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    • 7. 发明申请
    • 3C-sic nanowhisker and synthesizing method and 3c-sic nanowhisker
    • 3C-sic纳米晶须及其合成方法和3c-sic纳米晶须
    • US20050089680A1
    • 2005-04-28
    • US10481578
    • 2002-06-21
    • Toshihiro AndoMika Gamo
    • Toshihiro AndoMika Gamo
    • B82B1/00B82B3/00C01B31/36C30B11/00C30B25/00C30B25/10C30B29/62B32B15/04
    • B82Y30/00C01B32/956C01P2002/72C01P2002/80C01P2004/04C01P2004/16C01P2004/51C01P2004/64C30B11/00C30B25/005C30B25/105C30B29/36C30B29/605C30B29/62Y10S423/10Y10T428/259Y10T428/2993
    • The present invention offers a synthesizing method of 3C—SiC: nanowhisker wherein its diameter anid length can be controlled, it can grow on Si substrate, and wherein said method is safe and its cost is low. and said whisker cart emit visible light of various wravelength. 3C—SiC nanowhisker is formed by depositing thin film (2) made of a metal element on Si substrate (1), placing this Si substrate (1) into a plasma GVD apparaturi and by holding it for predetermined time at predetermined substrate temperature in the plasma consisting of hydrogen and hydrocarbon. Si of Si substrate 1) and C in plasma dissolve at supersaturation into metal liquid particle (3), 3C—SiC nanowhisker (4) grows on the metal liquid particle (3), whisker surface is terminated with H so to maintain the diameter constant, and the metal liquid particle (3) at whisker root takes in Si from Si substrate (1) and penetrates into Si substrate (1). This 3C—SiC nanowhicker cani be used as light-emitting material suitable to Si process, and 3C—SiC nanowhisker device which can emit light boased on quantum confinement effect and Si device can, if mixed together, form very useful device.
    • 本发明提供3C-SiC:纳米晶须的合成方法,其中可以控制其直径的长度,它可以在Si衬底上生长,并且其中所述方法是安全的并且其成本低。 并且所述晶须车发出各种波长的可见光。 通过在Si衬底(1)上沉积由金属元素制成的薄膜(2),将该Si衬底(1)放置在等离子体GVD器件中并通过在预定衬底温度下保持预定时间来形成3C-SiC纳米晶须 由氢和烃组成的等离子体。 Si衬底1的Si)和等离子体中的C在过饱和时溶解成金属液体颗粒(3),3C-SiC纳米晶须(4)在金属液体颗粒(3)上生长,晶须表面用H终止,以保持直径恒定 ,晶须根部的金属液体粒子(3)从Si基板(1)吸收Si并渗入Si基板(1)。 该3C-SiC纳米振子可用作适用于Si工艺的发光材料,并且可以发射光量子限制效应的Si-SiC纳米晶须器件,如果混合在一起形成非常有用的器件。
    • 9. 发明授权
    • Method and device for synthesizing high orientationally arranged carbon nano-tube by using organic liquid
    • 通过使用有机液体合成高取向排列碳纳米管的方法和装置
    • US07531156B2
    • 2009-05-12
    • US10481771
    • 2002-06-21
    • Toshihiro AndoMika GamoYafei Zhang
    • Toshihiro AndoMika GamoYafei Zhang
    • B82B3/00
    • B82Y30/00B01J10/007B01J2219/00094B01J2219/0013B01J2219/00263B01J2219/0884B01J2219/0894B82Y40/00C01B32/162C01B32/166C01B2202/08Y10S977/844
    • A method capable of synthesizing carbon nanotubes at low cost and large quantities, an apparatus usable for carrying out the method, and carbon nanotubes densely aligned on and firmly bonded to a Si substrate over, and oriented perpendicular to, an entire surface thereof are provided. Highly oriented, aligned carbon nanotubes are synthesized from an organic liquid by forming a substrate with a buildup thereon of a thin film or fine insular particles composed of at least one metallic element; exposing the substrate (3) having the buildup to a hydrogen plasma; and heating the substrate (3) exposed to the hydrogen plasma in the organic liquid (10) to a predetermined temperature. The synthesis apparatus comprises: a liquid chamber or tank (1) for an organic liquid; a water cooling means (2) for cooling the liquid tank (1) from its outside; a substrate holder (5) for holding a substrate (3), the holder having electrodes (4) for passing an electric current through the substrate (3); a condensing means (7) comprising water cooling tubes (6) for cooling and condensing vapor made from the organic liquid by its vaporization to return it to the liquid for return into the liquid tank (1); a valve (8) through which N2 gas is introduced; and a lid (9) that carries the substrate holder (5), the condensing means (7) and the valve (8). The organic liquid (10) is thus tightly sealed in the liquid tank (1) by the lid (9). This synthesis apparatus allows carbon nanotubes to be synthesized in large quantities, at low cost and in safety. Highly coaxially and densely oriented, aligned carbon nanotubes can be synthesized in the form of a bundle thereof, which when used in a variety of products brings about various excellent effects including extremely high usability.
    • 提供了能够以低成本和大量合成碳纳米管的方法,可用于实施该方法的装置,以及紧密地对准并牢固地结合到Si衬底并且垂直于其整个表面的碳纳米管。 通过在其上积聚由至少一种金属元素构成的薄膜或细小岛状颗粒的基板,由有机液体合成高取向的排列碳纳米管; 将具有积聚的衬底(3)暴露于氢等离子体; 以及将暴露于有机液体(10)中的氢等离子体的衬底(3)加热至预定温度。 合成装置包括:用于有机液体的液体室或罐(1); 用于从其外部冷却液体罐(1)的水冷装置(2); 用于保持基板(3)的基板保持器(5),所述保持器具有用于使电流通过所述基板(3)的电极(4); 冷凝装置(7),包括水冷却管(6),用于通过其蒸发冷却和冷凝由有机液体制成的蒸汽,以将其返回到液体以返回到液体箱(1)中; 引入N 2气体的阀(8); 以及承载基板保持件(5),冷凝装置(7)和阀(8)的盖(9)。 有机液体(10)因此通过盖(9)紧密地密封在液体罐(1)中。 该合成装置允许以低成本和安全性大量合成碳纳米管。 高度同轴且致密定向的碳纳米管可以以其束的形式合成,当用于各种产品时,可以产生包括极高的可用性的各种优异的效果。