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    • 5. 发明授权
    • Method of measuring a film thickness of multilayer thin film
    • 测量多层薄膜膜厚的方法
    • US5883720A
    • 1999-03-16
    • US883530
    • 1997-06-26
    • Tetsuya AkiyamaEiji OhnoNobuo Akahira
    • Tetsuya AkiyamaEiji OhnoNobuo Akahira
    • G01B11/06
    • G01B11/0625
    • A method of manufacturing an optical information recording medium comprising the steps of: forming a plurality of component thin films on a substrate or on a sample at a predetermined film-forming speed and within a predetermined film-forming time in sequence; measuring spectral reflectance of the multilayer thin film formed on the substrate or on the sample; comparing the measured value of the spectral reflectance and the standard value of the spectral reflectance to detect the difference between them; compensating at least one of the film-forming speed and the film-forming time based on the detected difference; and forming a plurality of thin films based on the compensated film-forming speed and with the compensated film-forming time. Consequently, a thickness of each component thin film of the optical information recording medium can be measured easily and production loss in measuring a film-forming speed can be decreased.
    • 一种制造光学信息记录介质的方法,包括以下步骤:在预定的成膜速度和预定的成膜时间内依次在基板或样品上形成多个成分薄膜; 测量形成在衬底或样品上的多层薄膜的光谱反射率; 比较光谱反射率的测量值和光谱反射率的标准值,以检测它们之间的差异; 基于检测到的差异补偿成膜速度和成膜时间中的至少一个; 并且基于补偿的成膜速度和补偿的成膜时间形成多个薄膜。 因此,可以容易地测量光学信息记录介质的每个组分薄膜的厚度,并且可以降低测量成膜速度时的生产损失。
    • 10. 发明授权
    • Optical information recording medium, method for manufacturing the same, and initialization device
    • 光信息记录介质,其制造方法和初始化装置
    • US07463575B2
    • 2008-12-09
    • US11463977
    • 2006-08-11
    • Tetsuya AkiyamaNaoyasu MiyagawaKenichi NishiuchiTakashi Nishihara
    • Tetsuya AkiyamaNaoyasu MiyagawaKenichi NishiuchiTakashi Nishihara
    • G11B7/26
    • G11B7/1369G11B7/1275G11B7/13925G11B7/14G11B7/24038G11B7/268G11B2007/0013
    • An optical information recording medium includes a plurality of recording layers, a reflectance of at least one of the plurality of the recording layers in a non-initialized state with respect to a light beam for initialization being smaller than a reflectance of the same in an initialized state with respect to the light beam for initialization. The recording layers are initialized by irradiating, among the plurality of recording layers, the recording layer positioned farther from a light beam irradiation side with the light beam prior to irradiating the recording layer positioned closer to the light beam irradiation side, so that the initialized recording layers have no initialization irregularities. In initialization, at a position at a same distance in a radial direction on the optical information recording medium, the recording layer positioned farther from a light beam irradiation side is irradiated with one light beam before the recording layer positioned closer to the light beam irradiation side is irradiated with another light beam so that the plurality of recording layers are initialized at the same time by a light beam projecting operation in which the light beams are focused at different positions. This ensures the initialization without irregularities within a short time.
    • 光学信息记录介质包括多个记录层,相对于初始化用光束,非初始化状态的多个记录层中的至少一个记录层的反射率小于初始化的光束的反射率 相对于光束进行初始化的状态。 通过在照射位于更靠近光束照射侧的记录层之前,在多个记录层之间照射位于离光束照射侧更远离光束的记录层,以便初始记录 层没有初始化不规则。 在初始化中,在光学信息记录介质上沿径向相同距离的位置,在距离光束照射侧更靠近的记录层之前,用离开光束照射侧的记录层照射一个光束 用另一光束照射,使得多个记录层通过其中光束聚焦在不同位置的光束投影操作同时被初始化。 这确保了在短时间内没有不规则的初始化。