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    • 5. 发明授权
    • Semiconductor device and method of manufacturing the same
    • 半导体装置及其制造方法
    • US08748282B2
    • 2014-06-10
    • US13169626
    • 2011-06-27
    • Ryo KubotaNobutaka NagaiSatoshi Kura
    • Ryo KubotaNobutaka NagaiSatoshi Kura
    • H01L29/72
    • H01L28/91
    • A semiconductor device is manufactured by forming a hole as being extended through a first insulating film and an insulating interlayer stacked over a semiconductor substrate, allowing side-etching of the inner wall of the hole to proceed specifically in a portion of the insulating interlayer, to thereby form a structure having the first insulating film projected out from the edge towards the center of the hole; forming a lower electrode film as being extended over the top surface, side face and back surface of the first insulating film, and over the inner wall and bottom surface of the hole; filling a protective film in the hole; removing the lower electrode film specifically in portions fallen on the top surface and side face of the first insulating film; removing the protective film; and forming a cylindrical capacitor in the hole.
    • 半导体器件通过在第一绝缘膜和覆盖在半导体衬底上的绝缘夹层延伸形成孔,通过对绝缘中间层的一部分特定的孔的内壁进行侧蚀, 从而形成具有从边缘向孔的中心突出的第一绝缘膜的结构; 在所述第一绝缘膜的上表面,侧面和背面延伸并在所述孔的内壁和底面上方形成下电极膜; 在孔中填充保护膜; 在第一绝缘膜的顶表面和侧面上分别去掉下电极膜; 去除保护膜; 并在孔中形成圆柱形电容器。
    • 6. 发明授权
    • Semiconductor device and method of manufacturing the same
    • 半导体装置及其制造方法
    • US07985997B2
    • 2011-07-26
    • US12130096
    • 2008-05-30
    • Ryo KubotaNobutaka NagaiSatoshi Kura
    • Ryo KubotaNobutaka NagaiSatoshi Kura
    • H01L29/72
    • H01L28/91
    • A semiconductor device is manufactured by forming a hole as being extended through a first insulating film and an insulating interlayer stacked over a semiconductor substrate, allowing side-etching of the inner wall of the hole to proceed specifically in a portion of the insulating interlayer, to thereby form a structure having the first insulating film projected out from the edge towards the center of the hole; forming a lower electrode film as being extended over the top surface, side face and back surface of the first insulating film, and over the inner wall and bottom surface of the hole; filling a protective film in the hole; removing the lower electrode film specifically in portions fallen on the top surface and side face of the first insulating film; removing the protective film; and forming a cylindrical capacitor in the hole.
    • 半导体器件通过在第一绝缘膜和覆盖在半导体衬底上的绝缘夹层延伸形成孔,通过对绝缘中间层的一部分特定的孔的内壁进行侧蚀, 从而形成具有从边缘向孔的中心突出的第一绝缘膜的结构; 在所述第一绝缘膜的上表面,侧面和背面延伸并在所述孔的内壁和底面上方形成下电极膜; 在孔中填充保护膜; 在第一绝缘膜的顶表面和侧面上分别去掉下电极膜; 去除保护膜; 并在孔中形成圆柱形电容器。
    • 7. 发明申请
    • SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
    • 半导体器件及其制造方法
    • US20080296729A1
    • 2008-12-04
    • US12130096
    • 2008-05-30
    • Ryo KUBOTANobutaka NagaiSatoshi Kura
    • Ryo KUBOTANobutaka NagaiSatoshi Kura
    • H01L29/92H01L21/02
    • H01L28/91
    • A semiconductor device is manufactured by forming a hole as being extended through a first insulating film and an insulating interlayer stacked over a semiconductor substrate, allowing side-etching of the inner wall of the hole to proceed specifically in a portion of the insulating interlayer, to thereby form a structure having the first insulating film projected out from the edge towards the center of the hole; forming a lower electrode film as being extended over the top surface, side face and back surface of the first insulating film, and over the inner wall and bottom surface of the hole; filling a protective film in the hole; removing the lower electrode film specifically in portions fallen on the top surface and side face of the first insulating film; removing the protective film; and forming a cylindrical capacitor in the hole.
    • 半导体器件通过在第一绝缘膜和覆盖在半导体衬底上的绝缘夹层延伸形成孔,通过对绝缘中间层的一部分特定的孔的内壁进行侧蚀, 从而形成具有从边缘向孔的中心突出的第一绝缘膜的结构; 在所述第一绝缘膜的上表面,侧面和背面延伸并在所述孔的内壁和底面上方形成下电极膜; 在孔中填充保护膜; 在第一绝缘膜的顶表面和侧面上分别去掉下电极膜; 去除保护膜; 并在孔中形成圆柱形电容器。