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    • 3. 发明授权
    • Positive-working photoresist composition
    • 正光刻胶组合物
    • US6136504A
    • 2000-10-24
    • US280679
    • 1999-03-29
    • Shiro TanToru FujimoriToshiaki Aoai
    • Shiro TanToru FujimoriToshiaki Aoai
    • G03F7/004G03F7/039
    • G03F7/039G03F7/0045Y10S430/106Y10S430/111
    • The present invention provides an excellent chemically-sensitized positive-working photoresist composition which exhibits a high resolution and a good dimensional stability with time, generates no development residue (scum) and standing waves and is less liable to loss of lone pattern. A novel positive-working photoresist composition is provided comprising at least (a) a copolymer A having at least structural units representedby the following general formulae (I), (II) and (III), (b) a compound which generates an acid when irradiated with actinic rays or radiation and (c) a solvent: ##STR1## wherein R.sub.1 and R.sub.2 each independently represent a hydrogen atom or methyl group; R.sub.3 represents a tertiary alkyl or cycloalkyl group which may be substituted; and X represents a divalent organic residue.
    • 本发明提供了一种优异的化学敏化正性光致抗蚀剂组合物,其显示出高分辨率和随时间稳定的尺寸稳定性,不产生显影残渣(浮渣)和驻波,并且不易损失孤单图案。 提供了一种新型的正性光致抗蚀剂组合物,其包含至少(a)至少具有由以下通式(I),(II)和(III)表示的结构单元的共聚物A,(b) 用光化射线或辐射照射,和(c)溶剂:其中R1和R2各自独立地表示氢原子或甲基; R3表示可以被取代的叔烷基或环烷基; X表示二价有机残基。
    • 4. 发明授权
    • Positive quinonediazide photoresist composition containing select
hydroxyphenol additive
    • 含有选择性羟基苯酚添加剂的正醌二叠氮化物光致抗蚀剂组合物
    • US5318875A
    • 1994-06-07
    • US15921
    • 1993-02-10
    • Yasumasa KawabeToshiaki AoaiTadayoshi KokuboShiro Tan
    • Yasumasa KawabeToshiaki AoaiTadayoshi KokuboShiro Tan
    • C07C45/46G03F7/022G03F7/023G03C1/61
    • G03F7/0226C07C45/46G03F7/022
    • A positive photoresist composition includes an alkali-soluble resin, a quinonediazide compound and a compound selected from the group consisting of compounds represented by formulae (I), (II) and (III): ##STR1## wherein R.sub.1 to R.sub.27, which may be the same or different, each represents a hydrogen atom, hydroxyl group, halogen atom, alkyl group, alkoxy group, nitro group, alkenyl group, aryl group, aralkyl group, alkoxycarbonyl group, arylcarbonyl group, acyloxy group, acyl group, aryloxy group or aralkoxy group; ##STR2## wherein R.sub.31 represents an organic group, single bond, ##STR3## R.sub.32 represents a hydrogen atom, monovalent organic group or ##STR4## R.sub.33 to R.sub.37, which may be the same or different, and in which not all four groups for each of R.sub.33 to R.sub.37 may be the same at the same time, each represents a hydrogen atom, hydroxyl group, halogen atom, alkyl group, alkoxy group or alkenyl group, with the proviso that at least one of R.sub.33 to R.sub.35 is a hydroxyl group; X represents a divalent organic group; and m represents an integer 0 or 1; ##STR5## wherein R.sub.41 to R.sub.44, which may be the same or different and in which not all four groups for each of R.sub.41 to R.sub.44 may be the same at the same time, each represents a hydrogen atom, hydroxyl group, halogen atom, alkyl group, alkoxy group or alkenyl group; R.sub.45 and R.sub.46 each represents a hydrogen atom, alkyl group or ##STR6## a and c each represents an integer 0 or 1; and b represents an integer from 1 to 4.
    • 正型光致抗蚀剂组合物包括碱溶性树脂,醌二叠氮化合物和选自由式(I),(II)和(III)表示的化合物的化合物:其中R 1至R 27, 可以相同或不同,分别表示氢原子,羟基,卤素原子,烷基,烷氧基,硝基,烯基,芳基,芳烷基,烷氧基羰基,芳基羰基,酰氧基,酰基, 芳氧基或芳烷氧基; (II)其中R31表示有机基团,单键,R32表示氢原子,一价有机基团或R33至R37,其可以相同或不同,并且其中并不全部为四 R 33〜R 37各自可以相同,各自表示氢原子,羟基,卤素原子,烷基,烷氧基或烯基,条件是R 33〜R 35中的至少一个为 羟基; X表示二价有机基团; m表示0或1的整数; (III)其中R41〜R44可以相同或不同,并且其中R41至R44中的每一个不是全部四个基团可以同时相同,各自表示氢原子,羟基,卤素 原子,烷基,烷氧基或烯基; R 45和R 46各自表示氢原子,烷基或者a和c各自表示0或1的整数; b表示1〜4的整数。
    • 5. 发明授权
    • Positive photoresist composition
    • 正光致抗蚀剂组合物
    • US06638683B1
    • 2003-10-28
    • US09103544
    • 1998-06-24
    • Shiro TanToshiaki AoaiToru Fujimori
    • Shiro TanToshiaki AoaiToru Fujimori
    • G03C173
    • G03F7/039G03F7/0045Y10S430/106Y10S430/115
    • A positive photoresist composition comprises the combination of (a) Resin A obtained from an alkali-soluble resin containing phenolic hydroxyl groups by replacing from 10 to 80% of the phenolic hydroxyl groups each with a group represented by formula (I) and (b) Resin B obtained from an alkali-soluble resin containing phenolic hydroxyl groups by replacing from 10 to 80% of the phenolic hydroxyl groups each with a group represented by formula (II) or (III) or a nonpolymeric dissolution inhibitive compound which has at least one kind of group selected from tertiary alkyl ester groups and tertiary alkyl carbonate groups; wherein R1, W, n, and R4 are as defined in the specification.
    • 正型光致抗蚀剂组合物包含(a)由含有酚羟基的碱溶性树脂得到的树脂A的组合,通过用式(I)和(b)表示的基团代替10至80%的酚羟基, 通过用式(II)或(III)表示的基团代替10〜80%的酚羟基或由至少一种以上的非聚合物溶解抑制化合物代替的酚醛羟基的碱溶性树脂得到的树脂B 选自叔烷基酯基和叔烷基碳酸酯基的一类基团;其中R 1,W,n和R 4如说明书中所定义。
    • 6. 发明授权
    • Positive photosensitive composition
    • 正光敏组合物
    • US06379860B1
    • 2002-04-30
    • US09220682
    • 1998-12-23
    • Toru FujimoriYasunori TakataShiro TanToshiaki Aoai
    • Toru FujimoriYasunori TakataShiro TanToshiaki Aoai
    • G03F7004
    • G03F7/0392G03F7/0397Y10S430/115
    • A positive photosensitive composition is disclosed which comprises a compound generating an acid upon irradiation with actinic rays or a radiation and a resin having groups which decompose by the action of an acid to enhance solubility in an alkaline developing solution, said resin being obtained by reacting an alkali-soluble resin having phenolic hydroxyl groups with at least one specific enol ether compound under acid conditions in a specific organic solvent. The positive photosensitive composition shows improved discrimination between nonimage areas and image areas, has high sensitivity, high resolving power, and high heat resistance, suffers little change in performance with the lapse of time from exposure to light to heat treatment (PED), and is free from defects, e.g., development defects.
    • 公开了一种正型感光性组合物,其包含在用光化射线照射时产生酸的化合物或辐射,以及具有通过酸作用分解的基团的树脂,以增强在碱性显影液中的溶解度,所述树脂是通过使 具有酚羟基的碱溶性树脂与至少一种特定的烯醇醚化合物在酸性条件下在特定的有机溶剂中。 正型感光性组合物显示出非图像区域和图像区域之间的区分改善,具有高灵敏度,高分辨率和高耐热性,随着从曝光到热处理(PED)的时间的流逝,性能几乎没有变化,并且是 没有缺陷,例如发展缺陷。
    • 9. 发明授权
    • Positive-working photoresist compositions comprising an alkali-soluble
novolak resin made with four phenolic monomers
    • 包含由四种酚类单体制成的碱溶性酚醛清漆树脂的正性光致抗蚀剂组合物
    • US5674657A
    • 1997-10-07
    • US743592
    • 1996-11-04
    • Shiro TanYasumasa KawabeKenji Honda
    • Shiro TanYasumasa KawabeKenji Honda
    • C08L61/06G03F7/022G03F7/023G03F7/039H01L21/027
    • G03F7/0236G03F7/022
    • The invention is directed to an alkali-soluble novolak binder resin composition made by addition condensation reaction of a phenolic mixture with at least one aldehyde source, the feedstock of said phenolic mixture for the reaction comprising about 33 to about 83 mole percent of meta-cresol; about 1 to about 4 mole percent of para-cresol; about 10 to about 60 mole percent of a phenolic monomer selected from the group consisting of 2,3-xylenol, 3,4-xylenol, 3,5-xylenol and mixtures thereof; and about 5 to about 55 mole percent of a methoxy phenol monomer, the amount of aldehyde source being from about 40 to about 200 percent of the stoichiometric amount needed to react with all of the phenolic moieties in said phenolic mixture, and the alkali-soluble novolak binder resin having a weight average molecular weight (M.sub.w) of about 3,000 to about 20,000 with a molecular weight polydispersity (M.sub.w /M.sub.n) of 1.5-4.0. The invention is also directed to a positive working photoresist made from the composition.
    • 本发明涉及通过酚类混合物与至少一种醛源的加成缩合反应制备的碱溶性酚醛清漆粘合剂树脂组合物,所述用于反应的酚类混合物的原料包含约33-约83摩尔%的间甲酚 ; 约1至约4摩尔%的对 - 甲酚; 约10至约60摩尔%的选自2,3-二甲苯酚,3,4-二甲苯酚,3,5-二甲苯酚及其混合物的酚单体; 和约5至约55摩尔%的甲氧基酚单体,醛源的量为所述酚类混合物中所有酚部分反应所需化学计量的约40至约200%,碱溶性 酚醛清漆粘合剂树脂,重均分子量(Mw)约为3,000至约20,000,分子量多分散性(Mw / Mn)为1.5-4.0。 本发明还涉及由该组合物制成的正性工作光致抗蚀剂。