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    • 2. 发明授权
    • Tank-isolated-drain-extended power device
    • 储罐隔离漏极扩展功率器件
    • US06753575B2
    • 2004-06-22
    • US10167159
    • 2002-06-11
    • Taylor R. EflandChin-Yu Tsai
    • Taylor R. EflandChin-Yu Tsai
    • H10L31119
    • H01L21/765H01L21/761H01L29/1045H01L29/1083H01L29/7835
    • A tank-isolated drain extended power device (50, 60, 70, 80) having an added laterally extending heavily doped p-type region (56, 62, 72) in combination with a p-type Dwell (32) which reduces minority carrier buildup. The p-doped regions are defined in a P-epi layer surrounded by a buried NBL region (14) connected with a deep low resistance drain region (16) forming a guardring. This additional laterally extending p-doped region (56,62,72) reduces minority carrier build up such that recovery time is significantly reduced, and power loss is also significantly reduced due to reduced collection time of the minority carriers. The device may be formed as an LDMOS device.
    • 一个槽隔离漏极扩展功率器件(50,60,70,80),其具有与p型Dwell(32)组合的附加横向延伸的重掺杂p型区域(56,62,72),其减少少数载流子 积聚。 p掺杂区域限定在由与形成防护层的深低电阻漏极区域(16)连接的掩埋NBL区域(14)围绕的P外延层中。 这种额外的横向延伸的p掺杂区域(56,62,72)减少了少数载流子的积累,使得恢复时间显着降低,并且由于少数载流子的收集时间减少,功率损耗也显着降低。 该器件可以形成为LDMOS器件。
    • 4. 发明授权
    • Distributed power device with dual function minority carrier reduction
    • 具有双功能少数载波减少的分布式功率器件
    • US06710427B2
    • 2004-03-23
    • US10167136
    • 2002-06-11
    • Taylor R. EflandDavid A. GrantRamanathan RamaniChin-Yu TsaiDavid D. BriggsDale Skelton
    • Taylor R. EflandDavid A. GrantRamanathan RamaniChin-Yu TsaiDavid D. BriggsDale Skelton
    • H01L2900
    • H01L29/1083H01L21/761H01L21/765H01L29/1045H01L29/7835
    • A distributed power device (100) including a plurality of tank regions (90) separated from one another by a deep n-type region (16), and having formed in each tank region a plurality of transistors (50). The plurality of transistors (50) in each tank region are interconnected to transistors in other tank regions to form a large power FET, whereby the deep n-type regions isolate the tank regions from one another. A first parasitic diode (D5) is defined from each tank region to a buried layer, and a second parasitic diode (D4) is defined between the buried layer and a substrate. The deep n-type regions distribute the first and second parasitic diodes with respect to the plurality of tank regions, preferably comprised of a P-epi tank. The deep n-type regions also distribute the resistance of an NBL layer (14) formed under the tank regions. The distributed parasitic diodes and resistance of the NBL layer advantageously provides that the parasitic diode (D4) between the NBL layer and the substrate will never be forward biased. In addition, each of the tank regions has a heavily doped p-type region (56) reducing the minority carrier lifetime to provide increased switching speed of the large power FET.
    • 一种分布式功率器件(100),包括通过深n型区域(16)彼此分离的多个槽区(90),并且在每个槽区中形成有多个晶体管(50)。 每个槽区中的多个晶体管(50)与其它罐区中的晶体管相互连接以形成大功率FET,由此深n型区域将罐区彼此隔离。 第一寄生二极管(D5)从每个槽区限定到埋层,并且在掩埋层和衬底之间限定第二寄生二极管(D4)。 深n型区域相对于多个罐区域分布第一和第二寄生二极管,优选地由P-epi罐组成。 深n型区域还分布形成在罐区域下方的NBL层(14)的电阻。 分布式寄生二极管和NBL层的电阻有利地提供NBL层和衬底之间的寄生二极管(D4)将永远不会被正向偏置。 此外,每个槽区具有重掺杂的p型区(56),减少了少量载流子寿命,以提供大功率FET的提高的开关速度。
    • 7. 发明授权
    • Method of fabricating a drain isolated LDMOS device
    • 制造漏极隔离LDMOS器件的方法
    • US06729886B2
    • 2004-05-04
    • US10167283
    • 2002-06-11
    • Taylor R. EflandChin-Yu Tsai
    • Taylor R. EflandChin-Yu Tsai
    • H01L218238
    • H01L21/761H01L29/1083H01L29/7835
    • A tank-isolated drain extended power device (50, 60, 70, 80) having an added laterally extending heavily doped p-type region (56, 62, 72) in combination with a p-type Dwell (32) which reduces minority carrier buildup. The p-doped regions are defined in a P-epi layer surrounded by a buried NBL region (14) connected with a deep low resistance drain region (16) forming a guardring. This additional laterally extending p-doped region (56,62,72) reduces minority carrier build up such that recovery time is significantly reduced, and power loss is also significantly reduced due to reduced collection time of the minority carriers. The device may be formed as an LDMOS device.
    • 一个槽隔离漏极扩展功率器件(50,60,70,80),其具有与p型Dwell(32)组合的附加横向延伸的重掺杂p型区域(56,62,72),其减少少数载流子 积聚。 p掺杂区域限定在由与形成防护层的深低电阻漏极区域(16)连接的掩埋NBL区域(14)围绕的P外延层中。 这种额外的横向延伸的p掺杂区域(56,62,72)减少了少数载流子的积累,使得恢复时间显着降低,并且由于少数载流子的收集时间减少,功率损耗也显着降低。 该器件可以形成为LDMOS器件。
    • 8. 发明授权
    • Method of fabricating integrated system on a chip protection circuit
    • 在芯片保护电路上制造集成系统的方法
    • US06709900B2
    • 2004-03-23
    • US10166964
    • 2002-06-11
    • Taylor R. EflandDavid A. GrantRamanathan RamaniDale SkeltonDavid D. BriggsChin-Yu Tsai
    • Taylor R. EflandDavid A. GrantRamanathan RamaniDale SkeltonDavid D. BriggsChin-Yu Tsai
    • H01L21332
    • H01L29/1083H01L21/761H01L21/765H01L29/1045H01L29/7835
    • A power integrated circuit architecture (10) having a high side transistor (100) interposed between a control circuit (152) and a low side transistor (100) to reduce the effects of the low side transistor on the operation of the control circuit. The low side transistor has a heavily p-doped region (56) designed to reduce minority carrier lifetime and improve minority carrier collection to reduce the minority carriers from disturbing the control circuit. The low side transistor has a guardring (16) tied to an analog ground, whereby the control circuit is tied to a digital ground, such that the collection of the minority carriers into the analog ground does not disturb the operation of the control circuit. The low side transistor is comprised of multiple transistor arrays (90) partitioned by at least one deep n-type region (16), which deep n-type region forms a guardring about the respective transistor array. The guardring isolates minority carriers in one transistor array from another transistor array, and facilitates the collection of the minority carriers therethrough.
    • 一种功率集成电路架构(10),其具有插入在控制电路(152)和低侧晶体管(100)之间的高侧晶体管(100),以降低所述低侧晶体管对所述控制电路的操作的影响。 低侧晶体管具有高p掺杂区域(56),其被设计为减少少数载流子寿命并改善少数载流子收集以减少少数载流子扰乱控制电路。 低侧晶体管具有被连接到模拟地的保护(16),由此将控制电路连接到数字地,使得将少数载流子收集到模拟地中不会干扰控制电路的操作。 低侧晶体管包括由至少一个深n型区域(16)分隔的多个晶体管阵列(90),该深n型区域围绕相应的晶体管阵列形成保护。 防护器将一个晶体管阵列中的少数载流子与另一晶体管阵列隔离,并且便于通过其中的少数载流子的收集。
    • 10. 发明授权
    • Lateral double diffused metal oxide semiconductor device
    • US06441431B1
    • 2002-08-27
    • US09454934
    • 1999-12-03
    • Taylor EflandChin-Yu TsaiSameer Pendharkar
    • Taylor EflandChin-Yu TsaiSameer Pendharkar
    • H01L2976
    • H01L29/66537H01L29/086H01L29/0878H01L29/1045H01L29/1095H01L29/42368H01L29/517H01L29/518H01L29/7816H01L29/7833
    • An embodiment of the instant invention is a transistor formed on a semiconductor substrate of a first conductivity type and having an upper surface, the transistor comprising: a well region (well 204 of FIG. 1a) formed in the semiconductor substrate (layer 202 of FIG. 1a), the well region of a second conductivity type opposite that of the first conductivity type; a source region (source region 208 of FIG. 1a) formed in the well region in the semiconductor substrate, the source region of the second conductivity type; a drain region (drain 210 of FIG. 1a) formed in the semiconductor substrate and spaced away from the source region by a channel region (given by length L1+L2), the drain region of the second conductivity type; a conductive gate electrode (layer 218 of FIG. 1a) disposed over the semiconductor substrate and over the channel region; a gate insulating layer (layer 214 of FIG. 1a) disposed between the conductive gate electrode and the semiconductor substrate and having a length, the gate insulating layer comprising: a first portion of the gate insulating layer which has a first length (L1) and a first thickness; a second portion of the gate insulating layer which has a second length (L2) and a second thickness which is substantially thicker than the first thickness, the sum of the first length and the second length equalling the length of the gate insulating layer; and wherein the first portion of the gate insulating layer being situated proximate to the source region and spaced away from the drain region by the second portion of the gate insulating layer; and wherein the well region having a dopant concentration less than that of the source region and the drain region, the well region extends at least from source region towards the drain region so as to completely underlie the first portion of the gate insulating layer and to underlie at least the second portion of the gate insulating layer.