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1. 发明申请

US20060284540A1 Image display device 审中-公开
标题翻译：图像显示装置
公开(公告)号：US20060284540A1
公开(公告)日：2006-12-21
申请号：US11453331
申请日：2006-06-15
申请人： Toshiaki Kusunoki , Masakazu Sagawa , Kazutaka Tsuji , Tatsumi Hirano , Etsuko Nishimura , Yoshiro Mikami , Yoshiyuki Kaneko , Tomoki Nakamura , Katsuhide Aoto
发明人： Toshiaki Kusunoki , Masakazu Sagawa , Kazutaka Tsuji , Tatsumi Hirano , Etsuko Nishimura , Yoshiro Mikami , Yoshiyuki Kaneko , Tomoki Nakamura , Katsuhide Aoto
IPC分类号： H01J1/00 , H01J19/06 , H01J1/62 , H01J63/04
CPC分类号： H01J29/481 , B82Y10/00 , H01J2201/30446 , H01J2201/3125
摘要： An object of the invention is to provide a thin-film cathode having a base electrode, an upper electrode and an electron accelerator disposed therebetween and made of an insulator or a semiconductor, wherein a diode current rises with a lower threshold voltage that that in the background art, so that a diode current required for electron emission can be secured with a low voltage, and to obtain an image display device long in life and low in power consumption. Platinum-group metal (Group VIII), noble metal belonging to Group Ib, or a laminated film, a mixed film or an alloy film of those materials containing an alkali metal oxide, an alkaline earth metal compound or a compound of transition metal belonging to Group III to VII from the interface with an electron accelerator to the surface is used as an upper electrode.
摘要翻译：本发明的目的是提供一种具有设置在其间并由绝缘体或半导体制成的基极，上电极和电子加速器的薄膜阴极，其中二极管电流以较低的阈值电压上升，因此能够以低电压确保电子发射所需的二极管电流，并获得寿命长且功耗低的图像显示装置。铂族金属（VIII族），属于Ib族的贵金属或层合膜，混合膜或含有碱金属氧化物，碱土金属化合物或过渡金属化合物的合金膜属于从与电子加速器到表面的界面的III至VII族用作上电极。

2. 发明申请

US20060202207A1 Image display device 有权
标题翻译：图像显示装置
公开(公告)号：US20060202207A1
公开(公告)日：2006-09-14
申请号：US11326519
申请日：2006-01-06
申请人： Masakazu Sagawa , Toshiaki Kusunoki , Kazutaka Tsuji , Mutsumi Suzuki
发明人： Masakazu Sagawa , Toshiaki Kusunoki , Kazutaka Tsuji , Mutsumi Suzuki
IPC分类号： H01L29/04
CPC分类号： H01J31/127 , H01J29/04 , H01J29/481
摘要： The present invention provides an image display device, by which it is possible to prevent dielectric breakdown between a bottom electrode and a top electrode (top electrode bus line), which make up thin-film type electron sources, and which is free of display defect and has longer service life. On a cathode substrate 10, a bottom electrode 11, a tunneling insulator 12, and a top electrode 13 are prepared. On a lower layer of the top electrode 13, a top electrode bus line 16 is formed, and the top electrode 13 is reliably connected to the top electrode bus line 16 via a contact electrode 15. A field insulator 12A, a lower layer 14a of the interlayer insulator deposited by sputtering and an upper layer 14b of the interlayer insulator are laminated between the top electrode 13 and the contact electrode and the bottom electrode 11, and the bottom electrode 11 is insulated from the top electrode 13 (top electrode bus line 16).
摘要翻译：本发明提供一种图像显示装置，通过该图像显示装置，可以防止构成薄膜型电子源的底部电极和顶部电极（顶部电极总线）之间的电介质击穿，并且没有显示缺陷并具有较长的使用寿命。在阴极基板10上制备底部电极11，隧道绝缘体12和顶部电极13。在顶部电极13的下层，形成顶部电极总线16，并且顶部电极13经由接触电极15可靠地连接到顶部电极母线16.场致电绝缘体12A，下层14 通过溅射沉积的层间绝缘体的a和层间绝缘体的上层14b层叠在顶部电极13和接触电极和底部电极11之间，并且底部电极11与顶部电极13（顶部电极总线16）。

3. 发明授权

US07442961B2 Image display device 有权
标题翻译：图像显示装置
公开(公告)号：US07442961B2
公开(公告)日：2008-10-28
申请号：US11326519
申请日：2006-01-06
申请人： Masakazu Sagawa , Toshiaki Kusunoki , Kazutaka Tsuji , Mutsumi Suzuki
发明人： Masakazu Sagawa , Toshiaki Kusunoki , Kazutaka Tsuji , Mutsumi Suzuki
IPC分类号： H01L29/04 , H01L27/14
CPC分类号： H01J31/127 , H01J29/04 , H01J29/481
摘要： The present invention provides an image display device, by which it is possible to prevent dielectric breakdown between a bottom electrode and a top electrode (top electrode bus line), which make up thin-film type electron sources, and which is free of display defect and has longer service life.On a cathode substrate 10, a bottom electrode 11, a tunneling insulator 12, and a top electrode 13 are prepared. On a lower layer of the top electrode 13, a top electrode bus line 16 is formed, and the top electrode 13 is reliably connected to the top electrode bus line 16 via a contact electrode 15. A field insulator 12A, a lower layer 14a of the interlayer insulator deposited by sputtering and an upper layer 14b of the interlayer insulator are laminated between the top electrode 13 and the contact electrode and the bottom electrode 11, and the bottom electrode 11 is insulated from the top electrode 13 (top electrode bus line 16).
摘要翻译：本发明提供一种图像显示装置，通过该图像显示装置，可以防止构成薄膜型电子源的底部电极和顶部电极（顶部电极总线）之间的电介质击穿，并且没有显示缺陷并具有较长的使用寿命。在阴极基板10上制备底部电极11，隧道绝缘体12和顶部电极13。在顶部电极13的下层，形成顶部电极总线16，并且顶部电极13经由接触电极15可靠地连接到顶部电极母线16.场致电绝缘体12A，下层14 通过溅射沉积的层间绝缘体的a和层间绝缘体的上层14b层叠在顶部电极13和接触电极和底部电极11之间，并且底部电极11与顶部电极13（顶部电极总线16）。

4. 发明申请

US20070001593A1 Image display device 审中-公开
标题翻译：图像显示装置
公开(公告)号：US20070001593A1
公开(公告)日：2007-01-04
申请号：US11472397
申请日：2006-06-22
申请人： Masakazu Sagawa , Hiroshi Kikuchi , Yukio Takasaki , Tomoki Nakamura , Toshiaki Kusunoki , Kazutaka Tsuji
发明人： Masakazu Sagawa , Hiroshi Kikuchi , Yukio Takasaki , Tomoki Nakamura , Toshiaki Kusunoki , Kazutaka Tsuji
IPC分类号： H01J1/62
CPC分类号： H01J1/72 , H01J9/02 , H01J29/04 , H01J31/127
摘要： The present invention provides an image display device, in which a top electrode is selectively separated by laser ablation for each scan line. As the laser, a third harmonic wave of YAG laser with a wavelength of 355 nm is used. By setting film thickness of the interlayer insulator 15 to 100 nm and film thickness of a field insulator 14 to 140 nm, reflective spectrum has the minimum value near a wavelength of 355 nm, This laser beam is projected from a top electrode 13 toward a substrate 10. A part of the projected laser beam 20 is reflected by the top electrode 13, but most of the laser beam pass through a field insulator 14 and the interlayer insulator 15 and is reflected by a bottom electrode 11. As the result of interference of these two reflection waves, the minimum value appears in reflection spectrum. In this case, the laser beam is mostly absorbed near boundary surface between the top electrode 13 and the interlayer insulator 15. The top electrode 13 is processed by ablation (melting and evaporation), and the top electrode 13 is separated at this portion. By utilizing interference phenomenon in this manner, no damage is given to the interlayer insulator 13, the field insulator 14, and the bottom electrode 11, which serve as underlying layers, and the top electrode 13 can be selectively cut off.
摘要翻译：本发明提供一种图像显示装置，其中通过每个扫描线的激光烧蚀选择性地分离顶部电极。作为激光器，使用波长为355nm的YAG激光器的三次谐波。通过将层间绝缘体15的膜厚设定为100nm，将场绝缘体14的膜厚设定为140nm，反射光的波长为355nm附近的最小值。该激光从顶部电极13朝向基板 10。投射的激光束20的一部分被顶部电极13反射，但大多数激光束通过场绝缘体14和层间绝缘体15并由底部电极11反射。作为这两个反射波的干扰的结果，最小值出现在反射光谱中。在这种情况下，激光束主要在顶部电极13和层间绝缘体15之间的边界面附近被吸收。顶部电极13通过消融（熔化和蒸发）进行处理，顶部电极13在该部分分离。通过以这种方式利用干涉现象，不会对作为下层的层间绝缘体13，场绝缘体14和底电极11以及顶电极13进行选择性地切断。

5. 发明申请

US20060066215A1 Image display device and method for manufacturing the same 审中-公开
标题翻译：图像显示装置及其制造方法
公开(公告)号：US20060066215A1
公开(公告)日：2006-03-30
申请号：US11239215
申请日：2005-09-30
申请人： Toshiaki Kusunoki , Masakazu Sagawa , Kazutaka Tsuji , Hiroshi Kikuchi , Yasushi Sano , Nobuyuki Ushifusa , Nobuhiko Fukuoka , Etsuko Nishimura , Takuya Takahashi
发明人： Toshiaki Kusunoki , Masakazu Sagawa , Kazutaka Tsuji , Hiroshi Kikuchi , Yasushi Sano , Nobuyuki Ushifusa , Nobuhiko Fukuoka , Etsuko Nishimura , Takuya Takahashi
IPC分类号： H01J63/04 , H01J1/62 , H01J1/05
CPC分类号： H01J29/02 , H01J9/02 , H01J31/127
摘要： An upper bus electrode is formed as a laminated wire of a metal film lower layer, a metal film intermediate layer and a metal film upper layer. Al lower in electrode potential is used as a low resistance material for the metal film intermediate layer of the upper bus electrode, while Cr high in heat resistance and oxidation resistance and higher in electrode potential than Al is used for the metal film lower and upper layers disposed as upper and lower layers. Al and Cr are selectively etched so that the metal film lower layer projects on one side and has an undercut on the other side with respect to the metal film intermediate layer. Thus, when the upper bus electrode has a structure using a laminated wire made of metal high in heat resistance and oxidation resistance, and metal low in resistance and sandwiched in the metal high in heat resistance and oxidation resistance, so as to separate an upper electrode from upper electrodes by self-alignment, deformation of the undercut portion due to oxidization of a side surface of the low-resistance metal is suppressed to improve the self-alignment separation characteristic of the upper electrode.
摘要翻译：上部总线电极形成为金属膜下层，金属膜中间层和金属膜上层的层叠线。电极电位的低电位被用作上部总线电极的金属膜中间层的低电阻材料，而与Al相比，耐热性和抗氧化性高，电极电位高的Cr用于金属膜下层和上层作为上层和下层排列。 Al和Cr被选择性地蚀刻，使得金属膜下层在一侧突出，并且在金属膜中间层的另一侧具有底切。因此，当上部总线电极具有使用由耐热性和抗氧化性高的金属制成的层叠线的结构，并且具有低电阻的金属并且被夹在金属中的耐热性和抗氧化性高的结构时，分离上电极通过自对准从上部电极，抑制由于低电阻金属的侧面的氧化引起的底切部分的变形，从而提高上部电极的自对准分离特性。

6. 发明申请

US20070216283A1 Image display apparatus 审中-公开
标题翻译：图像显示装置
公开(公告)号：US20070216283A1
公开(公告)日：2007-09-20
申请号：US11656487
申请日：2007-01-23
申请人： Toshiaki Kusunoki , Etsuko Nishimura , Masakazu Sagawa , Kazutaka Tsuji , Mitsuharu Ikeda
发明人： Toshiaki Kusunoki , Etsuko Nishimura , Masakazu Sagawa , Kazutaka Tsuji , Mitsuharu Ikeda
IPC分类号： H01J63/04 , H01J1/62
CPC分类号： H01J29/04 , H01J9/022 , H01J31/127
摘要： A simple method was needed for dividing up the electron emitter electrodes into individual supply electrodes. An insulator partition wall was formed on the same layer and parallel to the supply electrode for supplying power to the electron emitter electrode, an electron emitter electrodes formed across the entire surface of the image display area, a side surface of the partition wall was sliced, condensation and solubility diffusion performed by heat treatment, ablation performed by irradiating the upper surface of the silicon partition wall with a laser, Joule thermal sealing/cutting performed by conducting electricity across the scanning lines enclosing the silicon partition wall in order to slice the electron emitter electrode.
摘要翻译：需要一种简单的方法来将电子发射极分成单独的供电电极。绝缘体分隔壁形成在同一层上并平行于供给电极供给电子发射电极，形成在图像显示区域的整个表面上的电子发射电极，分隔壁的侧面切片，通过热处理进行的冷凝和溶解扩散，通过用激光照射硅分隔壁的上表面进行的烧蚀，通过在包围硅分隔壁的扫描线上传导电来进行焦耳热密封/切割，以便切割电子发射体电极。

7. 发明申请

US20060065895A1 Image display device 审中-公开
标题翻译：图像显示装置
公开(公告)号：US20060065895A1
公开(公告)日：2006-03-30
申请号：US11237785
申请日：2005-09-29
申请人： Toshiaki Kusunoki , Masakazu Sagawa , Kazutaka Tsuji
发明人： Toshiaki Kusunoki , Masakazu Sagawa , Kazutaka Tsuji
IPC分类号： H01L29/76
CPC分类号： H01J29/481 , H01J9/027
摘要： An interlayer insulator with a low taper angle is formed as a laminated film in which a silicon nitride film is formed on a silicon oxide film formed on the glass substrate side (field insulator side). Thus, an upper electrode of a cathode formed on the interlayer insulator is prevented from being broken, while a crossing portion between the upper electrode and a base electrode of the cathode is made low in capacitance. At the same time, sodium separated from glass of the substrate is blocked. Disconnection of the upper electrode is prevented due to the low taper angle of the interlayer insulator. Low capacitance is attained by increasing the film thickness of the interlayer insulator. The cathode is prevented from being contaminated with sodium separated from glass of the substrate.
摘要翻译：形成具有低锥角的层间绝缘体作为形成在玻璃基板侧（场绝缘体侧）上的氧化硅膜上形成氮化硅膜的层叠膜。因此，防止形成在层间绝缘体上的阴极的上电极破坏，同时阴极的上电极和基极之间的交叉部分的电容变小。同时，与基板玻璃分离的钠被阻断。由于层间绝缘体的锥角较小，防止了上电极的断开。通过增加层间绝缘体的膜厚可实现低电容。防止阴极被与基板玻璃分离的钠污染。

8. 发明申请

US20090039761A1 Image display apparatus 有权
标题翻译：图像显示装置
公开(公告)号：US20090039761A1
公开(公告)日：2009-02-12
申请号：US12153509
申请日：2008-05-20
申请人： Mutsumi Suzuki , Masakazu Sagawa , Toshiaki Kusunoki
发明人： Mutsumi Suzuki , Masakazu Sagawa , Toshiaki Kusunoki
IPC分类号： H01J1/62
CPC分类号： H01J29/04 , B82Y10/00 , H01J1/312 , H01J31/127 , H01J2329/0484
摘要： By making Nd concentration in the tunneling insulating film 11 smaller than Nd concentration in the base electrode first layer 16, the accumulated electric charge amount in the tunneling insulating film 11 is reduced and afterimage is decreased. By setting a relation between a position of a stack interface of the base electrode 13 and a thickness of an insulating layer properly, the generation of a device defect is prevented.
摘要翻译：通过在基极电极第一层16中使隧道绝缘膜11中的Nd浓度小于Nd浓度，隧道绝缘膜11中的累积电荷量减少，残影减少。通过适当地设定基极13的堆叠界面的位置与绝缘层的厚度之间的关系，防止了器件缺陷的产生。

9. 发明申请

US20080290781A1 Emissive Display Apparatus 审中-公开
标题翻译：发光显示装置
公开(公告)号：US20080290781A1
公开(公告)日：2008-11-27
申请号：US12124502
申请日：2008-05-21
申请人： Yoshiro MIKAMI , Toshiaki Kusunoki , Katsuhide Aoto , Tomoki Nakamura , Masakazu Sagawa
发明人： Yoshiro MIKAMI , Toshiaki Kusunoki , Katsuhide Aoto , Tomoki Nakamura , Masakazu Sagawa
IPC分类号： H01J1/62
CPC分类号： H01J31/127 , B82Y10/00 , H01J1/312 , H01J2329/0484
摘要： There is disclosed a display apparatus using a long-lived MIM electron source that is excellent in grayscale controllability. In a device including an MIM dielectric layer having a film thickness of 9.6 nm, the diode current Id rises exponentially from around 4.8 V together with the voltage. The emission current Ie rises exponentially from 4.7 V. That is, VthIe
摘要翻译：公开了使用灰度可控性优异的长寿命的MIM电子源的显示装置。在包括膜厚度为9.6nm的MIM电介质层的器件中，二极管电流Id与电压一起大约从4.8V指数地上升。发射电流Ie从4.7V指数地上升。也就是说，VthIe

10. 发明申请

US20080185955A1 Image Display Device 审中-公开
标题翻译：图像显示设备
公开(公告)号：US20080185955A1
公开(公告)日：2008-08-07
申请号：US12060942
申请日：2008-04-02
申请人： Masakazu SAGAWA , Toshimitsu Watanabe , Yoshiro Mikami , Toshiaki Kusunoki , Mutsumi Suzuki
发明人： Masakazu SAGAWA , Toshimitsu Watanabe , Yoshiro Mikami , Toshiaki Kusunoki , Mutsumi Suzuki
IPC分类号： H01J63/04
CPC分类号： H01J29/46 , H01J29/003 , H01J29/021 , H01J31/127 , H01J2329/00
摘要： An image display device which is free of display defects and with high reliability to prevent destruction of electron sources due to injection of electric charge. On an outermost periphery of a display region, there are provided a bottom electrode serving as data line, a scan line bus serving as scan line, and dummy potential fixing electrodes which do not contribute to image display, and are connected with electrodes with low impedance and constant potential.
摘要翻译：一种图像显示装置，其没有显示缺陷并且具有高可靠性以防止由于注入电荷而导致的电子源的破坏。在显示区域的最外周，设置有用作数据线的底部电极，用作扫描线的扫描线总线和对图像显示无贡献的虚拟电位固定电极，并且与低阻抗的电极连接和恒定电位。

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