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    • 1. 发明申请
    • VITREOUS SILICA CRUCIBLE FOR PULLING SILICON SINGLE CRYSTAL
    • 用于拉丝硅单晶的耐腐蚀二氧化硅
    • US20120137965A1
    • 2012-06-07
    • US13387384
    • 2010-07-28
    • Toshiaki SudoMasaru Sato
    • Toshiaki SudoMasaru Sato
    • C30B15/10
    • C03B19/095C30B15/10C30B29/06C30B35/002Y02P40/57Y10T117/1032
    • There is provided a vitreous silica crucible whose strength at high temperature is high, and which allows easy taking-out from a susceptor after completion of pulling. The vitreous silica crucible 10 includes a vitreous silica outer layer 13a provided on the outer surface side of the crucible, a vitreous silica inner layer 13c provided on the inner surface side of the crucible, and an vitreous silica intermediate layer 13b provided between the vitreous silica outer layer 13a and the vitreous silica inner layer 13c. The vitreous silica outer layer 13a has a mineralizer concentration of 100 ppm or more, and the vitreous silica intermediate layer 13b and the vitreous silica inner layer 13c has a mineralizer concentration of 50 ppm or less. It is preferred that the vitreous silica outer layer 13a and the vitreous silica intermediate layer 13b are made of natural silica, and the vitreous silica inner layer 13c is made of high-purity natural silica or synthetic silica. The thickness of the vitreous silica outer layer 13a is 0.5 mm to 2.0 mm on the bottom portion 10B, and the thickness on the sidewall portion 10A of the vitreous silica outer layer 13a is larger than that on the bottom portion 10B.
    • 本发明提供一种高温高强度的石英玻璃坩埚,能够在拉伸完成后从基座容易地取出。 石英玻璃坩埚10包括设置在坩埚的外表面侧的玻璃态石英外层13a,设置在坩埚的内表面侧的玻璃态二氧化硅内层13c和设置在玻璃状二氧化硅 外层13a和二氧化硅内层13c。 氧化硅外层13a的矿化剂浓度为100ppm以上,玻璃状二氧化硅中间层13b和玻璃状内壁层13c的矿化剂浓度为50ppm以下。 玻璃状二氧化硅外层13a和玻璃态二氧化硅中间层13b优选由天然二氧化硅制成,玻璃状内壁层13c由高纯度天然二氧化硅或合成二氧化硅制成。 玻璃状二氧化硅外层13a的厚度在底部10B上为0.5mm〜2.0mm,玻璃状石英外层13a的侧壁部10A的厚度大于底部10B的厚度。
    • 2. 发明授权
    • Vitreous silica crucible having outer, intermediate, and inner layers
    • 具有外层,中层和内层的玻璃硅石坩埚
    • US09187357B2
    • 2015-11-17
    • US13387384
    • 2010-07-28
    • Toshiaki SudoMasaru Sato
    • Toshiaki SudoMasaru Sato
    • C30B15/10C03B19/09C30B29/06C30B35/00
    • C03B19/095C30B15/10C30B29/06C30B35/002Y02P40/57Y10T117/1032
    • A vitreous silica crucible has high strength at high temperature, and allows easy taking-out from a susceptor after completion of pulling. The vitreous silica crucible includes a vitreous silica outer layer provided on the outer surface side of the crucible, a vitreous silica inner layer provided on the inner surface side of the crucible, and an vitreous silica intermediate layer provided between the vitreous silica outer layer and the vitreous silica inner layer. The vitreous silica outer layer has a mineralizer concentration of 100 ppm or more, and the vitreous silica intermediate layer and the vitreous silica inner layer has a mineralizer concentration of 50 ppm or less. The thickness of the vitreous silica outer layer is 0.5 mm to 2.0 mm on the bottom portion, and the thickness on the sidewall portion of the vitreous silica outer layer is larger than that on the bottom portion.
    • 石英玻璃坩埚在高温下具有高强度,并且在拉伸完成之后容易从基座中取出。 石英玻璃坩埚包括设置在坩埚的外表面侧的玻璃态石英外层,设置在坩埚的内表面侧的玻璃态二氧化硅内层和设置在玻璃状石英外层与玻璃状石英外层之间的玻璃态二氧化硅中间层, 玻璃体二氧化硅内层。 氧化硅玻璃外层的矿化剂浓度为100ppm以上,玻璃状二氧化硅中间层和玻璃状二氧化硅内层的矿化剂浓度为50ppm以下。 玻璃体外层的厚度在底部为0.5mm〜2.0mm,玻璃状二氧化硅外层的侧壁部的厚度大于底部的厚度。
    • 6. 发明申请
    • METHOD OF CALCULATING TEMPERATURE DISTRIBUTION OF CRUCIBLE
    • 计算可分解温度分布的方法
    • US20110295405A1
    • 2011-12-01
    • US13147736
    • 2010-12-14
    • Toshiaki SudoEriko SuzukiNaoki Ono
    • Toshiaki SudoEriko SuzukiNaoki Ono
    • G06F19/00
    • C03B19/095C30B15/10G06F17/5018G06F2217/80
    • Provided is a method of calculating a temperature distribution with higher accuracy than a conventional method, which calculates a temperature distribution of an inner surface of a silica powder molded body during manufacturing based on boundary conditions corrected in accordance with the actually measured temperature in consideration of plasma radiation by arc discharge and heat radiation of arc discharge.According to a method of calculating a temperature distribution of a crucible during manufacturing, includes a temperature calculation process in which a temperature calculator calculates temperature distribution in an inner surface of a silica powder molded body through a numerical calculation method which mesh-divides an object to be calculated, by calculating heat flux from heat plasma modeled by a gas flow and radiation of heat plasma radiated from arc electrodes, wherein the temperature distribution is calculated by adjusting gas flow and radiation conditions in a way that the calculated temperature distribution and the actually measured temperature distribution of an inner surface of a silica powder molded body becomes similar, and reading, from a correspondence table, gas flow and radiation conditions corresponding each step of a control sequence for producing a crucible.
    • 提供了一种比传统方法更高精度地计算温度分布的方法,该方法基于考虑到等离子体而根据实际测量的温度校正的边界条件计算制造期间二氧化硅粉末成型体的内表面的温度分布 电弧放电辐射和放电电弧放电。 根据制造时的坩埚的温度分布的计算方法,包括温度计算处理,其中温度计算器通过数值计算方法计算二氧化硅粉末成形体的内表面的温度分布, 通过计算由通过气流和从电弧电极辐射的热等离子体的辐射建立的热等离子体的热通量来计算,其中通过以计算的温度分布和实际测量的方式调节气体流量和辐射条件来计算温度分布 二氧化硅粉末成型体的内表面的温度分布变得相似,并且从对应表读取对应于用于制造坩埚的控制顺序的每个步骤的气体流量和辐射条件。
    • 10. 发明授权
    • Method of manufacturing vitreous silica crucible
    • 石英玻璃坩埚的制造方法
    • US09085480B2
    • 2015-07-21
    • US13337918
    • 2011-12-27
    • Toshiaki SudoEriko Suzuki
    • Toshiaki SudoEriko Suzuki
    • C03B20/00C03B19/09
    • C03B19/095
    • There is provided a method of manufacturing a vitreous silica crucible having a suitably controlled inner surface property. The present invention provides a method of manufacturing a vitreous silica crucible by heating and fusing a silica powder layer in a rotating mold by arc discharge generated by carbon electrodes including: a preparation process for determining optimal fusing temperatures during heating and fusing the silica powder layer at plural points of different heights of the silica powder layer; a temperature measuring process for measuring actual temperatures during heating and fusing the silica powder layer at the plural points; a temperature controlling process for controlling the actual temperatures at the plural points so that the actual temperatures matches the optimal fusing temperatures at the respective points.
    • 提供了一种具有适当控制的内表面性能的石英玻璃坩埚的制造方法。 本发明提供一种通过碳化硅电极产生的电弧放电加热熔融旋转模具中的二氧化硅粉末层而制造石英玻璃坩埚的方法,包括:在加热和熔融二氧化硅粉末层期间确定最佳定影温度的制备方法 二氧化硅粉末层的不同高度的多个点; 用于在多个点加热和熔融二氧化硅粉末层期间测量实际温度的温度测量过程; 用于控制多个点处的实际温度的温度控制过程,使得实际温度与各个点处的最佳定影温度相匹配。