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    • 7. 发明授权
    • Film bulk acoustic wave resonator and method for manufacturing the same
    • 薄膜体声波谐振器及其制造方法
    • US07893793B2
    • 2011-02-22
    • US11844809
    • 2007-08-24
    • Tomohiro IwasakiKeiji OnishiHiroshi NakatsukaTakehiko YamakawaTomohide Kamiyama
    • Tomohiro IwasakiKeiji OnishiHiroshi NakatsukaTakehiko YamakawaTomohide Kamiyama
    • H03H9/15H03H9/54H03H9/70
    • H03H9/177H03H9/173H03H9/174H03H9/175H03H9/564H03H9/605
    • A film bulk acoustic wave resonator including a piezoelectric body 1, and a first electrode 2 and a second electrode 3 that are provided respectively on the main surfaces of the piezoelectric body, the piezoelectric body being applied an electric field through the first and the second electrodes so as to generate a resonant vibration. A first mass load material portion 4 having an annular shape is provided outside the planar region of the first electrode on the main surface of the piezoelectric body, a mass load effect thereof being larger than that of the first electrode. The outer periphery of the first electrode and the inner periphery of the first mass load material portion are spaced apart from each other, whereby the first electrode and the first mass load material portion are electrically insulated from each other. The first mass load material portion has a laminated structure including a first auxiliary electrode layer 2a and a load material layer 4a formed on the auxiliary electrode layer. The first auxiliary electrode is formed with the same material to have the same thickness as the first electrode. Energy loss can be reduced, while the first mass load material portion can be formed easily with high precision.
    • 一种包括分别设置在压电体的主表面上的压电体1和第一电极2和第二电极3的薄膜体声波谐振器,压电体通过第一和第二电极施加电场 以产生共振振动。 具有环状的第一质量负荷材料部分4设置在压电体的主表面上的第一电极的平面区域的外侧,其质量负载效应大于第一电极的质量负载效应。 第一电极的外周和第一质量负载材料部的内周彼此间隔开,由此第一电极和第一质量负载材料部彼此电绝缘。 第一质量负载材料部分具有包括形成在辅助电极层上的第一辅助电极层2a和负载材料层4a的叠层结构。 第一辅助电极由相同的材料形成,以具有与第一电极相同的厚度。 能够容易地以高精度形成第一质量负荷材料部,能够减少能量损失。