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    • 5. 发明授权
    • Liquid crystal display device
    • 液晶显示装置
    • US08247817B2
    • 2012-08-21
    • US12379874
    • 2009-03-03
    • Takuo KaitohHidekazu MiyakeTakeshi SakaiTerunori Saitou
    • Takuo KaitohHidekazu MiyakeTakeshi SakaiTerunori Saitou
    • H01L29/04H01L29/10H01L31/00
    • H01L29/78696H01L27/1229H01L27/1251
    • In a bottom-gate-type thin film transistor used in a liquid crystal display device in which a poly-Si layer and an a-Si layer are stacked, a quantity of an ON current which flows in the thin film transistor can be increased. A poly-Si layer and an a-Si layer are stacked on a gate electrode as an active layer by way of a gate insulation film therebetween in order of the poly-Si layer and the a-Si layer. An n+Si layer and a source/drain layer are formed on the a-Si layer thus forming a thin film transistor. A forward current which flows in the thin film transistor mainly flows in the poly-Si layer. To decrease contact resistance against the forward current between the poly-Si layer and the n+Si layer, an edge portion of the a-Si layer and an edge portion of the poly-Si layer assume a concavo-convex shape thus particularly increasing a contact area between the poly-Si layer and the n+Si layer whereby the contact resistance against the forward current can be decreased leading to the increase of a quantity of an ON current.
    • 在层叠多晶硅层和a-Si层的液晶显示装置中使用的底栅型薄膜晶体管中,可以增加流入薄膜晶体管的导通电流量。 按照多晶硅层和a-Si层的顺序,通过栅绝缘膜将多晶Si层和a-Si层层叠在作为有源层的栅电极上。 在a-Si层上形成n + Si层和源/漏层,从而形成薄膜晶体管。 在薄膜晶体管中流动的正向电流主要在多晶硅层中流动。 为了降低与多晶硅层和n + Si层之间的正向电流的接触电阻,a-Si层的边缘部分和多晶硅层的边缘部分呈现凹凸形状,因此特别增加了 多晶硅层和n + Si层之间的接触面积,由此可以减小与正向电流的接触电阻,导致导通电流的增加。
    • 6. 发明申请
    • Display device
    • 显示设备
    • US20090050896A1
    • 2009-02-26
    • US12219900
    • 2008-07-30
    • Takuo KaitohHidekazu MiyakeTakeshi SakaiTerunori Saitou
    • Takuo KaitohHidekazu MiyakeTakeshi SakaiTerunori Saitou
    • H01L33/00G02F1/136G09G3/12
    • H01L27/1251H01L27/1229
    • The present invention provides a display device which forms a drive circuit using a bottom-gate-type TFT made of poly-Si which generates a small leak current in a periphery of a display region. A gate electrode is made of Mo having a high melting point, and a gate insulation film is formed on the gate electrode. A channel layer constituted of a poly-Si layer is formed on the gate insulation film, and the poly-Si layer is covered with an a-Si layer. An n+ Si layer is formed on the a-Si layer, and an SD electrode is formed on the n+ Si layer. Although holes are induced in the poly-Si layer when a negative voltage (inverse bias) is applied to the gate electrode, the holes cannot pass through the a-Si layer and hence, no drain current flows. Accordingly, it is possible to realize a bottom-gate-type TFT using poly-silicon which generates a small leak current.
    • 本发明提供一种使用由多晶硅制成的底栅型TFT形成驱动电路的显示装置,其在显示区域的周围产生小的漏电流。 栅电极由具有高熔点的Mo制成,栅极绝缘膜形成在栅电极上。 在栅极绝缘膜上形成由多晶硅层构成的沟道层,多晶硅层被a-Si层覆盖。 在a-Si层上形成n + Si层,在n + Si层上形成SD电极。 虽然当向栅电极施加负电压(反向偏压)时,在多晶硅层中感应到空穴,但是空穴不能通过a-Si层,因此不会流过漏极电流。 因此,可以实现产生小漏电流的多晶硅的底栅型TFT。
    • 7. 发明申请
    • Liquid crystal display device
    • 液晶显示装置
    • US20090224247A1
    • 2009-09-10
    • US12379874
    • 2009-03-03
    • Takuo KaitohHidekazu MiyakeTakeshi SakaiTerunori Saitou
    • Takuo KaitohHidekazu MiyakeTakeshi SakaiTerunori Saitou
    • H01L33/00
    • H01L29/78696H01L27/1229H01L27/1251
    • In a bottom-gate-type thin film transistor used in a liquid crystal display device in which a poly-Si layer and an a-Si layer are stacked, a quantity of an ON current which flows in the thin film transistor can be increased. A poly-Si layer and an a-Si layer are stacked on a gate electrode as an active layer by way of a gate insulation film therebetween in order of the poly-Si layer and the a-Si layer. An n+Si layer and a source/drain layer are formed on the a-Si layer thus forming a thin film transistor. A forward current which flows in the thin film transistor mainly flows in the poly-Si layer. To decrease contact resistance against the forward current between the poly-Si layer and the n+Si layer, an edge portion of the a-Si layer and an edge portion of the poly-Si layer assume a concavo-convex shape thus particularly increasing a contact area between the poly-Si layer and the n+Si layer whereby the contact resistance against the forward current can be decreased leading to the increase of a quantity of an ON current.
    • 在层叠多晶硅层和a-Si层的液晶显示装置中使用的底栅型薄膜晶体管中,可以增加流入薄膜晶体管的导通电流量。 按照多晶硅层和a-Si层的顺序,通过栅绝缘膜将多晶Si层和a-Si层层叠在作为有源层的栅电极上。 在a-Si层上形成n + Si层和源/漏层,从而形成薄膜晶体管。 在薄膜晶体管中流动的正向电流主要在多晶硅层中流动。 为了降低与多晶硅层和n + Si层之间的正向电流的接触电阻,a-Si层的边缘部分和多晶硅层的边缘部分呈现凹凸形状,因此特别增加了 多晶硅层和n + Si层之间的接触面积,由此可以减小与正向电流的接触电阻,导致导通电流的增加。
    • 8. 发明授权
    • Display device
    • 显示设备
    • US08624256B2
    • 2014-01-07
    • US12219900
    • 2008-07-30
    • Takuo KaitohHidekazu MiyakeTakeshi SakaiTerunori Saitou
    • Takuo KaitohHidekazu MiyakeTakeshi SakaiTerunori Saitou
    • H01L27/14
    • H01L27/1251H01L27/1229
    • The present invention provides a display device which forms a drive circuit using a bottom-gate-type TFT made of poly-Si which generates a small leak current in a periphery of a display region. A gate electrode is made of Mo having a high melting point, and a gate insulation film is formed on the gate electrode. A channel layer constituted of a poly-Si layer is formed on the gate insulation film, and the poly-Si layer is covered with an a-Si layer. An n+Si layer is formed on the a-Si layer, and an SD electrode is formed on the n+Si layer. Although holes are induced in the poly-Si layer when a negative voltage (inverse bias) is applied to the gate electrode, the holes cannot pass through the a-Si layer and hence, no drain current flows. Accordingly, it is possible to realize a bottom-gate-type TFT using poly-silicon which generates a small leak current.
    • 本发明提供一种使用由多晶硅制成的底栅型TFT形成驱动电路的显示装置,其在显示区域的周围产生小的漏电流。 栅电极由具有高熔点的Mo制成,栅极绝缘膜形成在栅电极上。 在栅极绝缘膜上形成由多晶硅层构成的沟道层,多晶硅层被a-Si层覆盖。 在a-Si层上形成n + Si层,在n + Si层上形成SD电极。 虽然当向栅电极施加负电压(反向偏压)时,在多晶硅层中感应到空穴,但是空穴不能通过a-Si层,因此不会流过漏极电流。 因此,可以实现产生小漏电流的多晶硅的底栅型TFT。
    • 10. 发明授权
    • Display device and method of manufacturing the same
    • 显示装置及其制造方法
    • US08049255B2
    • 2011-11-01
    • US12155504
    • 2008-06-05
    • Takeshi SakaiToshio MiyazawaTakuo KaitohHidekazu Miyake
    • Takeshi SakaiToshio MiyazawaTakuo KaitohHidekazu Miyake
    • H01L31/062
    • H01L27/1214H01L29/41733H01L29/458H01L29/66765H01L29/78618H01L29/78678
    • A semiconductor device includes an insulating substrate and a TFT element disposed on the substrate. The TFT element includes a gate electrode, a gate insulating film, a semiconductor layer, and a source electrode and a drain electrode arranged in that order on the insulating substrate. The semiconductor layer includes an active layer composed of polycrystalline semiconductor and a contact layer segment interposed between the active layer and the source electrode and another contact layer segment interposed between the active layer and the drain electrode. The source and drain electrodes each have a first face facing the opposite face of the active layer from the interface with the gate insulating layer and a second face facing an etched side face of the active layer. Each contact layer segment is disposed between the active layer and each of the first and second faces of the source or drain electrode.
    • 半导体器件包括绝缘基板和设置在基板上的TFT元件。 TFT元件包括在绝缘基板上依次排列的栅电极,栅极绝缘膜,半导体层以及源电极和漏电极。 半导体层包括由多晶半导体构成的有源层和介于有源层与源电极之间的接触层段,以及介于有源层和漏电极之间的另一接触层段。 源极和漏极各自具有面对与有源层的界面相对的有源层的相对面的第一面和与有源层的蚀刻侧面对置的第二面。 每个接触层段设置在源极或漏极之间的有源层和第一和第二表面中的每一个之间。