专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US08658512B2 Method for forming MEMS variable capacitors 有权
标题翻译： MEMS可变电容器的形成方法
公开(公告)号：US08658512B2
公开(公告)日：2014-02-25
申请号：US13382335
申请日：2010-07-01
申请人： Tom Sterken , Geert Altena , Martijn Goedbloed , Robert Puers
发明人： Tom Sterken , Geert Altena , Martijn Goedbloed , Robert Puers
IPC分类号： H01L21/20
CPC分类号： H01G5/011 , H01G5/18
摘要： A method for fabricating an out-of-plane variable overlap MEMS capacitor comprises: providing a substrate (40) comprising a first layer (41), a second layer (42), and a third layer (43) stacked on top of one another; and etching a plurality of first trenches (70) through the third layer (43), through the second layer (42), and into the first layer (41) using a single etching mask. Etching the plurality of first trenches (70) defines a plurality of first fingers (51) in the third layer (43) and a plurality of second fingers (52) in the first layer (41). By using a single mask, the process is self-aligned. The method further comprises removing the second layer (42) in a first region where the plurality of first trenches (70) are provided, thereby forming a spacing or gap between the plurality of first fingers (51) and the plurality of second fingers (52).
摘要翻译：一种用于制造面外可变重叠MEMS电容器的方法包括：提供包括第一层（41），第二层（42）和堆叠在彼此顶部的第三层（43）的衬底（40） ; 以及通过所述第三层（43）通过所述第二层（42）蚀刻多个第一沟槽（70），并使用单个蚀刻掩模蚀刻到所述第一层（41）中。蚀刻多个第一沟槽（70）在第三层（43）中限定多个第一指状物（51）和第一层（41）中的多个第二指状物（52）。通过使用单个掩模，该过程是自对准的。该方法还包括在设置有多个第一沟槽（70）的第一区域中移除第二层（42），从而在多个第一指状物（51）和多个第二指状物（52）之间形成间隔或间隙）。

2. 发明申请

US20120171836A1 Method for Forming MEMS Variable Capacitors 有权
标题翻译： MEMS可变电容器的形成方法
公开(公告)号：US20120171836A1
公开(公告)日：2012-07-05
申请号：US13382335
申请日：2010-07-01
申请人： Tom Sterken , Geert Altena , Martijn Goedbloed , Robert Puers
发明人： Tom Sterken , Geert Altena , Martijn Goedbloed , Robert Puers
IPC分类号： H01L21/02
CPC分类号： H01G5/011 , H01G5/18
摘要： A method for fabricating an out-of-plane variable overlap MEMS capacitor comprises: providing a substrate (40) comprising a first layer (41), a second layer (42), and a third layer (43) stacked on top of one another; and etching a plurality of first trenches (70) through the third layer (43), through the second layer (42), and into the first layer (41) using a single etching mask. Etching the plurality of first trenches (70) defines a plurality of first fingers (51) in the third layer (43) and a plurality of second fingers (52) in the first layer (41). By using a single mask, the process is self-aligned. The method further comprises removing the second layer (42) in a first region where the plurality of first trenches (70) are provided, thereby forming a spacing or gap between the plurality of first fingers (51) and the plurality of second fingers (52).
摘要翻译：一种用于制造面外可变重叠MEMS电容器的方法包括：提供包括第一层（41），第二层（42）和堆叠在彼此顶部的第三层（43）的衬底（40） ; 以及通过所述第三层（43）通过所述第二层（42）蚀刻多个第一沟槽（70），并使用单个蚀刻掩模蚀刻到所述第一层（41）中。蚀刻多个第一沟槽（70）在第三层（43）中限定多个第一指状物（51）和第一层（41）中的多个第二指状物（52）。通过使用单个掩模，该过程是自对准的。该方法还包括在设置有多个第一沟槽（70）的第一区域中移除第二层（42），从而在多个第一指状物（51）和多个第二指状物（52）之间形成间隔或间隙）。

3. 发明授权

US09028399B2 Intracorporeal videocapsule with swiveling image pickup 有权
标题翻译：具有旋转图像拾取的体内视频胶囊
公开(公告)号：US09028399B2
公开(公告)日：2015-05-12
申请号：US11867324
申请日：2007-10-04
申请人： Klaus M. Irion , Fritz Hensler , Christine Harendt , Heinz-Gerhard Graf , Robert Puers , David Turgis , Bert Lenaerts , Alberto Arena , Arianna Menciassi , Vassilis Kodogiannis
发明人： Klaus M. Irion , Fritz Hensler , Christine Harendt , Heinz-Gerhard Graf , Robert Puers , David Turgis , Bert Lenaerts , Alberto Arena , Arianna Menciassi , Vassilis Kodogiannis
IPC分类号： A61B1/06 , A61B1/04 , A61B1/00
CPC分类号： A61B1/041 , A61B1/00016 , A61B1/00029 , A61B1/00032 , A61B1/00183 , A61B2560/0219
摘要： The invention relates to an intracorporeal probe (10), for example preferably for examining hollow organs or natural or artificially created body cavities in the human or animal body, the probe (10) being designed in the form of a capsule that can be introduced into the body without external connecting elements, comprising an elongate housing (16) and an image pickup unit (26) inside the housing (16) that is designed for optically recording a region (pickup region) outside the probe (10). The image pickup unit (26) is held in a fashion capable of moving inside the housing (16) in order to vary the pickup region by means of such a movement (FIG. 1).
摘要翻译：本发明涉及一种体内探针（10），例如优选地用于检查人或动物体中的中空器官或天然或人造创造的体腔，所述探针（10）被设计成胶囊的形式，其可以被引入所述主体没有外部连接元件，包括在所述壳体（16）内的细长壳体（16）和图像拾取单元（26），所述图像拾取单元设计成用于光学地记录所述探针（10）外部的区域（拾取区域）。图像拾取单元（26）以能够在壳体（16）内移动以便通过这种移动（图1）改变拾取区域的方式被保持。

4. 发明申请

US20090019847A1 Stepping Actuator and Method of Fabrication 失效
标题翻译：步进执行器和制造方法
公开(公告)号：US20090019847A1
公开(公告)日：2009-01-22
申请号：US12172323
申请日：2008-07-14
申请人： Mehmet Akif Erismis , Hercules Pereira Neves , Chris Van Hoof , Robert Puers
发明人： Mehmet Akif Erismis , Hercules Pereira Neves , Chris Van Hoof , Robert Puers
IPC分类号： F03G7/06 , H02H7/00 , B81C1/00
CPC分类号： H02N1/008 , Y10T29/53143
摘要： The current invention provides a stepping actuator, achieving large range up to ±35 μm with low operating voltages of 15V or lower and large output forces of up to ±110 μN. The actuator has an in-plane-angular deflection conversion which allows achieving step sizes varying from few nanometers to few micrometers with a minor change in the design. According to certain embodiments of the invention, the stepping actuator comprises a geometrical structure with a displacement magnification ratio of between 0.15 and 2 at operating voltages of 15V or lower. The present invention also provides a method for forming such stepping actuators.
摘要翻译：本发明提供了一个步进致动器，实现了高达±35 mum的大范围，低工作电压为15V或更低，输出力高达±110μN。致动器具有面内角度偏转转换，其允许实现从几纳米到几微米变化的步长，同时设计的微小变化。根据本发明的某些实施例，步进致动器包括在15V或更低的工作电压下的位移放大率在0.15和2之间的几何结构。本发明还提供了一种形成这种踏板式致动器的方法。

5. 发明授权

US08876576B2 Method for sharpening microprobe tips 有权
标题翻译：锐化微针尖的方法
公开(公告)号：US08876576B2
公开(公告)日：2014-11-04
申请号：US13473877
申请日：2012-05-17
申请人： Arno Aarts , Robert Puers
发明人： Arno Aarts , Robert Puers
IPC分类号： B24B19/16 , A61B5/04 , A61B5/00
CPC分类号： A61B5/04001 , A61B5/685 , A61B2562/125 , B24B19/16
摘要： The present disclosure is related to a method for sharpening the tip of a microprobe, in particular a neural probe or an array of neuroprobes having a common base portion. The probes have a constant thickness and a chisel-shaped tip portion. The probes are attached to the slanted side of a wedge-shaped carrier, with the probe tips placed in close proximity to the edge of the carrier, for example extending over said edge. The base of the carrier is then subjected to a grinding step, possibly followed by a polishing step, so that the probe tips of the probes are ground to form a sharp pointed tip shape.
摘要翻译：本公开涉及一种用于锐化微探针的尖端的方法，特别是具有公共基部的神经探针或神经元阵列。探针具有恒定的厚度和凿状的尖端部分。探针附接到楔形载体的倾斜侧，探针尖端放置在载体的边缘附近，例如在所述边缘上延伸。然后将载体的基底进行研磨步骤，然后可能进行抛光步骤，使得探针的探针末端被研磨以形成尖锐的尖端形状。

6. 发明申请

US20120132529A1 METHOD FOR PRECISELY CONTROLLED MASKED ANODIZATION 审中-公开
标题翻译：用于精确控制的掩蔽阳极化方法
公开(公告)号：US20120132529A1
公开(公告)日：2012-05-31
申请号：US13086735
申请日：2011-04-14
申请人： Joseph Zekry , Hendrikus Tilmans , Chris Van Hoof , Robert Puers
发明人： Joseph Zekry , Hendrikus Tilmans , Chris Van Hoof , Robert Puers
IPC分类号： C25D11/02 , C25D11/18 , C25D5/02
CPC分类号： C25D11/12 , C25D11/022 , C25D11/08 , C25D11/10 , C25D11/18 , C25D11/24 , C25D11/246
摘要： The present invention is related to a method for masked anodization of an anodizable layer on a substrate, for example an aluminum layer present on a sacrificial layer, wherein the sacrificial layer needs to be removed from a cavity comprising a Micro or Nano Electromechanical System (MEMS or NEMS). Anodization of an Al layer leads to the formation of elongate pores, through which the sacrificial layer can be removed. According to the method of the invention, the anodization of the Al layer is done with the help of a first mask which defines the area to be anodized, and a second mask which defines a second area to be anodized, said second area surrounding the first area. Anodization of the areas defined by the first and second mask leads to the formation of an anodized structure in the form of a closed ring around the first area, which forms a barrier against unwanted lateral anodization in the first area.
摘要翻译：本发明涉及一种用于掩模阳极氧化底物上阳极氧化层的方法，例如存在于牺牲层上的铝层，其中牺牲层需要从包括微型或纳米机电系统（MEMS）或NEMS）。 Al层的阳极化导致形成细长的孔，通过该细孔可以去除牺牲层。根据本发明的方法，借助于限定待阳极化区域的第一掩模和限定要被阳极氧化的第二区域的第二掩模来进行Al层的阳极氧化，所述第二区域包围第一区域区。由第一和第二掩模限定的区域的阳极化导致形成围绕第一区域的闭环形式的阳极氧化结构，其在第一区域中形成防止不希望的横向阳极氧化的阻挡层。

7. 发明授权

US07919901B2 Low-voltage, large displacement stepping actuator and method for fabricating the same 失效
标题翻译：低电压，大位移步进致动器及其制造方法
公开(公告)号：US07919901B2
公开(公告)日：2011-04-05
申请号：US12172323
申请日：2008-07-14
申请人： Mehmet Akif Erismis , Hercules Pereira Neves , Chris Van Hoof , Robert Puers
发明人： Mehmet Akif Erismis , Hercules Pereira Neves , Chris Van Hoof , Robert Puers
IPC分类号： H02N1/00
CPC分类号： H02N1/008 , Y10T29/53143
摘要： The current invention provides a stepping actuator, achieving large range up to ±35 μm with low operating voltages of 15V or lower and large output forces of up to ±110 μN. The actuator has an in-plane-angular deflection conversion which allows achieving step sizes varying from few nanometers to few micrometers with a minor change in the design. According to certain embodiments of the invention, the stepping actuator comprises a geometrical structure with a displacement magnification ratio of between 0.15 and 2 at operating voltages of 15V or lower. The present invention also provides a method for forming such stepping actuators.
摘要翻译：本发明提供了一种步进致动器，实现了高达±35μm的大范围，低的工作电压为15V或更低，输出力高达±110μN。致动器具有面内角度偏转转换，其允许实现从几纳米到几微米变化的步长，同时设计的微小变化。根据本发明的某些实施例，步进致动器包括在15V或更低的工作电压下的位移放大率在0.15和2之间的几何结构。本发明还提供了一种形成这种踏板式致动器的方法。

8. 发明申请

US20100178810A2 Connecting Scheme for Orthogonal Assembly of Microstructures 审中-公开
标题翻译：微结构正交装配连接方案
公开(公告)号：US20100178810A2
公开(公告)日：2010-07-15
申请号：US12110676
申请日：2008-04-28
申请人： Arno Aarts , Hercules Pereira Neves , Chris Van Hoof , Eric Beyne , Patrick Ruther , Robert Puers
发明人： Arno Aarts , Hercules Pereira Neves , Chris Van Hoof , Eric Beyne , Patrick Ruther , Robert Puers
IPC分类号： H01R24/00 , H01R43/00
CPC分类号： B81C3/008 , A61B5/04001 , A61B5/0478 , A61B2562/125 , A61N1/0529 , A61N1/0531 , B81B2201/055 , Y10T29/49222
摘要： In the present disclosure a device for sensing and/or actuation purposes is presented in which microstructures (20) comprising shafts (2) with different functionality and dimensions can be inserted in a modular way. That way, out-of-plane connectivity, mechanical clamping between the microstructures (20) and a substrate (1) of the device, and electrical connection between electrodes (5) on the microstructures (20) and the substrate (1) can be realized. Connections to external circuitry can be realised. Microfluidic channels (10) in the microstructures (20) can be connected to external equipment. A method to fabricate and assemble the device is provided.
摘要翻译：在本公开中，提出了用于感测和/或致动目的的装置，其中可以以模块化方式插入包括具有不同功能和尺寸的轴（2）的微结构（20）。这样，平面外连接，微结构（20）和器件的衬底（1）之间的机械夹紧以及微结构（20）和衬底（1）上的电极（5）之间的电连接可以是实现了可以实现与外部电路的连接。微结构（20）中的微流体通道（10）可以连接到外部设备。提供了一种制造和组装该装置的方法。

9. 发明授权

US10123869B2 Bionic eye lens 有权
公开(公告)号：US10123869B2
公开(公告)日：2018-11-13
申请号：US13737559
申请日：2013-01-09
申请人： Johan Blanckaert , Christ Glorieux , Robert Puers
发明人： Johan Blanckaert , Christ Glorieux , Robert Puers
IPC分类号： A61F2/16 , A61B5/11 , A61B5/00
摘要： The present invention relates generally to the restoration or improvement of the quality of human vision and, more particularly to a self-adapting system and method for achieving automatic sharp vision by the human eye of objects for instance at distances between 25 cm and more than 10 meters away. The invention can be situated in at least four technological domains: 1. ophthalmology, in particular the implantation of intraocular lenses. 2. Non-contact biometric signal recording and processing. 3. Electro-optic control of refractive lens power. 4. Wireless energy transfer.

10. 发明申请

US20120295520A1 Method for Sharpening Microprobe Tips 有权
标题翻译：锐化微孔技巧的方法
公开(公告)号：US20120295520A1
公开(公告)日：2012-11-22
申请号：US13473877
申请日：2012-05-17
申请人： Arno Aarts , Robert Puers
发明人： Arno Aarts , Robert Puers
IPC分类号： B24B1/00
CPC分类号： A61B5/04001 , A61B5/685 , A61B2562/125 , B24B19/16
摘要： The present disclosure is related to a method for sharpening the tip of a microprobe, in particular a neural probe or an array of neuroprobes having a common base portion.The probes have a constant thickness and a chisel-shaped tip portion. The probes are attached to the slanted side of a wedge-shaped carrier, with the probe tips placed in close proximity to the edge of the carrier, for example extending over said edge. The base of the carrier is then subjected to a grinding step, possibly followed by a polishing step, so that the probe tips of the probes are ground to form a sharp pointed tip shape.
摘要翻译：本公开涉及一种用于锐化微探针的尖端的方法，特别是具有公共基部的神经探针或神经元阵列。探针具有恒定的厚度和凿状的尖端部分。探针附接到楔形载体的倾斜侧，探针尖端放置在载体的边缘附近，例如在所述边缘上延伸。然后将载体的基底进行研磨步骤，然后可能进行抛光步骤，使得探针的探针末端被研磨以形成尖锐的尖端形状。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式