-composition layer includes a first region that contacts the current confinement layer and an oxidation stop layer that contacts the first region and that has a change rate of the aluminum composition ratio larger than that of the first region. The graded-composition layer is oxidized from an interface with the current confinement layer to at least a portion of the oxidation stop layer.
    • 表面发射激光器包括形成在III-V族化合物衬底上的空腔区域,该腔体区域包括有源层和具有氧化铝化合物的电流限制层,并限制电流通过该电流通路流入有源层 ,形成在基板上的上DBR镜和下DBR镜,夹着腔区,以及设置成接触电流限制层的渐变组成层,其具有与当前限制层距离单调减小的铝组成比 增加 渐变组成层包括接触电流限制层的第一区域和与第一区域接触的氧化停止层,并且其铝组成比的变化率大于第一区域的变化率。 梯度组合物层从与电流限制层的界面氧化成氧化停止层的至少一部分。