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1. 发明申请

US20120224051A1 MASK INSPECTION METHOD AND MASK INSPECTION APPARATUS 审中-公开
标题翻译：屏蔽检查方法和面罩检查装置
公开(公告)号：US20120224051A1
公开(公告)日：2012-09-06
申请号：US13409846
申请日：2012-03-01
申请人： Takeshi YAMANE , Tsuneo Terasawa
发明人： Takeshi YAMANE , Tsuneo Terasawa
IPC分类号： H04N7/18
CPC分类号： G03F1/84 , G03F1/22
摘要： According to one embodiment, a method of inspecting a defect of a semiconductor exposure mask by using an optical system, which is configured to acquire an image by an imaging module by making light of an arbitrary wavelength incident on the semiconductor exposure mask, includes acquiring a control condition for elongating a point image acquired by the optical system in a read-out direction of the imaging module, acquiring an image of a desired area of the mask under the control condition, and determining, when a peak signal with a signal intensity which is a first threshold or more.
摘要翻译：根据一个实施例，通过使用被配置为通过使入射在半导体曝光掩模上的任意波长的光获取成像模块的图像的光学系统来检查半导体曝光掩模的缺陷的方法包括：控制条件，用于在所述摄像模块的读出方向上延伸由所述光学系统获取的点图像，在所述控制条件下获取所述掩模的期望区域的图像，以及当将具有信号强度的峰值信号是第一个门槛以上。

2. 发明申请

US20120218543A1 MASK INSPECTION METHOD AND MASK INSPECTION APPARATUS 有权
标题翻译：屏蔽检查方法和面罩检查装置
公开(公告)号：US20120218543A1
公开(公告)日：2012-08-30
申请号：US13403105
申请日：2012-02-23
申请人： Takeshi YAMANE , Tsuneo Terasawa
发明人： Takeshi YAMANE , Tsuneo Terasawa
IPC分类号： G01J3/00 , G01N21/00
CPC分类号： G01N21/956 , G01N2021/8822 , G01N2021/95676
摘要： According to one embodiment, a method of detecting a defect of a semiconductor exposure mask includes acquiring a background intensity from a surface height distribution of the mask, acquiring a standard background intensity distribution from the background intensity, making light of an arbitrary wavelength incident on the mask, and acquiring an image at a position of interest of the mask, acquiring background intensity raw data, based on a signal intensity of the acquired image at the position of interest and a mean value of image intensity data in a peripheral area of the position of interest, finding a correction coefficient of the signal intensity, based on a ratio of the background intensity raw data to the standard background intensity distribution, correcting the signal intensity by multiplying the signal intensity.
摘要翻译：根据一个实施例，一种检测半导体曝光掩模的缺陷的方法包括从掩模的表面高度分布获取背景强度，从背景强度获取标准背景强度分布，使入射到掩模，并且获取所述掩模的感兴趣位置处的图像，基于感兴趣位置处获取的图像的信号强度和所述位置的周边区域中的图像强度数据的平均值来获取背景强度原始数据根据背景强度原始数据与标准背景强度分布的比率，求出信号强度的校正系数，通过乘以信号强度来校正信号强度。

3. 发明申请

US20120063667A1 MASK DEFECT INSPECTION METHOD AND DEFECT INSPECTION APPARATUS 有权
标题翻译：掩蔽缺陷检查方法和缺陷检查装置
公开(公告)号：US20120063667A1
公开(公告)日：2012-03-15
申请号：US13230030
申请日：2011-09-12
申请人： Takeshi YAMANE , Tsuneo Terasawa
发明人： Takeshi YAMANE , Tsuneo Terasawa
IPC分类号： G06K9/00
CPC分类号： G01N21/956 , G01N2021/95676
摘要： According to one embodiment, in a method for inspecting a defect of an exposure mask, using an optical system which acquires a dark-field image, an arbitrary partial region where a uniform dark-field image is obtained on the mask is allocated at a defocus position to acquire an image. A detection threshold is decided using signal intensities of the acquired image and an area ratio between a desired inspection region and the partial region, so that a signal count indicating signal intensities greater than the detection threshold in the inspection region is less than a target false detection count. The mask is allocated in a just-in-focus position to acquire an image of the inspection region. A signal having a signal intensity of the acquired image, which indicates an intensity greater than the detection threshold, is determined as a defect.
摘要翻译：根据一个实施例，在用于检查曝光掩模的缺陷的方法中，使用获取暗视场图像的光学系统，在掩模上获得均匀的暗场图像的任意部分区域被分配在散焦获取图像的位置。使用所获取的图像的信号强度和期望检查区域和部分区域之间的面积比来确定检测阈值，使得指示在检查区域中大于检测阈值的信号强度的信号计数小于目标错误检测计数。掩模被分配在刚刚聚焦位置以获取检查区域的图像。具有指示强度大于检测阈值的获取图像的信号强度的信号被确定为缺陷。

4. 发明申请

US20130244142A1 Method and Apparatus for Inspecting a Mask Substrate for Defects, Method of Manufacturing a Photomask, and Method of Manufacturing a Semiconductor Device 有权
标题翻译：用于检查缺陷的掩模基板的方法和装置，制造光掩模的方法以及制造半导体器件的方法
公开(公告)号：US20130244142A1
公开(公告)日：2013-09-19
申请号：US13840489
申请日：2013-03-15
申请人： KABUSHIKI KAISHA TOSHIBA , TSUNEO TERASAWA
发明人： Takeshi YAMANE , Tsuneo Terasawa
IPC分类号： G01N21/956 , G03F1/00
CPC分类号： G01N21/956 , G01N2021/95676 , G03F1/00 , G03F1/24
摘要： According to one embodiment, a method of inspecting a mask substrate for defects, includes acquiring a defocus image of a partial region of a mask substrate using a dark-field optical system, acquiring a just-focus image of the partial region using the dark-field optical system, generating a set composed of first signals obtained from the defocus image and having signal intensities equal to or higher than a first threshold value, excluding, from the set, the first signals pertaining to parts in which signal intensities of signals obtained from the just-focus image are equal to or higher than a second threshold value, determining an inspection threshold value for signal intensities, on the basis of the first signals not excluded from, and remaining in, the sea.
摘要翻译：根据一个实施例，一种用于检查掩模基板的缺陷的方法包括使用暗视场光学系统获取掩模基板的部分区域的散焦图像，使用暗视场光学系统获取部分区域的正焦点图像，产生由散焦图像获得的具有等于或高于第一阈值的信号强度的由第一信号组成的集合，从集合中除去与从第一阈值获得的信号的信号强度相关的部分的第一信号，正焦点图像等于或高于第二阈值，基于未从集合中排除和保留的第一信号确定信号强度的检查阈值。

5. 发明申请

US20130244143A1 Optimum Imaging Position Detecting Method, Optimum Imaging Position Detecting Device, Photomask Manufacturing Method, and Semiconductor Device Manufacturing Method 有权
标题翻译：最佳成像位置检测方法，最佳成像位置检测装置，光掩模制造方法和半导体装置制造方法
公开(公告)号：US20130244143A1
公开(公告)日：2013-09-19
申请号：US13841049
申请日：2013-03-15
申请人： Tsuneo Terasawa , KABUSHIKI KAISHA TOSHIBA
发明人： Takeshi YAMANE , Tsuneo Terasawa
IPC分类号： G03F1/22 , H04N7/18
CPC分类号： G03F1/22 , H04N7/18
摘要： According to one embodiment, an optimum imaging position detecting method includes acquiring an image of a predetermined area of a substrate surface, calculating, on the basis of the image of the predetermined area, peak intensity corresponding to a value obtained by subtracting average signal intensity of an area outside an intensity acquisition part from signal intensity of the intensity acquisition part, calculating variation of the peak intensity, executing acquiring the image of the predetermined area, calculating the peak intensity, and calculating the variation of the peak intensity at each of a plurality of imaging positions, and determining that a position of the maximum variation of the peak intensity is an optimum imaging position.
摘要翻译：根据一个实施例，最佳成像位置检测方法包括获取基板表面的预定区域的图像，基于预定区域的图像计算与通过减去平均信号强度减去获得的值相对应的峰值强度强度获取部分的强度获取部分之外的区域，计算峰值强度的变化，执行获取预定区域的图像，计算峰值强度，以及计算多个峰值强度的变化并且确定峰值强度的最大变化的位置是最佳成像位置。

6. 发明申请

US20090054041A1 Mobile Communication Terminal, Information Providing System, Program, and Computer Readable Recording Medium 有权
标题翻译：移动通信终端，信息提供系统，程序和计算机可读记录介质
公开(公告)号：US20090054041A1
公开(公告)日：2009-02-26
申请号：US12236390
申请日：2008-09-23
申请人： Masaomi SATAKE , Masaru FUKUSHIMA , Takashi ENDOH , Yasuhiko NUMAGAMI , Fumihiro NOZAKI , Takeshi YAMANE , Hiroshi TSUKIJI
发明人： Masaomi SATAKE , Masaru FUKUSHIMA , Takashi ENDOH , Yasuhiko NUMAGAMI , Fumihiro NOZAKI , Takeshi YAMANE , Hiroshi TSUKIJI
IPC分类号： H04W4/12
CPC分类号： H04L12/1859 , G06F19/00 , H04L51/18 , H04L51/24 , H04L51/38 , H04L67/04 , H04L67/26 , H04L67/2819 , H04L67/2847 , H04L67/289 , H04M1/72552 , H04M15/00 , H04M15/28 , H04M15/62 , H04M15/88 , H04M2215/0116 , H04W4/12 , H04W4/14 , H04W4/20 , H04W4/24
摘要： Information that is no longer valid due to the passage of time is not provided to a user. When a stock price information server acquires updated stock price information from a securities market network, a message that instructs that a predetermined application be started up and to which a term of validity has been attached is sent to a user terminal over a paging channel via an SMS server. When the user terminal receives the message, it determines whether or not the message is within the term of validity, and if it determines that the message is within the term of validity, starts up the instructed application from among a plurality of applications that are stored. The stock price information server then sends to the user terminal the stock price information that is requested by the started up application.
摘要翻译：由于时间的推移不再有效的信息不提供给用户。当股票价格信息服务器从证券市场网络获取更新的股票价格信息时，经由寻呼信道经由寻呼信道向用户终端发送指示预定应用启动并已经附加有效期的消息短信服务器。当用户终端接收到消息时，确定该消息是否在有效期内，并且如果确定该消息在有效期限内，则从存储的多个应用程序中启动指示的应用程序。然后，股价信息服务器向用户终端发送由启动应用请求的股票价格信息。

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