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1. 发明授权

US06702099B2 Work conveying system 失效
标题翻译：工作输送系统
公开(公告)号：US06702099B2
公开(公告)日：2004-03-09
申请号：US10225438
申请日：2002-08-22
申请人： Tetsunori Otaguro , Kazuyuki Matsumura , Takafumi Iseri
发明人： Tetsunori Otaguro , Kazuyuki Matsumura , Takafumi Iseri
IPC分类号： B65G4734
CPC分类号： H01L21/67706 , H01L21/67727 , H01L21/6773 , H01L21/67733 , H01L21/67736
摘要： A work conveying system eliminates gravitational deflection of an extended articulated arm of a vertical mover. The conveying system includes a horizontal mover which carries the vertical mover and a work holder for delivering a workpiece to various apparatuses without dislocation. In conveying a workpiece horizontally, the vertical mover folds compactly to minimize air disturbance. Plural arm elements of the articulated arm overlap and are connected together in an alternate manner at their respective end portions, and the articulated arm is extended and contracted by pivotal movement of the arm elements, driven by a single drive unit. The horizontal mover is movable in an arbitrary horizontal plane within the upper ceiling space within the clean room. Shafts in the articulated arm and a rotary drive unit in the work holder have hollow interiors which are intercommunicated and at a negative pressure.
摘要翻译：工作输送系统消除了垂直移动器的延伸关节臂的重力偏转。输送系统包括一个水平移动器，其承载垂直移动器和一个工件保持器，用于将工件传送到各种设备而不脱位。在水平传送工件时，垂直移动器紧凑地折叠以最小化空气扰动。铰接臂的多个臂元件在其各自的端部处以交替的方式重叠并且连接在一起，并且铰接臂通过由单个驱动单元驱动的臂元件的枢转运动而伸展和收缩。水平移动器可在洁净室内的上部天花板空间内的任意水平面上移动。铰接臂中的轴和工作架中的旋转驱动单元具有相互通信并处于负压的中空内部。

2. 发明授权

US07242204B2 Substrate aligning system 失效
标题翻译：基板对准系统
公开(公告)号：US07242204B2
公开(公告)日：2007-07-10
申请号：US11438225
申请日：2006-05-23
申请人： Tetsunori Otaguro , Seiji Matsuda
发明人： Tetsunori Otaguro , Seiji Matsuda
IPC分类号： G01R31/02
CPC分类号： H01L21/68
摘要： The present invention provides a substrate aligning system which prevents particles or the like from attaching to a substrate such as a wafer used in the semiconductor manufacturing process, and adjusts the orientation of the substrate accurately within a short period of time. According to a substrate aligning system (A) as a preferred embodiment of the present invention, a plurality of rollers (220) push the peripheral portion of a wafer (W) from different directions to align the center of the wafer. While the center of the wafer is kept aligned by the rollers (220), the contacting portion (211) of a contacting member (210) contacts a chip (Wa) of the wafer (W). The contacting member (210) is then moved arcuately to rotate the wafer (W), thus adjusting the orientation of the wafer.
摘要翻译：本发明提供一种基板对准系统，其能够防止粒子等附着在半导体制造工序中使用的晶片等基板上，并在短时间内精确地调整基板的取向。根据本发明的优选实施例的基板对准系统（A），多个辊（220）从不同的方向推动晶片（W）的周边部分以对准晶片的中心。当晶片的中心由辊（220）保持对准时，接触构件（210）的接触部分（211）接触晶片（W）的芯片（Wa）。然后接触构件（210）弧形移动以旋转晶片（W），从而调节晶片的取向。

3. 发明申请

US20050158152A1 Container conveying system 审中-公开
标题翻译：集装箱运输系统
公开(公告)号：US20050158152A1
公开(公告)日：2005-07-21
申请号：US10516824
申请日：2003-01-14
申请人： Tetsunori Otaguro
发明人： Tetsunori Otaguro
IPC分类号： B65G47/10 , H01L21/677 , H01L21/68 , B65G1/00 , B65G47/00 , B65G49/07
CPC分类号： H01L21/67727 , H01L21/6773 , H01L21/67733 , H01L21/67736 , H01L21/67769
摘要： A container conveying system for conveying containers 8 containing substrates such as wafers within a clean room comprises a conveyance apparatus 7 disposed substantially in parallel with plural treatment apparatuses 5-1, 5-2, 5-3, . . . to convey the containers 8 and a transfer apparatus 9 capable of moving freely in an upper ceiling space within the clean room, characterized in that the plural treatment apparatuses 5-1, 5-2, 5-3, . . . are arranged on at least one side of a passage and respectively provided with interface devices 6-1, 6-2, 6-3, . . . on the side facing the passage; the interface devices 6-1, 6-2, 6-3, . . . are capable of temporarily receiving the containers 8 and moving the substrates from the interiors of the containers to the interiors of the treatment apparatuses 5-1, 5-2, 5-3, . . . and vice versa in a hermetically sealed atmosphere; and the transfer apparatus 9 delivers and receives the containers 8 between the conveyance apparatus 7 and the treatment apparatuses 5-1, 5-2, 5-3, . . . or between the treatment apparatuses 5-1, 5-2, 5-3, . . . According to this container conveying system, the container conveying capacity, the treatment capacity, the footprint, the container stock function and the sorting function are further improved.
摘要翻译：用于在洁净室内容纳含有晶片等基板的容器8的容器输送系统包括与多个处理装置5〜1,5-2,5-3基本平行地配置的输送装置7。。。传送容器8和能够在洁净室内的上部天花板空间中自由移动的传送装置9，其特征在于，多个处理设备5-1,5-2,5-3。。。布置在通道的至少一侧上并且分别设置有接口装置6-1,6-2,6-3。。。在面对通道的一侧; 接口设备6-1,6-2,6-3。。。能够临时地容纳容器8并将基板从容器的内部移动到处理设备5-1,5-2,5-3的内部。。。在密封的气氛中反之亦然; 并且传送装置9在输送装置7和处理装置5〜1,5-2,5-3之间传送和接收容器8。。。或处理设备5 - 1，5 - 2，5 - 3之间。。。根据该容器输送系统，进一步提高了容器输送能力，处理能力，占地面积，容器库存功能和分拣功能。

4. 发明申请

US20090045699A1 Precise Positioning Apparatus 有权
标题翻译：精密定位装置
公开(公告)号：US20090045699A1
公开(公告)日：2009-02-19
申请号：US11886427
申请日：2005-03-16
申请人： Tetsunori Otaguro
发明人： Tetsunori Otaguro
IPC分类号： G12B1/04 , H02N2/04
CPC分类号： G12B5/00 , H02N2/028
摘要： A precision positioning device 1 having degrees of freedom along multi-axial directions includes a single unitary structure 2 and a plurality of expansion/contraction actuators 4a, 4b, and 4c. Movements of an object-to-be-positioned in the axial directions are effected through such elastic deformations of the unitary structure 2 as to move the object-to-be-positioned only in the axial directions. Forces to generate the elastic deformations are based on expansion/contraction of the expansion/contraction actuators 4a, 4b, and 4c incorporated in the unitary structure 2. The expansion/contraction actuators 4a, 4b, and 4c can be formed of piezoelectric elements.
摘要翻译：沿着多轴方向具有自由度的精密定位装置1包括单个整体结构2和多个膨胀/收缩致动器4a，4b和4c。要在轴向上定位的物体的运动通过单一结构2的这种弹性变形来实现，以便仅在轴向方向上移动被定位物体。产生弹性变形的力基于结合在一体结构2中的膨胀/收缩致动器4a，4b和4c的膨胀/收缩。膨胀/收缩致动器4a，4b和4c可以由压电元件形成。

5. 发明授权

US06470927B2 Foup opener 有权
标题翻译： Foup开瓶器
公开(公告)号：US06470927B2
公开(公告)日：2002-10-29
申请号：US09983443
申请日：2001-10-24
申请人： Tetsunori Otaguro
发明人： Tetsunori Otaguro
IPC分类号： B65B104
CPC分类号： H01L21/67772 , Y10S414/137
摘要： A FOUP opener opens and closes a FOUP door which closes a front opening portion of a FOUP which contains a plurality of semiconductor wafers. The FOUP opener includes a dock plate for carrying and positioning the FOUP; a dock moving mechanism for moving the dock plate to a position for detachment/attachment of the FOUP door; a port door including a detachment/attachment mechanism for detaching/attaching the FOUP door and a holder mechanism for holding the FOUP door; a port plate including an opening portion, the opening portion being closed by the port door; a port door horizontal-movement mechanism for horizontally moving the port door; and a port door vertical-movement mechanism for vertically moving the port door with the port door holding the FOUP door, so as to house the FOUP door. The port door includes a seal member for sealing a space defined between an outside wall of the FOUP door and an outside wall of the port door.
摘要翻译： FOUP开启器打开和关闭封闭包含多个半导体晶片的FOUP的前开口部分的FOUP门。 FOUP开启器包括用于承载和定位FOUP的坞板; 码头移动机构，用于将码头板移动到用于拆卸/附接FOUP门的位置; 包括用于拆卸/安装FOUP门的分离/附接机构的端口门和用于保持FOUP门的保持机构; 端口板，包括开口部分，所述开口部分由所述端口门关闭; 用于水平移动端口门的端口门水平移动机构; 以及用于垂直移动端口门的端口门垂直运动机构，其中门口保持FOUP门，以容纳FOUP门。端口门包括用于密封限定在FOUP门的外壁和端口门的外壁之间的空间的密封构件。

6. 发明授权

US07745972B2 Precise positioning apparatus 有权
标题翻译：精密定位装置
公开(公告)号：US07745972B2
公开(公告)日：2010-06-29
申请号：US11886427
申请日：2005-03-16
申请人： Tetsunori Otaguro
发明人： Tetsunori Otaguro
IPC分类号： H01L21/68
CPC分类号： G12B5/00 , H02N2/028
摘要： A precision positioning device 1 having degrees of freedom along multi-axial directions includes a single unitary structure 2 and a plurality of expansion/contraction actuators 4a, 4b, and 4c. Movements of an object-to-be-positioned in the axial directions are effected through such elastic deformations of the unitary structure 2 as to move the object-to-be-positioned only in the axial directions. Forces to generate the elastic deformations are based on expansion/contraction of the expansion/contraction actuators 4a, 4b, and 4c incorporated in the unitary structure 2. The expansion/contraction actuators 4a, 4b, and 4c can be formed of piezoelectric elements.
摘要翻译：沿着多轴方向具有自由度的精密定位装置1包括单个整体结构2和多个膨胀/收缩致动器4a，4b和4c。要在轴向上定位的物体的运动通过单一结构2的这种弹性变形来实现，以便仅在轴向方向上移动被定位物体。产生弹性变形的力基于结合在一体结构2中的膨胀/收缩致动器4a，4b和4c的膨胀/收缩。膨胀/收缩致动器4a，4b和4c可以由压电元件形成。

7. 发明申请

US20060208749A1 Substrate aligning system 失效
标题翻译：基板对准系统
公开(公告)号：US20060208749A1
公开(公告)日：2006-09-21
申请号：US11438225
申请日：2006-05-23
申请人： Tetsunori Otaguro , Seiji Matsuda
发明人： Tetsunori Otaguro , Seiji Matsuda
IPC分类号： G01R31/02
CPC分类号： H01L21/68
摘要： The present invention provides a substrate aligning system which prevents particles or the like from attaching to a substrate such as a wafer used in the semiconductor manufacturing process, and adjusts the orientation of the substrate accurately within a short period of time. According to a substrate aligning system (A) as a preferred embodiment of the present invention, a plurality of rollers (220) push the peripheral portion of a wafer (W) from different directions to align the center of the wafer. While the center of the wafer is kept aligned by the rollers (220), the contacting portion (211) of an contacting member (210) contacts a chip (Wa) of the wafer (W). The contacting member (210) is then moved arcuately to rotate the wafer (W), thus adjusting the orientation of the wafer.
摘要翻译：本发明提供一种基板对准系统，其能够防止粒子等附着在半导体制造工序中使用的晶片等基板上，并在短时间内精确地调整基板的取向。根据本发明的优选实施例的基板对准系统（A），多个辊（220）从不同的方向推动晶片（W）的周边部分以对准晶片的中心。当晶片的中心由辊（220）保持对准时，接触构件（210）的接触部分（211）接触晶片（W）的芯片（Wa）。然后接触构件（210）弧形移动以旋转晶片（W），从而调节晶片的取向。

8. 发明申请

US20100194061A1 Head Used For Attracting a Workpiece 有权
标题翻译：头用于吸引工件
公开(公告)号：US20100194061A1
公开(公告)日：2010-08-05
申请号：US11990009
申请日：2005-08-05
申请人： Tetsunori Otaguro , Takenori Hirakawa
发明人： Tetsunori Otaguro , Takenori Hirakawa
IPC分类号： B23B31/30 , B23B31/06
CPC分类号： B25J15/0616 , B25J17/0208 , B65G47/91 , Y10T279/11 , Y10T279/3481
摘要： A workpiece vacuum chuck head, which serves to vacuum-chuck a light, minute workpiece and to release and place the vacuum-chucked workpiece on a workpiece placement surface, includes a base section, a workpiece vacuum chuck section, and a follower mechanism section for connecting together the base section and the workpiece vacuum chuck section. These sections form an integral structure. The base section has an attachment surface for attaching the workpiece vacuum chuck head to a head drive mechanism. The workpiece vacuum chuck section has a workpiece vacuum chuck surface and a negative-pressure chamber, which opens at the workpiece vacuum chuck surface via a suction hole. The follower mechanism section has a structure that is easily elastically deformable, and is appropriately deformed in a three-dimensional space so as to cause the workpiece vacuum chuck surface to follow an inclination of the workpiece placement surface.
摘要翻译：工件真空吸盘头，其用于真空吸附轻，微小的工件，并将真空吸附的工件释放并放置在工件放置表面上，包括基部，工件真空吸盘部分和从动机构部分，将基座部分和工件真空吸盘部分连接在一起。这些部分形成一个整体结构。基部具有用于将工件真空卡盘头附接到头驱动机构的附接表面。工件真空吸盘部分具有工件真空吸盘表面和负压室，其通过吸孔在工件真空吸盘表面打开。从动机构部分具有容易弹性变形的结构，并且在三维空间中适当地变形，以使工件真空卡盘表面跟随工件放置表面的倾斜。

9. 发明授权

US06824344B2 Drive-section-isolated FOUP opener 有权
标题翻译：驱动部分隔离FOUP开启器
公开(公告)号：US06824344B2
公开(公告)日：2004-11-30
申请号：US09977394
申请日：2001-10-16
申请人： Tetsunori Otaguro
发明人： Tetsunori Otaguro
IPC分类号： G01V904
CPC分类号： H01L21/67265 , H01L21/6735 , H01L21/67772
摘要： A drive-section-isolated FOUP opener opens and closes a door of a FOUP which contains a plurality of semiconductor wafers. The FOUP opener includes a dock plate for carrying and positioning the FOUP; a dock moving mechanism for moving the dock plate to a position for detachment/attachment of the FOUP door; a port door including a mechanism for releasably holding the FOUP door; a port plate including an opening closed by the port door; a port door horizontal-movement mechanism for horizontally moving the port door; a sensor horizontal-movement mechanism for horizontally moving a sensor bracket, the sensor bracket carrying a mapping sensor; and a port-door-and-sensor vertical-movement mechanism for vertically moving the port door and the sensor bracket with the port door holding the FOUP door. A drive for the port door horizontal-movement mechanism, a drive for the sensor horizontal-movement mechanism, and a drive for the port-door-and-sensor vertical-movement mechanism are disposed opposite a clean room with respect to the port plate.
摘要翻译：驱动部分隔离的FOUP开启器打开和关闭包含多个半导体晶片的FOUP的门。 FOUP开启器包括用于承载和定位FOUP的坞板; 码头移动机构，用于将码头板移动到用于拆卸/附接FOUP门的位置; 端口门，包括用于可释放地保持FOUP门的机构; 端口板，包括由端口门关闭的开口; 用于水平移动端口门的端口门水平移动机构; 用于水平移动传感器支架的传感器水平移动机构，传感器支架承载映射传感器; 以及用于将端口门和传感器支架垂直移动并保持FOUP门的端口门和传感器垂直移动机构。用于端口门水平移动机构的驱动器，用于传感器水平移动机构的驱动器和用于端口 - 门传感器垂直运动机构的驱动器相对于端口板设置在洁净室的对面。

10. 发明授权

US08100413B2 Workpiece vacuum chuck head 有权
标题翻译：工件真空吸盘头
公开(公告)号：US08100413B2
公开(公告)日：2012-01-24
申请号：US11990009
申请日：2005-08-05
申请人： Tetsunori Otaguro , Takenori Hirakawa
发明人： Tetsunori Otaguro , Takenori Hirakawa
IPC分类号： B23B31/30
CPC分类号： B25J15/0616 , B25J17/0208 , B65G47/91 , Y10T279/11 , Y10T279/3481
摘要： A workpiece vacuum chuck head, which serves to vacuum-chuck a light, minute workpiece and to release and place the vacuum-chucked workpiece on a workpiece placement surface, includes a base section, a workpiece vacuum chuck section, and a follower mechanism section for connecting together the base section and the workpiece vacuum chuck section. These sections form an integral structure. The base section has an attachment surface for attaching the workpiece vacuum chuck head to a head drive mechanism. The workpiece vacuum chuck section has a workpiece vacuum chuck surface and a negative-pressure chamber, which opens at the workpiece vacuum chuck surface via a suction hole. The follower mechanism section has a structure that is easily elastically deformable, and is appropriately deformed in a three-dimensional space so as to cause the workpiece vacuum chuck surface to follow an inclination of the workpiece placement surface.
摘要翻译：工件真空吸盘头，其用于真空吸附光，微小工件并将真空吸附的工件释放并放置在工件放置表面上，包括基部，工件真空吸盘部分和从动机构部分，用于将基座部分和工件真空吸盘部分连接在一起。这些部分形成一个整体结构。基部具有用于将工件真空卡盘头附接到头驱动机构的附接表面。工件真空吸盘部分具有工件真空吸盘表面和负压室，其通过吸孔在工件真空吸盘表面打开。从动机构部分具有容易弹性变形的结构，并且在三维空间中适当地变形，以使工件真空卡盘表面跟随工件放置表面的倾斜。

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