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    • 2. 发明授权
    • Load-lock unit and wafer transfer system
    • 加载锁定单元和晶片传输系统
    • US5405230A
    • 1995-04-11
    • US857831
    • 1992-03-26
    • Hiroo OnoTetsu OosawaTeruo AsakawaKenji Nebuka
    • Hiroo OnoTetsu OosawaTeruo AsakawaKenji Nebuka
    • B65G47/80H01L21/00H01L21/677H01L21/68
    • H01L21/67126H01L21/67265H01L21/67745Y10S414/136Y10S414/137Y10S414/139
    • A load-lock unit is disposed between first and second atmospheres, stores a wafer transferred from the first atmosphere, is blocked off from the first atmosphere, is thereafter set in the same atmosphere as or a similar atmosphere to the second atmosphere, and is opened to communicate with the second atmosphere in order to transfer the wafer to the second atmosphere. The load-lock unit includes a load-lock chamber, a storing device, disposed in the load-lock chamber, for storing a plurality of wafers vertically at a gap, a holding mechanism for holding one of the plurality of wafers stored in the storing device, a rotating mechanism for rotating the wafer held by the holding mechanism, and an error detecting device for detecting the positional error of the center of the wafer and an orientation error of the wafer on the basis of data obtained by radiating light on the wafer which is rotating.
    • 装载锁定单元设置在第一和第二气氛之间,将从第一大气转移的晶片与第一大气隔绝,然后与第二大气相同或相似的气氛放置,打开 以与第二气氛通信,以将晶片转移到第二气氛。 所述装载锁定单元包括装载锁定室,存储装置,设置在所述装载锁定室中,用于在间隙上垂直地存储多个晶片;保持机构,用于保持存储在所述存储器中的所述多个晶片中的一个; 装置,用于旋转由保持机构保持的晶片的旋转机构,以及用于基于通过在晶片上照射光获得的数据来检测晶片的中心的位置误差和晶片的取向误差的误差检测装置 这是旋转。