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    • 1. 发明申请
    • POLISHING APPARATUS HAVING TEMPERATURE REGULATOR FOR POLISHING PAD
    • 具有抛光垫温度调节器的抛光装置
    • US20120220196A1
    • 2012-08-30
    • US13397908
    • 2012-02-16
    • Toru MARUYAMATadakazu SoneYasuyuki Motoshima
    • Toru MARUYAMATadakazu SoneYasuyuki Motoshima
    • B24B37/015
    • B24B37/04B24B37/015
    • A substrate polishing apparatus includes: a polishing table supporting a polishing pad; a top ring configured to press the substrate against the polishing pad; and a pad temperature regulator configured to regulate a surface temperature of the polishing pad. The pad temperature regulator includes a pad contact element and a liquid supply system configured to supply a temperature-controlled liquid to the pad contact element. The pad contact element has a space therein and a partition that divide the space into a first liquid passage and a second liquid passage that are connected in series. At least one baffle substantially perpendicular to a radial direction of the polishing table is provided in each of the first liquid passage and the second liquid passage.
    • 衬底抛光装置包括:支撑抛光垫的抛光台; 顶环,构造成将衬底压靠在抛光垫上; 以及衬垫温度调节器,其构造成调节抛光垫的表面温度。 焊盘温度调节器包括焊盘接触元件和液体供应系统,该液体供应系统被配置为将温度控制的液体供应到焊盘接触元件。 垫接触元件在其中具有空间和将空间分成串联连接的第一液体通道和第二液体通道的隔板。 在第一液体通道和第二液体通道的每一个中设置至少一个基本上垂直于抛光台的径向的挡板。
    • 4. 发明申请
    • OIL SEPARATOR
    • 油分离器
    • US20120240537A1
    • 2012-09-27
    • US13426791
    • 2012-03-22
    • Toru MARUYAMA
    • Toru MARUYAMA
    • B01D46/42
    • F25B43/02
    • A disclosed oil separator provided in a flow path of a refrigerant gas flowing from a compressor to a refrigerator including a filter configured to form an internal space by including a filter material filtering out oil from the refrigerant gas, an upper lid bonded to an upper portion of the filter material, and a lower lid bonded to a lower portion of the filter material; a body accommodating the filter; a gas inlet pipe introducing the refrigerant gas into the internal space; and a gas outlet pipe ejecting the refrigerant gas from which the oil is filtered out by the filter from an upper portion of the body, wherein a lower end of the gas inlet pipe is opened to the internal space at a position higher than the lower lid and lower than a substantial center between the upper lid and the lower lid.
    • 一种公开的油分离器,其设置在从压缩机流向冷冻机的制冷剂气体的流路中,所述制冷剂气体包括通过包括从制冷剂气体中除去油的过滤材料构成而形成内部空间的过滤器,上盖接合到上部 的过滤材料的下部和与过滤材料的下部接合的下盖; 容纳过滤器的主体; 将制冷剂气体导入内部空间的气体导入管; 以及气体出口管,其从所述主体的上部喷射通过所述过滤器从所述过滤器排出的所述制冷剂气体,其中,所述气体导入管的下端在高于所述下盖的位置向所述内部空间开放 并且低于上盖和下盖之间的实质中心。