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    • 6. 发明申请
    • METHOD AND APPARATUS FOR PROBE CONTACTING
    • 探针接触方法与装置
    • US20110133765A1
    • 2011-06-09
    • US13058861
    • 2009-07-23
    • Kazuhiro MoritaKaoru Umemura
    • Kazuhiro MoritaKaoru Umemura
    • G01R31/20
    • G01R31/2891H01J37/28H01J2237/208H01J2237/24592H01J2237/2482
    • There is provided a method and a device for accurately detecting the contact of a mechanical probe with a contact object. The contact detecting device comprises a mechanical probe movable for being in contact with a contacted object, a charged particle beam source which generates a charged particle beam applied to the contacted object, a detector for detecting secondary particles or reflected particles from the contacted object, a calculating device which calculates, from a detection signal from the detector, a feature quantity of a shadow of the mechanical probe projected on the contacted object, and a control device which controls the operation of the mechanical probe. The calculating device calculates, as the feature quantity of the shadow of the mechanical probe, a shadow depth S(x, y), and obtains an evaluation value J(z), showing a distance between the contacted object and the mechanical probe, based on the shadow depth S(x, y).
    • 提供了一种用于精确地检测机械探针与接触物体的接触的方法和装置。 接触检测装置包括可移动用于与被接触物体接触的机械探针,产生施加到接触物体的带电粒子束的带电粒子束源,用于从接触物体检测二次粒子或反射粒子的检测器, 计算装置,其根据来自检测器的检测信号计算投影在被接触物体上的机械探针的阴影的特征量;以及控制装置,其控制机械探针的操作。 计算装置作为机械探针的阴影的特征量计算阴影深度S(x,y),并且获得表示被接触物体与机械探针之间的距离的评价值J(z) 在阴影深度S(x,y)上。