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    • 9. 发明授权
    • Organic silicon oxide core-shell particles and preparation method thereof, porous film-forming composition, porous film and formation method thereof, and semiconductor device
    • 有机氧化硅核壳颗粒及其制备方法,多孔成膜组合物,多孔膜及其形成方法以及半导体器件
    • US07754330B2
    • 2010-07-13
    • US12472681
    • 2009-05-27
    • Yoshitaka HamadaFujio YagihashiTakeshi AsanoHideo NakagawaMasaru Sasago
    • Yoshitaka HamadaFujio YagihashiTakeshi AsanoHideo NakagawaMasaru Sasago
    • B32B5/16
    • H01B3/10Y10T428/25Y10T428/259Y10T428/2991Y10T428/2993Y10T428/2995Y10T428/31663
    • Provided are organic silicon oxide fine particles which can be formed into a porous film having a dielectric constant and mechanical strength expected as a high-performance porous insulating film and having excellent chemical stability, and a preparation method thereof. Described specifically, provided are an organic silicon oxide fine particle comprising a core containing at least an inorganic silicon oxide or an organic silicon oxide and a shell containing at least an organic silicon oxide and being formed around the core by using shell-forming hydrolyzable silane in the presence of a basic catalyst; wherein of silicon atoms constituting the core or the shell, a ratio (T/Q) of a number (T) of silicon atoms having at least one bond directly attached to a carbon atom to a number (Q) of silicon atoms having all of four bonds attached to an oxygen atom is greater in the shell than in the core; and wherein the shell-forming hydrolyzable silane comprise at least a hydrolyzable silane compound having two or more hydrolyzable-group-having silicon atoms bound to each other via a carbon chain or via a carbon chain containing one silicon atom between some carbon atoms.
    • 提供可以形成具有期望作为高性能多孔绝缘膜的介电常数和机械强度并且具有优异的化学稳定性的多孔膜的有机氧化硅微粒及其制备方法。 具体地说,提供了一种有机氧化硅微粒,其包含至少含有无机氧化硅或有机氧化硅的芯和至少含有有机氧化硅的壳,并且通过使用壳形成可水解硅烷在芯周围形成 存在碱性催化剂; 其中构成核或壳的硅原子中,具有至少一个直接连接到碳原子上的键的硅原子数(T)与(Q)的硅原子数(Q)的比(T / Q) 附着在氧原子上的四个键在壳中比在核中大; 并且其中所述成壳可水解硅烷至少包含具有两个或多个可水解基团的硅原子的可水解硅烷化合物,其通过碳链彼此结合,或通过在一些碳原子之间含有一个硅原子的碳链。