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    • 3. 发明授权
    • Semiconductor device and its manufacturing method
    • 半导体器件及其制造方法
    • US06674137B2
    • 2004-01-06
    • US09997593
    • 2001-11-29
    • Mitsuo Nissa
    • Mitsuo Nissa
    • H01L27108
    • H01L29/6659H01L21/26586H01L21/823425H01L21/823456
    • A semiconductor device is disclosed that can include a gate electrode (6) having a lower layer (6a) and a higher layer (6b), a mask insulating film (7) formed over a higher layer (6b). A side surface insulating film (9) may be formed on sides of a gate electrode (6) and a side wall insulating film (8) may be formed on the sides of a gate electrode (6) and mask insulating film (7). A low density impurity region (3) may be formed with a gate electrode (6) and side surface insulating film (9) as a mask. A higher density impurity region (4) may be formed with a gate electrode (6) and side wall insulating film (8) as a mask. A contact plug (10) may be formed between side wall insulating films (8) that contacts a higher density impurity region (4). A gate electrode (6) may have a reverse tapered shape when viewed in cross section. A lower layer (6a) may have a reverse tapered shape and/or a side surface insulating film (9) may have a greater thickness on sides of a higher layer (6b) than on a lower layer (6a).
    • 公开了一种半导体器件,其可以包括具有下层(6a)和更高层(6b)的栅电极(6),在较高层(6b)上形成的掩模绝缘膜(7)。 可以在栅电极(6)的侧面上形成侧面绝缘膜(9),并且可以在栅电极(6)和掩模绝缘膜(7)的侧面上形成侧壁绝缘膜(8)。 低浓度杂质区域(3)可以形成有栅电极(6)和侧面绝缘膜(9)作为掩模。 可以用栅电极(6)和侧壁绝缘膜(8)作为掩模形成更高密度的杂​​质区域(4)。 可以在接触较高密度杂质区域(4)的侧壁绝缘膜(8)之间形成接触插塞(10)。 当在横截面中观察时,栅电极(6)可以具有倒锥形形状。 下层(6a)可以具有倒锥形形状和/或侧表面绝缘膜(9)可以在较高层(6b)的侧面上比在下层(6a)上具有更大的厚度。