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1. 发明授权

US08138442B2 Wire electric discharge machining method, semiconductor wafer manufacturing method, and solar battery cell manufacturing method 有权
标题翻译：线放电加工方法，半导体晶片制造方法和太阳能电池单元制造方法
公开(公告)号：US08138442B2
公开(公告)日：2012-03-20
申请号：US12093836
申请日：2005-11-16
申请人： Tatsushi Sato , Yoshihito Imai , Teiji Takahashi , Takeshi Sakata , Tomoko Sendai , Yoichiro Nishimoto , Shigeru Matsuno , Takeyuki Maegawa , Takaaki Iwata
发明人： Tatsushi Sato , Yoshihito Imai , Teiji Takahashi , Takeshi Sakata , Tomoko Sendai , Yoichiro Nishimoto , Shigeru Matsuno , Takeyuki Maegawa , Takaaki Iwata
IPC分类号： B23H7/02 , H01L21/301 , H01L21/306 , B23H9/00
CPC分类号： B23H7/02 , B23H9/00
摘要： Provided are a wire electric discharge machining method for poorly conductive materials, such as solar cell silicon, and a semiconductor wafer manufacturing method and a solar battery cell manufacturing method based on the wire electric discharge machining method. Electrical discharge machining of a high volume resistivity, hard and brittle materials, having a volume resistivity that is equal to or higher than 0.5 Ω·cm and equal to or lower than 5 Ω·cm is performed by applying a pulse voltage having a pulse width that is equal to or higher than 1 μsec and equal to or lower than 4 μsec and having a peak current at the time of machining a wire electrode that is equal to or higher than 10A and equal to or lower than 50A to a wire electrode and generating a discharge pulse between the wire electrode and a subject to be machined.
摘要翻译：本发明提供一种导电材料的导电放电加工方法，例如太阳能电池硅，半导体晶片的制造方法以及基于该放电加工方法的太阳能电池单元的制造方法。具有体积电阻率等于或大于0.5且OHgr·cm且等于或小于5Ω的体积电阻率，硬脆材料的放电加工是通过施加具有脉冲宽度等于或高于1微秒并且等于或低于4微秒，并且在将线电极加工时的峰值电流等于或高于10A并等于或低于50A的线并且在线电极和待加工对象之间产生放电脉冲。

2. 发明申请

US20090212026A1 WIRE ELECTRIC DISCHARGE MACHINING METHOD, SEMICONDUCTOR WAFER MANUFACTURING METHOD, AND SOLAR BATTERY CELL MANUFACTURING METHOD 有权
标题翻译：电线放电加工方法，半导体制造方法和太阳能电池组件制造方法
公开(公告)号：US20090212026A1
公开(公告)日：2009-08-27
申请号：US12093836
申请日：2005-11-16
申请人： Tatsushi Sato , Yoshihito Imai , Teiji Takahashi , Takeshi Sakata , Tomoko Sendai , Yoichiro Nishimoto , Shigeru Matsuno , Takeyuki Maegawa , Takaaki Iwata
发明人： Tatsushi Sato , Yoshihito Imai , Teiji Takahashi , Takeshi Sakata , Tomoko Sendai , Yoichiro Nishimoto , Shigeru Matsuno , Takeyuki Maegawa , Takaaki Iwata
IPC分类号： B23H1/00
CPC分类号： B23H7/02 , B23H9/00
摘要： Provided are a wire electric discharge machining method for poorly conductive materials, such as solar cell silicon, and a semiconductor wafer manufacturing method and a solar battery cell manufacturing method based on the wire electric discharge machining method. Electrical discharge machining of a high volume resistivity, hard and brittle materials, having a volume resistivity that is equal to or higher than 0.5 Ω·cm and equal to or lower than 5 Ω·cm is performed by applying a pulse voltage having a pulse width that is equal to or higher than 1 μsec and equal to or lower than 4 μsec and having a peak current at the time of machining a wire electrode that is equal to or higher than 10A and equal to or lower than 50A to a wire electrode and generating a discharge pulse between the wire electrode and a subject to be machined.
摘要翻译：本发明提供一种导电材料的导电放电加工方法，例如太阳能电池硅，半导体晶片的制造方法以及基于该放电加工方法的太阳能电池单元的制造方法。通过施加具有脉冲宽度的脉冲电压来执行体积电阻率等于或高于0.5Ω·cm且等于或小于5Ω·cm的高体积电阻率，硬脆性材料的放电加工等于或高于1个音箱并且等于或低于4个音箱，并且在对线电极进行等于或高于10A且等于或小于50A的线电极加工时具有峰值电流，以及在线电极和待加工对象之间产生放电脉冲。

3. 发明授权

US07557589B2 Gap detection device for laser beam machine, laser beam machining system and gap detection method for laser beam machine 失效
标题翻译：激光束机间隙检测装置，激光束加工系统和激光束机间隙检测方法
公开(公告)号：US07557589B2
公开(公告)日：2009-07-07
申请号：US11554707
申请日：2006-10-31
申请人： Takaaki Iwata , Hiroyoshi Omura , Yoshihito Imai , Teiji Takahashi
发明人： Takaaki Iwata , Hiroyoshi Omura , Yoshihito Imai , Teiji Takahashi
IPC分类号： G01R27/26 , B23K9/06 , B23K9/00
CPC分类号： B23K26/04
摘要： A signal processing portion obtains the reciprocal of a composite impedance of gap static capacitance and a plasma impedance, obtains composite static capacitance which is the sum of the gap static capacitance and a static capacitance component included in the plasma impedance from an imaginary part of the reciprocal, and obtains a resistance component included in the plasma impedance from a real part of the reciprocal. A gap detection device obtains the static capacitance component by using a model representing the characteristics of the reciprocal of the plasma impedance and the resistance component and obtains the gap static capacitance by subtracting the static capacitance component from the composite static capacitance. The gap detection device obtains a gap from the obtained gap static capacitance. Thus provided is a technique to detect a gap between a nozzle of a laser beam machine for outputting a laser beam and an object to be machined with high accuracy.
摘要翻译：信号处理部分获得间隙静态电容和等离子体阻抗的复合阻抗的倒数，获得复合静态电容，该复合静态电容是等离子体阻抗中包含的静态电容和静态电容之和的总和，并且从该倒数的实部获得包括在等离子体阻抗中的电阻分量。间隙检测装置通过使用表示等离子体阻抗和电阻分量的倒数的特性的模型来获得静态电容分量，并且通过从复合静态电容中减去静态电容分量来获得间隙静态电容。间隙检测装置从获得的间隙静电电容获得间隙。因此，提供了一种用于检测用于输出激光束的激光束机器的喷嘴与待加工物体之间的间隙的技术，其高精度。

4. 发明授权

US5961857A Laser machining apparatus with feed forward and feedback control 失效
标题翻译：具有前馈和反馈控制的激光加工设备
公开(公告)号：US5961857A
公开(公告)日：1999-10-05
申请号：US928080
申请日：1997-09-12
申请人： Teiji Takahashi , Yoshihito Imai , Atsushi Morita , Masato Matsubara , Osamu Nagano , Tsukasa Fukushima
发明人： Teiji Takahashi , Yoshihito Imai , Atsushi Morita , Masato Matsubara , Osamu Nagano , Tsukasa Fukushima
IPC分类号： B23K26/00 , B23K26/42 , H01S3/00 , H01S3/097 , H01S3/102 , H01S3/104 , H01S3/131 , H01S3/134
CPC分类号： H01S3/134 , B23K26/702 , H01S3/102 , H01S3/104
摘要： A laser machining apparatus according to the present invention describes characteristics of a laser oscillator with a function including laser power, pulse frequency and duty ratio, computes a command for a power supply unit in a feed forward control section according to a command based on the function and on the power, duty ratio and frequency, computes a command for a power supply unit in the feedback control section from a power command value and a power measurement value from the power sensor, and inputs these command to the power supply unit. Also the laser machining apparatus detects changes in characteristics in the laser oscillator and corrects the function for characteristics of the laser oscillator.
摘要翻译：根据本发明的激光加工设备描述具有包括激光功率，脉冲频率和占空比的功能的激光振荡器的特性，根据基于功能的命令计算前馈控制部分中的电源单元的命令并且根据功率，占空比和频率，根据来自功率传感器的功率指令值和功率测量值计算反馈控制部分中的电源单元的命令，并将这些命令输入到电源单元。此外，激光加工装置检测激光振荡器的特性变化，并校正激光振荡器的特性的功能。

5. 发明授权

US5841096A Laser machining apparatus and method of controlling same 失效
标题翻译：激光加工装置及其控制方法
公开(公告)号：US5841096A
公开(公告)日：1998-11-24
申请号：US928226
申请日：1997-09-12
申请人： Teiji Takahashi , Yoshihito Imai , Atsushi Morita , Masato Matsubara , Osamu Nagano , Tsukasa Fukushima
发明人： Teiji Takahashi , Yoshihito Imai , Atsushi Morita , Masato Matsubara , Osamu Nagano , Tsukasa Fukushima
IPC分类号： B23K26/00 , B23K26/42 , H01S3/00 , H01S3/097 , H01S3/102 , H01S3/104 , H01S3/131 , H01S3/134
CPC分类号： H01S3/134 , B23K26/702 , H01S3/102 , H01S3/104
摘要： A laser machining apparatus according to the present invention describes characteristics of a laser oscillator with a function including laser power, pulse frequency and duty ratio, computes a command for a power supply unit in a feed forward control section according to a command based on the function and on the power, duty ratio and frequency, computes a command for a power supply unit in the feedback control section from a power command value and a power measurement value from the power sensor, and inputs these command to the power supply unit. Also the laser machining apparatus detects changes in characteristics in the laser oscillator and corrects the function for characteristics of the laser oscillator.
摘要翻译：根据本发明的激光加工设备描述具有包括激光功率，脉冲频率和占空比的功能的激光振荡器的特性，根据基于功能的命令计算前馈控制部分中的电源单元的命令并且根据功率，占空比和频率，根据来自功率传感器的功率指令值和功率测量值计算反馈控制部分中的电源单元的命令，并将这些命令输入到电源单元。此外，激光加工装置检测激光振荡器的特性变化，并校正激光振荡器的特性的功能。

6. 发明授权

US5955856A Numerical control apparatus and method 失效
标题翻译：数控设备及方法
公开(公告)号：US5955856A
公开(公告)日：1999-09-21
申请号：US80961
申请日：1998-05-19
申请人： Tomonori Sato , Takashi Iwasaki , Teiji Takahashi
发明人： Tomonori Sato , Takashi Iwasaki , Teiji Takahashi
IPC分类号： G05B19/4093 , G05B19/4105 , G05B11/01
CPC分类号： G05B19/4105 , G05B2219/34098 , G05B2219/34175 , G05B2219/35121
摘要： A numerical control apparatus and a numerical control method is provided which permit high-accuracy and high-velocity travel at a joint between paths as well as simple and rapid calculations for this purpose. A path is inserted at the joint between the paths so as to achieve a continuous curvature.
摘要翻译：提供了一种数字控制装置和数值控制方法，其允许在路径之间的接合处进行高精度和高速行进，以及为此目的的简单和快速的计算。在路径之间的接合处插入路径，以实现连续的曲率。

7. 发明授权

US06943522B2 Servo controller 有权
标题翻译：伺服控制器
公开(公告)号：US06943522B2
公开(公告)日：2005-09-13
申请号：US10775253
申请日：2004-02-11
申请人： Kotaro Nagaoka , Tomonori Sato , Hidetoshi Ikeda , Teiji Takahashi
发明人： Kotaro Nagaoka , Tomonori Sato , Hidetoshi Ikeda , Teiji Takahashi
IPC分类号： G05B11/36 , G05B19/19 , G05D3/12 , H02P29/00
CPC分类号： G05B19/19 , G05B2219/41151 , G05B2219/41426 , G05B2219/41428
摘要： A servo controller includes a mechanical characteristic compensation unit for attenuating components having predetermined frequencies and corresponding to characteristics of a machine, which are included in a position instruction signal corrected by a finite impulse response (FIR) filter, and computing feed-forward signals respectively associated with position, speed, and torque of the machine, and a feedback compensation unit for driving the machine according to the feed-forward signals. Therefore, the servo controller can reduce vibrations that originate from the characteristics of the machine. In addition, because the FIR filter can easily make the response path with respect to a symmetrical instructed path, become symmetrical, when the machine is made to travel between two positions along the same path, the two response paths of the round trip match each other, so machined surfaces having no irregularities can be provided when performing reciprocating machining.
摘要翻译：伺服控制器包括用于衰减具有预定频率并对应于机器特性的分量的机械特征补偿单元，其包括在由有限脉冲响应（FIR）滤波器校正的位置指令信号中，并且计算分别相关联的前馈信号具有机器的位置，速度和扭矩，以及用于根据前馈信号驱动机器的反馈补偿单元。因此，伺服控制器可以减少源自机器特性的振动。另外，由于FIR滤波器能够容易地使相对于对称指令路径的响应路径成为对称的，所以当机器沿同一路径在两个位置之间行进时，往返的两个响应路径彼此匹配因此，进行往复加工时，可以提供没有凹凸的加工面。

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