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    • 4. 发明申请
    • SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
    • 半导体器件及其制造方法
    • US20100327363A1
    • 2010-12-30
    • US12874770
    • 2010-09-02
    • Takashi NAKABAYASHI
    • Takashi NAKABAYASHI
    • H01L27/088H01L21/8234
    • H01L29/66795H01L29/785
    • Sidewalls are formed on side surfaces of fin-shaped active regions, and then substrate regions surrounded by a device isolation groove are formed, where the widths of each substrate region in a channel length direction and in a channel width direction are respectively larger than those of the active region. Next, the sidewalls are removed, the device isolation groove and regions between the active regions are filled with an insulator film, and the insulator film is etched such that upper surfaces of the substrate regions are exposed. Next, an impurity is implanted in an upper portion of the substrate regions to form a punch through stopper diffusion layer, thereby forming fin transistors.
    • 在翅片状有源区域的侧面形成侧壁,然后形成由器件隔离槽包围的衬底区域,其中沟道长度方向和沟道宽度方向上的每个衬底区域的宽度分别大于 活跃区域。 接下来,去除侧壁,器件隔离沟槽和有源区域之间的区域被绝缘体膜填充,并且蚀刻绝缘膜,使得衬底区域的上表面被暴露。 接下来,在衬底区域的上部注入杂质以形成穿通止动器扩散层的冲头,从而形成鳍式晶体管。