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    • 2. 发明申请
    • Plasma reactor and method of determining abnormality in plasma reactor
    • 等离子体反应器及等离子体反应器异常测定方法
    • US20060176045A1
    • 2006-08-10
    • US11377287
    • 2006-03-17
    • Kenji DosakaKazuo AndoHideyuki FujishiroMinoru ToriiKoji KotaniTakeshi Yanobe
    • Kenji DosakaKazuo AndoHideyuki FujishiroMinoru ToriiKoji KotaniTakeshi Yanobe
    • G01R23/16
    • H01J37/32009B01D53/32F01N3/0892H01J37/32348
    • A plasma reactor is provided which does not require a high power supply voltage and can form a plasma with a necessary and sufficient average current density over the whole region between a pair of electrodes to efficiently modify a gas flowing between the electrodes. The plasma reactor comprises first and second electrodes positioned to face each other, a dielectric material placed between the two electrodes and an electrical power supply for applying an alternating or pulsed current to the two electrodes and generating a plasma in the gas passing through the gap between the two electrodes to thereby modify the gas. By setting the average current density Ird of the plasma generated in the gap so that it satisfies the formula 10−4 A/cm2≦Ird≦10−1 A/cm2, a concentrated discharge and a barrier discharge are simultaneously generated, thus forming a plasma having a sufficient average current density Ird for the efficient modification of the gas over the whole region of the gap.
    • 提供一种等离子体反应器,其不需要高电源电压并且可以在一对电极之间的整个区域上形成具有必要且足够的平均电流密度的等离子体,以有效地改变在电极之间流动的气体。 等离子体反应器包括彼此面对的第一和第二电极,放置在两个电极之间的电介质材料和用于向两个电极施加交替或脉冲电流并在气体中产生等离子体的电源, 两个电极从而改变气体。 通过设定在间隙中产生的等离子体的平均电流密度Ird,使其满足公式10≤A/ cm 2 <= IRD <= 10 < -1A / cm 2,同时产生浓缩放电和阻挡放电,从而形成具有足够的平均电流密度Ird的等离子体,用于整体上有效地改性气体 区域的差距。