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1. 发明授权

US07901865B2 Resist composition and process for formation of resist patterns 有权
标题翻译：抗蚀剂图案的抗蚀剂组成和工艺
公开(公告)号：US07901865B2
公开(公告)日：2011-03-08
申请号：US11574805
申请日：2005-09-02
申请人： Taku Hirayama , Daiju Shiono , Hideo Hada
发明人： Taku Hirayama , Daiju Shiono , Hideo Hada
IPC分类号： G03F7/004 , G03F7/028 , G03F7/039
CPC分类号： G03F7/0392 , G03F7/0045 , G03F7/0048 , Y10S430/114
摘要： A resist composition that includes a base material component (A), which contains acid-dissociable, dissolution-inhibiting groups and exhibits increased alkali solubility under the action of acid, an acid generator component (B) that generates acid on exposure, and an organic solvent (C), in which the components (A) and (B) are dissolved in the organic solvent (C), wherein the base material component (A) contains a protected form (A1) of a polyhydric phenol compound (a) having two or more phenolic hydroxyl groups and a molecular weight within a range from 300 to 2,500, in which either a portion of, or all of, the phenolic hydroxyl groups are protected with acid-dissociable, dissolution-inhibiting groups, and the organic solvent (C) comprises an alcohol.
摘要翻译：一种抗蚀剂组合物，其包含基质成分（A），其含有酸解离的溶解抑制基团，并且在酸的作用下显示出增加的碱溶解性，在曝光时产生酸的酸产生剂组分（B）和有机其中组分（A）和（B）溶解在有机溶剂（C）中的溶剂（C），其中基材组分（A）含有多元酚化合物（a）的保护形式（A1）两个或更多个酚羟基和分子量在300-2,500的范围内，其中酚羟基的一部分或全部被酸解离的溶解抑制基团保护，并且有机溶剂（ C）包含醇。

2. 发明授权

US07862981B2 Compound, positive resist composition and method of forming resist pattern 失效
标题翻译：化合物，正性抗蚀剂组合物和形成抗蚀剂图案的方法
公开(公告)号：US07862981B2
公开(公告)日：2011-01-04
申请号：US11917458
申请日：2006-06-07
申请人： Daiju Shiono , Taku Hirayama , Hideo Hada
发明人： Daiju Shiono , Taku Hirayama , Hideo Hada
IPC分类号： G03C1/00 , C07C39/12
CPC分类号： C07C69/712 , C07C2603/74 , G03F7/0392 , G03F7/0397
摘要： A compound including a polyhydric phenol compound represented by general formula (I) shown below (wherein R11 to R17 each independently represents an alkyl group of 1 to 10 carbon atoms or aromatic hydrocarbon group which may contain a hetero atom in the structure thereof, and X represents an aliphatic cyclic group) and having a molecular weight of 300 to 2,500, in which some or all of the hydrogen atoms of the phenolic hydroxyl groups are substituted with acid dissociable, dissolution inhibiting groups; a positive resist composition containing the compound; and a method of forming a resist pattern using the positive resist composition.
摘要翻译：含有下述通式（I）表示的多元酚化合物的化合物（其中，R 11〜R 17各自独立地表示碳原子数1〜10的烷基或其结构中可含有杂原子的芳香族烃基，X 代表脂族环基），其分子量为300-2,500，其中酚羟基的一些或全部氢原子被酸解离的溶解抑制基团取代; 含有该化合物的正性抗蚀剂组合物; 以及使用正性抗蚀剂组合物形成抗蚀剂图案的方法。

3. 发明申请

US20100009284A1 COMPOUND, POSITIVE RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN 失效
标题翻译：化合物，阳性电阻组合物和形成电阻图案的方法
公开(公告)号：US20100009284A1
公开(公告)日：2010-01-14
申请号：US11917458
申请日：2006-06-07
申请人： Daiju Shiono , Taku Hirayama , Hideo Hada
发明人： Daiju Shiono , Taku Hirayama , Hideo Hada
IPC分类号： G03F7/20 , C07C39/17 , C07C69/712 , G03F7/004
CPC分类号： C07C69/712 , C07C2603/74 , G03F7/0392 , G03F7/0397
摘要： A compound including a polyhydric phenol compound represented by general formula (I) shown below (wherein R11 to R17 each independently represents an alkyl group of 1 to 10 carbon atoms or aromatic hydrocarbon group which may contain a hetero atom in the structure thereof, and X represents an aliphatic cyclic group) and having a molecular weight of 300 to 2,500, in which some or all of the hydrogen atoms of the phenolic hydroxyl groups are substituted with acid dissociable, dissolution inhibiting groups; a positive resist composition containing the compound; and a method of forming a resist pattern using the positive resist composition.
摘要翻译：含有下述通式（I）表示的多元酚化合物的化合物（其中，R 11〜R 17各自独立地表示碳原子数1〜10的烷基或其结构中可含有杂原子的芳香族烃基，X 代表脂族环基），其分子量为300-2,500，其中酚羟基的一些或全部氢原子被酸解离的溶解抑制基团取代; 含有该化合物的正性抗蚀剂组合物; 以及使用正性抗蚀剂组合物形成抗蚀剂图案的方法。

4. 发明申请

US20090202939A1 COMPOUND, POSITIVE RESIST COMPOSITION AND METHOD FOR FORMING RESIST PATTERN 有权
标题翻译：化合物，阳离子组合物和形成电阻图案的方法
公开(公告)号：US20090202939A1
公开(公告)日：2009-08-13
申请号：US12299371
申请日：2007-03-20
申请人： Daiju Shiono , Taku Hirayama , Hideo Hada
发明人： Daiju Shiono , Taku Hirayama , Hideo Hada
IPC分类号： G03F7/004 , C07C69/612 , G03F7/20
CPC分类号： C07C69/712 , C07C2603/74 , G03F7/0045 , G03F7/0392
摘要： Disclosed are a compound that can be used for a resist composition, a positive resist composition that includes the compound, and a method for forming a resist pattern.Specifically disclosed is a compound represented by a formula (A-1). In the formula (A-1), R11 to R17 each represents an alkyl group or an aromatic hydrocarbon group; g and j each represents an integer of 1 or greater, and k and q each represents an integer of 0 or greater, provided that g+j+k+q is not greater than 5; b represents an integer of 1 or greater, and l and m each represents an integer of 0 or greater, provided that b+l+m is not greater than 4; c represents an integer of 1 or greater, and n and o each represents an integer of 0 or greater, provided that c+n+o is not greater than 4; A represents a trivalent aromatic cyclic group, alkyl group or aliphatic cyclic group, or a trivalent organic group having an aromatic cyclic group or an aliphatic cyclic group; and Z represents a group represented by a formula (z1). In the formula (z1), Y represents an alkylene group, a divalent aromatic hydrocarbon group or aliphatic cyclic group, or a divalent organic group having an aromatic hydrocarbon group or an aliphatic cyclic group; and R′ represents an acid dissociable, dissolution inhibiting group.
摘要翻译：公开了可用于抗蚀剂组合物的化合物，包含该化合物的正型抗蚀剂组合物和形成抗蚀剂图案的方法。具体公开的是由式（A-1）表示的化合物。式（A-1）中，R 11〜R 17表示烷基或芳香族烃基， g和j各自表示1或更大的整数，并且k和q各自表示0或更大的整数，条件是g + j + k + q不大于5; b表示1或更大的整数，并且l和m各自表示0或更大的整数，条件是b + 1 + m不大于4; c表示1或更大的整数，并且n和o各自表示0或更大的整数，条件是c + n + o不大于4; A表示三价芳族环状基团，烷基或脂肪族环状基团，或具有芳香族环状基团或脂肪族环状基团的三价有机基团， Z表示由式（z1）表示的基团。式（z1）中，Y表示亚烷基，二价芳香族烃基或脂肪族环状基团，或具有芳香族烃基或脂肪族环状基团的二价有机基团，并且R'表示酸解离，溶解抑制基团。

5. 发明申请

US20090117488A1 COMPOUND, POSITIVE RESIST COMPOSITION AND RESIST PATTERN FORMING METHOD 失效
标题翻译：化合物，阳性电阻组合物和电阻图案形成方法
公开(公告)号：US20090117488A1
公开(公告)日：2009-05-07
申请号：US11994602
申请日：2006-06-30
申请人： Takako Hirosaki , Daiju Shiono , Taku Hirayama , Hideo Hada
发明人： Takako Hirosaki , Daiju Shiono , Taku Hirayama , Hideo Hada
IPC分类号： G03F7/004 , C07C69/76 , G03F7/26
CPC分类号： G03F7/0397 , C07C67/343 , C07C69/712 , C07C2603/74 , G03F7/0045
摘要： The present invention provides a positive resist composition and a resist pattern forming method that are capable of forming a resist pattern with a reduced level of roughness. The positive resist composition includes the compound represented by the general formula (I) below. The present invention also provides the resist pattern forming method using the positive resist composition above. [wherein, in formula (I), R11 and R12 each represents, independently, an alkyl group of 1 to 10 carbon atoms or an aromatic hydrocarbon group, and may include a hetero atom in the structure thereof; R21 to R24 each represents, independently, a hydrogen atom or an acid dissociable, dissolution inhibiting group, and two of the R21 to R24 represents a hydrogen atom and the others represents an acid dissociable, dissolution inhibiting group; X is a group represented by general formulas (Ia) or (Ib) below].
摘要翻译：本发明提供能够形成具有降低的粗糙度的抗蚀剂图案的正型抗蚀剂组合物和抗蚀剂图案形成方法。正型抗蚀剂组合物包括由下述通式（I）表示的化合物。本发明还提供了使用上述正型抗蚀剂组合物的抗蚀剂图案形成方法。式（I）中，R 11和R 12分别独立地表示1〜10个碳原子的烷基或芳香族烃基，其结构中可以含有杂原子; R21〜R24各自独立地表示氢原子或酸解离的溶解抑制基团，R21〜R24中的两个表示氢原子，其余表示酸解离，溶解抑制基团。 X为下述通式（Ia）或（Ib）表示的基团。

6. 发明申请

US20090035691A1 POSITIVE RESIST COMPOSITION, METHOD FOR FORMING RESIST PATTERN AND COMPOUND 有权
标题翻译：正电阻组合物，形成电阻图案和化合物的方法
公开(公告)号：US20090035691A1
公开(公告)日：2009-02-05
申请号：US11817012
申请日：2006-02-20
申请人： Daiju Shiono , Taku Hirayama , Hideo Hada
发明人： Daiju Shiono , Taku Hirayama , Hideo Hada
IPC分类号： G03F7/004 , G03F7/20 , C07C69/76 , C07C39/15
CPC分类号： G03F7/0397 , C07C69/712 , C07C2601/14 , C07C2603/74 , G03F7/0045 , G03F7/0392 , Y10S430/106
摘要： A positive resist composition that includes a base material component (A) that contains an acid-dissociable, dissolution-inhibiting group and exhibits increased alkali solubility under the action of acid, and an acid generator component (B) that generates acid upon exposure, wherein the base material component (A) contains a compound (A1), in which either a portion of, or all of, the hydrogen atoms of phenolic hydroxyl groups within a polyhydric phenol compound with a molecular weight of 300 to 2,500 represented by a general formula (I) shown below have been substituted with at least one group selected from the group consisting of acid-dissociable, dissolution-inhibiting groups represented by a general formula (II) shown below and acid-dissociable, dissolution-inhibiting groups represented by a general formula (III) shown below.
摘要翻译：一种正性抗蚀剂组合物，其包含含有酸解离的溶解抑制基团并且在酸的作用下表现出增加的碱溶解性的基材成分（A）和暴露时产生酸的酸产生剂成分（B），其中基材成分（A）含有化合物（A1），其中分子量为300〜2,500的多元酚化合物中的酚羟基的氢原子的一部分或全部由通式下述的（I）所示的化合物被选自由下述通式（II）表示的酸解离性，溶解抑制基团和酸解离性，通式式（III）如下所示。

7. 发明申请

US20080020288A1 Resist Composition and Process for Formation of Resist Patterns 有权
标题翻译：抗蚀剂组合物和形成抗蚀剂图案的方法
公开(公告)号：US20080020288A1
公开(公告)日：2008-01-24
申请号：US11574805
申请日：2005-09-02
申请人： Taku Hirayama , Daiju Shiono , Hideo Hada
发明人： Taku Hirayama , Daiju Shiono , Hideo Hada
IPC分类号： G03C1/04 , G03C5/00
CPC分类号： G03F7/0392 , G03F7/0045 , G03F7/0048 , Y10S430/114
摘要： A resist composition that includes a base material component (A), which contains acid-dissociable, dissolution-inhibiting groups and exhibits increased alkali solubility under the action of acid, an acid generator component (B) that generates acid on exposure, and an organic solvent (C), in which the components (A) and (B) are dissolved in the organic solvent (C), wherein the base material component (A) contains a protected form (A1) of a polyhydric phenol compound (a) having two or more phenolic hydroxyl groups and a molecular weight within a range from 300 to 2,500, in which either a portion of, or all of, the phenolic hydroxyl groups are protected with acid-dissociable, dissolution-inhibiting groups, and the organic solvent (C) comprises an alcohol.
摘要翻译：一种抗蚀剂组合物，其包含基质成分（A），其含有酸解离的溶解抑制基团，并且在酸的作用下显示出增加的碱溶解性，在曝光时产生酸的酸产生剂组分（B）其中组分（A）和（B）溶解在有机溶剂（C）中的溶剂（C），其中基材组分（A）含有多元酚化合物（a）的保护形式（A1）两个或更多个酚羟基和分子量在300-2,500的范围内，其中酚羟基的一部分或全部被酸解离的溶解抑制基团保护，并且有机溶剂（ C）包含醇。

8. 发明授权

US08389197B2 Compound, positive resist composition and resist pattern forming method 失效
标题翻译：化合物，正光刻胶组合物和抗蚀剂图案形成方法
公开(公告)号：US08389197B2
公开(公告)日：2013-03-05
申请号：US11994602
申请日：2006-06-30
申请人： Takako Hirosaki , Daiju Shiono , Taku Hirayama , Hideo Hada
发明人： Takako Hirosaki , Daiju Shiono , Taku Hirayama , Hideo Hada
IPC分类号： G03F7/004 , G03F7/039 , G03F7/20 , G03F7/30
CPC分类号： G03F7/0397 , C07C67/343 , C07C69/712 , C07C2603/74 , G03F7/0045
摘要： The present invention provides a positive resist composition and a resist pattern forming method that are capable of forming a resist pattern with a reduced level of roughness. The positive resist composition includes the compound represented by the general formula (I) below. The present invention also provides the resist pattern forming method using the positive resist composition above. [wherein, in formula (I), R11 and R12 each represents, independently, an alkyl group of 1 to 10 carbon atoms or an aromatic hydrocarbon group, and may include a hetero atom in the structure thereof; R21 to R24 each represents, independently, a hydrogen atom or an acid dissociable, dissolution inhibiting group, and two of the R21 to R24 represents a hydrogen atom and the others represents an acid dissociable, dissolution inhibiting group; X is a group represented by general formulas (Ia) or (Ib) below].
摘要翻译：本发明提供能够形成具有降低的粗糙度的抗蚀剂图案的正型抗蚀剂组合物和抗蚀剂图案形成方法。正型抗蚀剂组合物包括由下述通式（I）表示的化合物。本发明还提供了使用上述正型抗蚀剂组合物的抗蚀剂图案形成方法。式（I）中，R 11和R 12分别独立地表示1〜10个碳原子的烷基或芳香族烃基，其结构中可以含有杂原子; R21〜R24各自独立地表示氢原子或酸解离的溶解抑制基团，R21〜R24中的两个表示氢原子，其余表示酸解离，溶解抑制基团。 X为下述通式（Ia）或（Ib）表示的基团。

9. 发明申请

US20070259273A1 Positive Resist Composition and Method of Forming Resist Pattern 有权
标题翻译：正电阻组合物和形成抗蚀剂图案的方法
公开(公告)号：US20070259273A1
公开(公告)日：2007-11-08
申请号：US11572630
申请日：2005-07-25
申请人： Daiju Shiono , Taku Hirayama , Hideo Hada
发明人： Daiju Shiono , Taku Hirayama , Hideo Hada
IPC分类号： G03F1/00
CPC分类号： G03F7/0045 , G03F7/0392
摘要： A positive resist composition including a base material for a pattern-forming material (A), which contains a protector (X1) of a polyhydric phenol compound (x) having two or more phenolic hydroxyl groups and a molecular weight of 300 to 2,500, in which a portion of the phenolic hydroxyl groups are protected with an acid-dissociable, dissolution-inhibiting group, and an acid generator component (B) that generates an acid upon exposure, wherein the component (B) contains an onium salt-based acid generator (B1) with an alkylsulfonate ion as an anion.
摘要翻译：含有图案形成材料（A）的基材的正型抗蚀剂组合物，其含有具有两个或多个酚羟基并且分子量为300〜2,500的多元酚化合物（x）的保护剂（X1）其中一部分酚羟基被酸解离的溶解抑制基团和在暴露时产生酸的酸产生剂组分（B）保护，其中组分（B）含有鎓盐酸产生剂（B1）与烷基磺酸根离子作为阴离子。

10. 发明授权

US08304163B2 Compound, dissolution inhibitor, positive type resist composition, and method of forming resist pattern 失效
标题翻译：化合物，溶解抑制剂，正型抗蚀剂组合物和形成抗蚀剂图案的方法
公开(公告)号：US08304163B2
公开(公告)日：2012-11-06
申请号：US12980914
申请日：2010-12-29
申请人： Daiju Shiono , Taku Hirayama , Toshiyuki Ogata , Shogo Matsumaru , Hideo Hada
发明人： Daiju Shiono , Taku Hirayama , Toshiyuki Ogata , Shogo Matsumaru , Hideo Hada
IPC分类号： G03F7/004
CPC分类号： G03F7/0392 , C07J9/00 , G03F7/0045 , Y10S430/106
摘要： A positive type resist composition for forming a high resolution resist pattern and a method of forming a resist pattern are provided which use a low-molecular-weight material as a base component, and a compound and a dissolution inhibitor that are each suitable for the positive type resist composition. Here, the compound is a non-polymer having a molecular weight of 500 to 3000, and is decomposed under the action of an acid to produce two or more molecules of a decomposition product having a molecular weight of 200 or more; the dissolution inhibitor comprises the compound; the positive type resist composition comprises the compound and the acid generator component; and the method of forming a resist pattern uses the positive type resist composition.
摘要翻译：提供了用于形成高分辨抗蚀剂图案的正型抗蚀剂组合物和形成抗蚀剂图案的方法，其使用低分子量材料作为基础组分，并且化合物和溶解抑制剂各自适用于阳性型抗蚀剂组合物。这里，该化合物是分子量为500〜3000的非聚合物，在酸的作用下分解，生成分子量为200以上的分解产物的2个以上分子; 该溶解抑制剂包含该化合物; 正型抗蚀剂组合物包含化合物和酸产生剂组分; 并且形成抗蚀剂图案的方法使用正型抗蚀剂组合物。

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