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1. 发明申请

US20100154833A1 Resist film removing apparatus, resist film removing method, organic matter removing apparatus and organic matter removing method 审中-公开
标题翻译：抗蚀剂除去装置，抗蚀剂除去方法，有机物去除装置和有机物去除方法
公开(公告)号：US20100154833A1
公开(公告)日：2010-06-24
申请号：US10510244
申请日：2003-04-15
申请人： Tamio Endo , Atsushi Sato , Yasuhiko Amano , Tetsuji Tamura , Naoyuki Nishimura , Tadahiro Ohmi , Ikunori Yokoi
发明人： Tamio Endo , Atsushi Sato , Yasuhiko Amano , Tetsuji Tamura , Naoyuki Nishimura , Tadahiro Ohmi , Ikunori Yokoi
IPC分类号： B08B3/00
CPC分类号： H01L21/6715 , B08B3/02 , B08B2203/007 , G03F7/3057 , G03F7/422 , H01L21/02052 , H01L21/31133 , H01L21/67051 , H01L21/6708
摘要： A sheetfed resist removing apparatus having a substrate (111) being a cleaning object placed therein, includes a treatment chamber (101) forming a closed space, and a spray nozzle (102) to spray a cleaning liquid in a form so-called liquid drops over a surface of the substrate (111), in which the treatment chamber (101) forms the closed space containing the substrate (111) such that the placed substrate (111) faces the spray nozzle (102). This structure allows a cleaning liquid to be in the form of liquid drops in consideration of energy reduction, and permits desirable regulation of the temperature of the liquid drops when the liquid drops contact with the resist film in spraying the cleaning liquid over the resist film on the surface of the substrate (111) to thereby remove the resist film, so that secure removal of the resist film can be accomplished.
摘要翻译：一种具有放置在其中的清洁对象的基板（111）的单张纸抗蚀剂去除装置，包括形成封闭空间的处理室（101）和喷射所谓液滴形式的清洗液的喷嘴（102）在基板（111）的表面上，处理室（101）形成包含基板（111）的封闭空间，使得放置的基板（111）面向喷嘴（102）。考虑到能量降低，这种结构允许清洗液体呈液滴形式，并且当液体在抵抗膜上喷射清洁液体时在抗蚀剂膜上喷溅时允许期望调节液滴的温度，基板（111）的表面，从而去除抗蚀剂膜，从而可以完全去除抗蚀剂膜。

2. 发明申请

US20050241673A1 Resist removing apparatus and method of removing resist 审中-公开
标题翻译：抗蚀剂去除装置和去除抗蚀剂的方法
公开(公告)号：US20050241673A1
公开(公告)日：2005-11-03
申请号：US10510245
申请日：2003-04-15
申请人： Tamio Endo , Atsushi Sato , Yasuhiko Amano , Tetsuji Tamura
发明人： Tamio Endo , Atsushi Sato , Yasuhiko Amano , Tetsuji Tamura
IPC分类号： G03F7/42 , H01L21/027 , H01L21/304 , H01L21/306 , H01L21/311 , C25F1/00 , B08B1/02 , B08B3/00 , B08B6/00 , C25F3/30 , C25F5/00
CPC分类号： G03F7/423 , H01L21/02052 , H01L21/31133
摘要： In a resist removing apparatus of the present invention, a distance between a surface of a substrate (10) and an ultraviolet rays transmission plate (3) is adjusted to a predetermined distance by an upward and downward moving mechanism (2b) of a substrate stage (2), and O3 water is supplied from an O3 water supply section (12) to a treatment space formed between the surface of the substrate (10) and the ultraviolet ray transmission plate (3) to form a liquid film (41). Various kinds of active oxygen are generated by emitting ultraviolet rays of wavelengths of 172 nm to 310 nm to the liquid film (41) by an ultraviolet lamp, and dissolving O3, and thereby the resist is dissolved and removed. This construction makes it possible to form the liquid film on the resist and dissolve and remove the resist by using the active oxygen generated in the liquid film, and achieve a breakaway from the resources and energy-intensive technique, namely, realization of an environmentally compatible technique which does not depend on high energy and chemical solvents for removing a resist.
摘要翻译：在本发明的抗蚀剂除去装置中，通过基板的上下移动机构（2b）将基板（10）的表面与紫外线透射板（3）之间的距离调整为规定的距离，阶段（2）和O 3 3水从O 3 3供水部分（12）供应到形成在基板（10）的表面和紫外线透射板（3）形成液膜（41）。通过用紫外线灯向液膜（41）发射波长为172nm〜310nm的紫外线，溶解O 3 3，从而使抗蚀剂溶解，生成各种活性氧，删除。这种结构使得可以在抗蚀剂上形成液膜并通过使用在液膜中产生的活性氧来溶解并去除抗蚀剂，并实现与资源和能源密集型技术的分离，即实现环境兼容不依赖于高能量和化学溶剂去除抗蚀剂的技术。

3. 发明申请

US20090112550A1 System and Method for Generating a Worst Case Current Waveform for Testing of Integrated Circuit Devices 有权
标题翻译：用于生成最差情况的系统和方法用于集成电路器件测试的电流波形
公开(公告)号：US20090112550A1
公开(公告)日：2009-04-30
申请号：US11927840
申请日：2007-10-30
申请人： Makoto Aikawa , Jonathan J. DeMent , Sang H. Dhong , Brian K. Flachs , Gilles Gervais , Iwao Takiguchi , Tetsuji Tamura
发明人： Makoto Aikawa , Jonathan J. DeMent , Sang H. Dhong , Brian K. Flachs , Gilles Gervais , Iwao Takiguchi , Tetsuji Tamura
IPC分类号： G06F17/50
CPC分类号： G06F17/5036 , G01R31/318364
摘要： A system and method for generating a worst case current waveform for testing of integrated circuit devices are provided. Architectural analysis of an integrated circuit device is first performed to determine an initial worst case power workload to be applied to the integrated circuit device. Thereafter, the derived worst case power workload is applied to a model and is simulated to generate a worst case current waveform that is input to an electrical model of the integrated circuit device to generate a worst case noise budget value. The worst case noise budget value is then compared to measured noise from application of the worst case power workload to a hardware implemented integrated circuit device. The worst case current waveform may be selected for future testing of integrated circuit devices or modifications to the simulation models may be performed and the process repeated based on the results of the comparison.
摘要翻译：提供一种用于产生用于集成电路器件测试的最坏情况电流波形的系统和方法。首先执行集成电路装置的结构分析，以确定要应用于集成电路装置的初始最坏情况功率工作负荷。此后，将得到的最坏情况功率工作量应用于模型，并且被模拟以产生输入到集成电路器件的电气模型以产生最坏情况噪声预算值的最坏情况电流波形。然后将最坏情况的噪声预算值与从最坏情况功率工作负载应用于硬件实现的集成电路设备的测量噪声进行比较。可以选择最坏情况下的电流波形以用于集成电路设备的未来测试，或者可以对仿真模型进行修改，并且基于比较的结果重复该过程。

4. 发明申请

US20080189090A1 System and Method for Determining a Guard Band for an Operating Voltage of an Integrated Circuit Device 审中-公开
标题翻译：用于确定集成电路装置的工作电压的保护带的系统和方法
公开(公告)号：US20080189090A1
公开(公告)日：2008-08-07
申请号：US11671852
申请日：2007-02-06
申请人： Makoto Aikawa , Sang H. Dhong , Brian Flachs , Gilles Gervais , Yoichi Nishino , Iwao Takiguchi , Tetsuji Tamura , Yaping Zhou
发明人： Makoto Aikawa , Sang H. Dhong , Brian Flachs , Gilles Gervais , Yoichi Nishino , Iwao Takiguchi , Tetsuji Tamura , Yaping Zhou
IPC分类号： G06G7/62 , G06F17/50
CPC分类号： G06F17/5036 , G01R31/318357
摘要： A system and method for determining a guard band for an operating voltage of an integrated circuit device are provided. The system and method provide a mechanism for calculating the guard band based on a comparison of simulated noise obtained from a simulation of the integrated circuit device using a worst case waveform stimuli with simulated or measured power supply noise of a workload/test pattern that may be achieved using testing equipment. A scaling factor for the guard band is determined by comparing results of a simulation of a workload/test pattern with measured results of the workload/test pattern as applied to a hardware implementation of the integrated circuit device. This scaling factor is applied to a difference between the noise generated through simulation of the workload/test pattern and the noise generated through simulation of the worst case current waveform to generate a guard band value.
摘要翻译：提供了一种用于确定集成电路装置的工作电压的保护带的系统和方法。该系统和方法提供了一种基于使用最差情况波形刺激从集成电路装置的模拟获得的模拟噪声与可能是工作负载/测试模式的模拟或测量的电源噪声的比较来计算保护频带的机制使用测试设备实现。通过将工作负载/测试模式的仿真结果与应用于集成电路设备的硬件实现的工作负载/测试模式的测量结果进行比较来确定保护频带的缩放因子。该缩放因子被应用于通过模拟工作负载/测试模式产生的噪声与通过模拟最坏情况电流波形产生的噪声之间的差异以产生保护带值。

5. 发明申请

US20070074216A1 Task management method, task management device, semiconductor integrated circuit, electronic apparatus, and task management system 有权
标题翻译：任务管理方法，任务管理装置，半导体集成电路，电子设备和任务管理系统
公开(公告)号：US20070074216A1
公开(公告)日：2007-03-29
申请号：US10575042
申请日：2005-04-08
申请人： Kenichi Adachi , Kazuaki Yazawa , Iwao Takiguchi , Atsuhiko Imai , Tetsuji Tamura
发明人： Kenichi Adachi , Kazuaki Yazawa , Iwao Takiguchi , Atsuhiko Imai , Tetsuji Tamura
IPC分类号： G06F9/46
CPC分类号： G06F1/3203 , G06F1/329 , G06F9/4887 , Y02D10/126 , Y02D10/24
摘要： This task management method includes dividing a unit time of processing into a reserved band for guaranteeing real-timeness and a non-reserved band not for guaranteeing real-timeness, and skipping a task to be executed in the non-reserved band as appropriate when processor throughput falls. That is, when the operating frequency of the processor is lowered in order to suppress heat generation, the real-timeness of tasks to be executed in the reserved band is guaranteed at the expense of processing the task to be executed in the non-reserved band in a best-efforts fashion.
摘要翻译：该任务管理方法包括将处理的单位时间划分为用于保证实时性的保留频带和不保证实时性的非保留频带，并且当处理器适当时跳过在非保留频带中执行的任务吞吐量下降。也就是说，当为了抑制发热而降低处理器的工作频率时，保证在保留频带中执行的任务的实时性以处理在非保留频带中执行的任务为代价以尽力而为的方式。

6. 发明授权

US07167778B2 Electronic device cooling apparatus and method for cooling electronic device with temperature prediction 有权
标题翻译：电子装置冷却装置及具有温度预测的电子装置的冷却方法
公开(公告)号：US07167778B2
公开(公告)日：2007-01-23
申请号：US11140491
申请日：2005-05-27
申请人： Kazuaki Yazawa , Iwao Takiguchi , Tetsuji Tamura , Atsuhiko Imai , Kenichi Adachi
发明人： Kazuaki Yazawa , Iwao Takiguchi , Tetsuji Tamura , Atsuhiko Imai , Kenichi Adachi
IPC分类号： G05D23/00 , H01L23/34
CPC分类号： G06F1/206 , G01K7/425 , G05D23/1917 , H01L23/34 , H01L23/467 , H01L23/4735 , H01L2224/16225 , H01L2224/32225 , H01L2224/73204 , H01L2224/73253 , H01L2924/15311 , H05K7/20172 , H05K7/20209 , H01L2924/00
摘要： A temperature predicting unit predicts the temperature of an electronic device after a predetermined period, and the speed of temperature variation from the operating state of the load. Based on the results of prediction by the temperature predicting unit, a selection unit instructs either one or both of a nozzle control unit and an electric fan control unit to exercise control. According to a control signal from the selection unit, the nozzle control unit transmits a control signal to a nozzle unit to drive a jet cooling apparatus. According to a control signal from the selection unit, the electric fan control unit transmits a control signal to an electric fan unit to drive an electric fan. The selection unit selects the electric fan when the predicted speed of temperature variation exceeds a predetermined threshold, and selects the jet cooling apparatus when the predetermined thresholds is not exceeded.
摘要翻译：温度预测单元在预定时间段之后预测电子设备的温度，以及从负载的操作状态开始的温度变化速度。基于温度预测单元的预测结果，选择单元指示喷嘴控制单元和电风扇控制单元中的一个或两个进行控制。根据来自选择单元的控制信号，喷嘴控制单元向喷嘴单元发送控制信号以驱动喷射冷却装置。根据来自选择单元的控制信号，电风扇控制单元向电风扇单元发送控制信号以驱动电风扇。当预测的温度变化速度超过预定阈值时，选择单元选择电风扇，并且当不超过预定阈值时选择喷射冷却装置。

7. 发明授权

US07831842B2 Processor for controlling performance in accordance with a chip temperature, information processing apparatus, and method of controlling processor 有权
标题翻译：用于根据芯片温度控制性能的处理器，信息处理装置和控制处理器的方法
公开(公告)号：US07831842B2
公开(公告)日：2010-11-09
申请号：US10575041
申请日：2005-04-08
申请人： Kenichi Adachi , Kazuaki Yazawa , Iwao Takiguchi , Atsuhiko Imai , Tetsuji Tamura
发明人： Kenichi Adachi , Kazuaki Yazawa , Iwao Takiguchi , Atsuhiko Imai , Tetsuji Tamura
IPC分类号： G06F1/00 , G06F9/44
CPC分类号： G06F1/206 , G06F1/3206 , G06F1/324 , G06F1/3243 , G06F1/3287
摘要： A heat generation amount estimation unit acquires the number of sub processors currently in operation, acquires the current operating frequency, and estimates the amount of heat generation after a period Δt. A temperature control unit estimates the temperature after the period Δt based on the current temperature input from a temperature sensor and the amount of heat generation estimated, and compares it with a predetermined threshold temperature. If the predetermined threshold temperature is reached, the temperature control unit acquires the number of sub processors available in parallel after the period Δt from a task management unit, and consults a performance table to determine which operation point to shift to. A sub processor control unit and a frequency control unit switch to the number of sub processors in operation and the operating frequency accordingly. The performance table lists possible operation points in order of performance.
摘要翻译：发热量估计单元获取当前正在运行的子处理器的数量，获取当前的工作频率，并且估计时段＆Dgr; t之后的发热量。温度控制单元基于从温度传感器输入的当前温度和估计的发热量来估计周期＆Dgrt之后的温度，并将其与预定阈值温度进行比较。如果达到预定阈值温度，则温度控制单元从任务管理单元获取在时间段＆Dgrt之后并行可用的子处理器的数量，并且查阅性能表以确定要移动的操作点。子处理器控制单元和频率控制单元切换到操作中的子处理器的数量和相应的操作频率。性能表按性能顺序列出可能的操作点。

8. 发明申请

US20090228727A1 METHOD AND PROGRAM FOR SETTING MICROPROCESSOR POWER SUPPLY VOLTAGE 有权
标题翻译：用于设置微处理器电源电压的方法和程序
公开(公告)号：US20090228727A1
公开(公告)日：2009-09-10
申请号：US12162393
申请日：2006-11-20
申请人： Tetsuji Tamura , Iwao Takiguchi , Yosuke Muraki , Toshiyuki Hiroi , Koji Inoue , Makoto Aikawa
发明人： Tetsuji Tamura , Iwao Takiguchi , Yosuke Muraki , Toshiyuki Hiroi , Koji Inoue , Makoto Aikawa
IPC分类号： G06F1/32
CPC分类号： G06F1/3203 , G06F1/3296 , Y02D10/172
摘要： A determining unit determines the state of the microprocessor. A setting unit sets a power supply voltage to be supplied to the microprocessor according to the state of the microprocessor determined by the determining unit. A power supply circuit supplies the power supply voltage set by the setting unit, to the microprocessor via a power supply line. The determining unit determines repeatedly the state of the microprocessor at preset timing, and the setting unit resets the power supply voltage every time the determination is performed by the determining unit.
摘要翻译：确定单元确定微处理器的状态。设置单元根据由确定单元确定的微处理器的状态来设置要提供给微处理器的电源电压。电源电路通过电源线将由设定单元设定的电源电压供给微处理器。确定单元在预设定时重复地确定微处理器的状态，并且每当确定单元执行确定时，设置单元复位电源电压。

9. 发明授权

US07535020B2 Systems and methods for thermal sensing 有权
标题翻译：热感测系统和方法
公开(公告)号：US07535020B2
公开(公告)日：2009-05-19
申请号：US11168591
申请日：2005-06-28
申请人： Munehiro Yoshida , Daniel Stasiak , Michael F. Wang , Charles R. Johns , Hiroki Kihara , Tetsuji Tamura , Kazuaki Yazawa , Iwao Takiguchi
发明人： Munehiro Yoshida , Daniel Stasiak , Michael F. Wang , Charles R. Johns , Hiroki Kihara , Tetsuji Tamura , Kazuaki Yazawa , Iwao Takiguchi
IPC分类号： H01L23/58
CPC分类号： H01L25/162 , G06F1/206 , H01L23/34 , H01L2924/0002 , H01L2924/00
摘要： Systems and methods for positioning thermal sensors within an integrated circuit in a manner that provides useful thermal measurements corresponding to different parts of the integrated circuit. In one embodiment, an integrated circuit includes multiple, duplicate functional blocks. A separate thermal sensor is coupled to each of the duplicate functional blocks, preferably in the same relative location on each of the duplicate functional blocks, and preferably at a hotspot. One embodiment also includes thermal sensors on one or more functional blocks of other types in the integrated circuit. One embodiment includes a thermal sensor positioned at a cool spot, such as at the edge of the integrated circuit chip. Each of the thermal sensors may have ports to enable power and ground connections or data connections between the sensors and external components or devices.
摘要翻译：用于以集成电路的不同部分提供有用的热测量的方式在集成电路内定位热传感器的系统和方法。在一个实施例中，集成电路包括多个复制功能块。单独的热传感器耦合到每个重复功能块，优选地在每个复制功能块上相同的相对位置，并且优选地在热点处。一个实施例还包括在集成电路中的其它类型的一个或多个功能块上的热传感器。一个实施例包括位于集成电路芯片的边缘处的冷点处的热传感器。每个热传感器可以具有端口，以实现传感器和外部组件或设备之间的电源和接地连接或数据连接。

10. 发明申请

US20070300082A1 Method for controlling operation of microprocessor which performs duty cycle correction process 失效
标题翻译：用于控制执行占空比校正处理的微处理器的操作的方法
公开(公告)号：US20070300082A1
公开(公告)日：2007-12-27
申请号：US11471819
申请日：2006-06-21
申请人： Yosuke Muraki , Tetsuji Tamura , Iwao Takiguchi , Makoto Aikawa , Eskinder Hailu , Byron Lee Krauter , Stephen Douglas Weitzel , Jieming Qi , Kazuhiko Miki , David William Boerstler , Gilles Gervais , Kirk David Peterson , Robert Walter Berry , Sang Hoo Dhong
发明人： Yosuke Muraki , Tetsuji Tamura , Iwao Takiguchi , Makoto Aikawa , Eskinder Hailu , Byron Lee Krauter , Stephen Douglas Weitzel , Jieming Qi , Kazuhiko Miki , David William Boerstler , Gilles Gervais , Kirk David Peterson , Robert Walter Berry , Sang Hoo Dhong
IPC分类号： G06F1/00
CPC分类号： G06F1/04
摘要： A technology for supplying a power supply voltage to a microprocessor. Before normal arithmetic processing of the microprocessor, duty cycle correction process for adjusting the duty cycle of a clock signal inside the microprocessor is performed. In the duty cycle correction process for adjusting the duty cycle, the duty cycle of the clock signal is adjusted so as to minimize the power voltage at which the microprocessor is still operable.
摘要翻译：用于向微处理器提供电源电压的技术。在微处理器的正常运算处理之前，执行用于调整微处理器内的时钟信号占空比的占空比校正处理。在用于调整占空比的占空比校正处理中，调整时钟信号的占空比以使微处理器仍然可操作的电源电压最小化。

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