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    • 1. 发明授权
    • Method for a pre-amorphization
    • 前非晶化方法
    • US06174791B1
    • 2001-01-16
    • US09276294
    • 1999-03-25
    • Tony LinJih-Wen ChouC. C. Hsue
    • Tony LinJih-Wen ChouC. C. Hsue
    • H01L21425
    • H01L21/28518H01L21/26506H01L29/665
    • A method for forming an amorphous silicon layer over the terminals of a MOS transistor. The method includes the steps of forming a mask layer having an opening that exposes the gate polysilicon layer over the MOS transistor. Next, using the mask layer as a mask, an inactive ion implant operation is carried out such that inactive ions are implanted into the gate polysilicon layer. Thereafter, again using the mask layer as a mask, a first heavy bombarding operation is carried out, implanting ions locally. Finally, the mask layer is removed and then a second heavy bombarding operation is carried out, implanting ions globally.
    • 一种用于在MOS晶体管的端子上形成非晶硅层的方法。 该方法包括以下步骤:形成具有在MOS晶体管上暴露栅极多晶硅层的开口的掩模层。 接下来,使用掩模层作为掩模,执行非活性离子注入操作,使得非活性离子注入到栅极多晶硅层中。 此后,再次使用掩模层作为掩模,进行第一次重轰击操作,局部注入离子。 最后,去除掩模层,然后进行第二次重轰击操作,全局注入离子。
    • 2. 发明授权
    • Method for manufacturing PMOS transistor
    • 制造PMOS晶体管的方法
    • US06211027B1
    • 2001-04-03
    • US09444278
    • 1999-11-19
    • Tony LinC. C. Hsue
    • Tony LinC. C. Hsue
    • H01L21336
    • H01L29/66492H01L21/266H01L29/1083H01L29/665H01L29/6653H01L29/6659
    • A method for manufacturing a PMOS transistor. A gate terminal is formed over a substrate. Spacers are formed on the sidewalls of the gate terminal. A source/drain terminal is formed in the substrate on each side of the gate terminal, and then a metal silicide layer is formed over the top surface of the gate terminal and the substrate. The spacers are next removed. Using the metal silicide layer as a mask, a source/drain extension region is formed in the substrate between the gate terminal and the source/drain terminal. Similarly, using the metal silicide layer as a mask, an anti-punchthrough region is form in the substrate interior under the source/drain extension region.
    • 一种用于制造PMOS晶体管的方法。 栅极端子形成在基板上。 隔板形成在栅极端子的侧壁上。 源极/漏极端子形成在栅极端子的每一侧上的衬底中,然后在栅极端子和衬底的顶表面上形成金属硅化物层。 接下来移除间隔物。 使用金属硅化物层作为掩模,在栅极端子和源极/漏极端子之间的衬底中形成源极/漏极延伸区域。 类似地,使用金属硅化物层作为掩模,在源极/漏极延伸区域下方的衬底内部形成抗穿透区域。
    • 5. 发明申请
    • Display apparatus with power saving capability
    • 具有省电功能的显示装置
    • US20050110787A1
    • 2005-05-26
    • US10720432
    • 2003-11-24
    • Tony Lin
    • Tony Lin
    • G09G3/00G09G5/00H02J9/00
    • H02J9/005G09G3/00G09G2330/02G09G2330/021
    • A power control unit of a display apparatus includes an AC-to-DC converter for receiving an external AC power. A regulator receives a DC output from the converter, and is operable in one of an enabled state of outputting a target DC power when receiving a first level signal, and a disabled state of not outputting the target DC power when receiving a second level signal. An electronic switch is operable for switching from an OFF-mode, where a processor permits a delay circuit to output the second level signal to the regulator, to an ON-mode, where the electronic switch initially enables the delay circuit to output the first level signal to the regulator such that the processor receives the target DC power from the regulator and where the electronic switch outputs a trigger signal to the processor so as to enable the processor to latch the first level signal and to provide the target DC power to a display module.
    • 显示装置的电源控制单元包括用于接收外部AC电力的AC-DC转换器。 调节器从转换器接收DC输出,并且在接收到第一电平信号时可以在输出目标DC电力的使能状态中的一个中工作,以及当接收到第二电平信号时不输出目标DC电力的禁止状态。 电子开关可操作用于从处于允许延迟电路将第二电平信号输出到调节器的OFF模式切换到ON模式,其中电子开关最初使能延迟电路输出第一电平 信号到调节器,使得处理器从调节器接收目标DC电力,并且其中电子开关向处理器输出触发信号,以使得处理器能够锁存第一电平信号并向显示器提供目标DC电力 模块。
    • 6. 发明授权
    • Detachable laser pointer for golf putter
    • 高尔夫推杆可拆卸激光笔
    • US06605005B1
    • 2003-08-12
    • US10198084
    • 2002-07-19
    • Tony Lin
    • Tony Lin
    • A63B6936
    • A63B69/3614A63B69/3632A63B69/3676A63B69/3685A63B2071/0694
    • A detachable laser pointer is constructed to include a mounting base, the mounting base having a smoothly arched rear coupling groove for coupling to the shaft of a golf putter and a locating plate of C-shaped cross section upwardly extended from the smoothly arched coupling groove for plugging in between the shaft and grip of the golf putter and a front receiving groove, a joint rotatably coupled to the receiving groove, a laser module pivoted to the joint and adapted for emitting a laser beam to aim the putter head of the golf putter to the hole.
    • 可拆卸的激光指示器被构造成包括安装基座,该安装基座具有平滑拱形的后连接槽,用于联接到高尔夫推杆的轴上,以及从平滑的拱形联接槽向上延伸的C形横截面的定位板,用于 插入高尔夫推杆的轴和把手之间以及前接收槽,可旋转地联接到接收槽的接头,激光模块,其枢转到接头并适于发射激光束以使高尔夫推杆的推杆头对准 那个洞。
    • 7. 发明授权
    • Method for fabricating metal oxide semiconductor
    • 金属氧化物半导体的制造方法
    • US06190981B1
    • 2001-02-20
    • US09243740
    • 1999-02-03
    • Tony LinJih-Wen Chou
    • Tony LinJih-Wen Chou
    • H01L21336
    • H01L29/66492H01L29/4983H01L29/4991H01L29/665
    • A method of for fabrication a metal oxide semiconductor transistor is described. A substrate with an isolation structure thereon is provided. A gate oxide layer is formed on the substrate. A polysilicon layer is formed on the gate oxide layer. The polysilicon layer is patterned to form a gate on the gate oxide layer. An offset spacer is formed on the sidewall of the gate. A source/drain extension is formed in the substrate on two sides of the gate by ion implantation. An insulating spacer is formed on the sidewall of the offset spacer. A source/drain region is formed in the substrate by ion implantation using the gate, the offset spacer and the insulating spacer as a mask. Salicide is formed on the gate and on the surface of the source/drain region. After forming the salicide, the offset spacer is removed. After removing the offset spacer, a halo doped region is formed in the substrate below the source/drain extension by ion implantation.
    • 描述了制造金属氧化物半导体晶体管的方法。 提供其上具有隔离结构的基板。 在衬底上形成栅氧化层。 在栅氧化层上形成多晶硅层。 图案化多晶硅层以在栅极氧化物层上形成栅极。 在门的侧壁上形成偏移间隔物。 通过离子注入在栅极两侧的衬底中形成源极/漏极延伸。 绝缘间隔件形成在偏移间隔件的侧壁上。 通过使用栅极,偏移间隔物和绝缘间隔物作为掩模的离子注入在衬底中形成源极/漏极区。 在栅极和源极/漏极区域的表面上形成硅化物。 在形成自对准硅胶后,去除偏移间隔物。 在去除偏移间隔物之后,通过离子注入在源极/漏极延伸部下方的衬底中形成光晕掺杂区域。
    • 9. 发明授权
    • Method of manufacturing MOS device using anti reflective coating
    • 使用抗反射涂层制造MOS器件的方法
    • US6117743A
    • 2000-09-12
    • US203023
    • 1998-12-01
    • Wen-Kuan YehTony LinComing Chen
    • Wen-Kuan YehTony LinComing Chen
    • H01L21/027H01L21/28H01L21/336H01L29/49
    • H01L29/66575H01L21/0276H01L21/28061H01L21/28123H01L29/4941H01L29/66545Y10S438/952
    • A method of manufacturing MOS device including the steps of providing a semiconductor substrate that has a device isolation structure thereon, and then depositing a gate oxide layer, a polysilicon layer and an anti-reflection coating in sequence over the substrate. Next, a gate structure is patterned out of the gate oxide layer, the polysilicon layer and the anti-reflection coating. Then, spacers are formed on the sidewalls of the gate structure. Thereafter, a metal silicide layer is formed over source/drain regions. After that, an inter-layer dielectric (ILD) layer is formed over the gate structure and the entire substrate. Then, the inter-layer dielectric layer is planarized to expose the anti-reflection coating. Next, the anti-reflection coating is removed, and then a barrier layer is deposited over the inter-layer dielectric layer and the polysilicon layer. Subsequently, a conductive layer is deposited over the barrier layer. Finally, a chemical-mechanical polishing operation is carried out to planarize the conductive layer, retaining only the conductive layer above the polysilicon layer.
    • 一种制造MOS器件的方法,包括以下步骤:提供在其上具有器件隔离结构的半导体衬底,然后在衬底上依次沉积栅极氧化物层,多晶硅层和抗反射涂层。 接下来,栅极结构从栅极氧化物层,多晶硅层和抗反射涂层构图。 然后,在栅极结构的侧壁上形成间隔物。 此后,在源极/漏极区域上形成金属硅化物层。 之后,在栅极结构和整个衬底上形成层间介电层(ILD)层。 然后,层间电介质层被平坦化以暴露抗反射涂层。 接下来,去除防反射涂层,然后在层间电介质层和多晶硅层上沉积阻挡层。 随后,在阻挡层上沉积导电层。 最后,进行化学机械抛光操作以使导电层平坦化,仅在多晶硅层上保留导电层。
    • 10. 发明授权
    • Method of fabricating semiconductor devices with self-aligned silicide
    • 制造具有自对准硅化物的半导体器件的方法
    • US6025241A
    • 2000-02-15
    • US73576
    • 1998-05-06
    • Tony LinWater Lur
    • Tony LinWater Lur
    • H01L21/3115H01L21/336H01L21/28
    • H01L29/66507H01L29/6659H01L21/31155Y10S148/147
    • A method for fabricating a semiconductor device, such as a MOS (metal-oxide semiconductor) transistor, with self-aligned silicide is provided. This method can prevent junction leakage between the silicide and the substrate so as to allow the resultant semiconductor device to have reliable performance. The method includes the steps of preparing a semiconductor substrate; forming at least one transistor element over the substrate, the transistor element including a pair of source/drain regions, a gate, a dielectric layer over the gate, and a spacer on the sidewall of the gate; and performing an ion-bombardment process so as to transport one part of the dielectric layer that is adjacent to the top of the spacer to beside the bottom of the spacer. Through this method, the resultant semiconductor device is reliable in operation since the drawback of the occurrence of leakage current or short-circuit that could be otherwise resulted between the self-aligned silicide and the substrate owing to the short-channel effect can be eliminated. Moreover, the resultant semiconductor device has increased anti-static capability that can protect the semiconductor device against electro-static damage.
    • 提供了一种用于制造具有自对准硅化物的半导体器件(例如MOS(金属氧化物半导体)晶体管)的方法。 该方法可以防止硅化物与衬底之间的结漏电,从而使所得的半导体器件具有可靠的性能。 该方法包括制备半导体衬底的步骤; 在所述衬底上形成至少一个晶体管元件,所述晶体管元件包括一对源极/漏极区域,栅极,所述栅极上的电介质层以及所述栅极侧壁上的间隔物; 并且进行离子轰击处理,以将邻近间隔物顶部的电介质层的一部分输送到间隔物的底部旁边。 通过该方法,由于短沟道效应,可以消除由于短路导致的自对准硅化物和衬底之间的漏电流或短路的缺点,所以得到的半导体器件工作可靠。 此外,所得到的半导体器件具有增强的抗静电能力,可以保护半导体器件免受静电损坏。