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    • 2. 发明授权
    • Laser machining method and chip
    • 激光加工方法和芯片
    • US08790997B2
    • 2014-07-29
    • US13387261
    • 2010-08-17
    • Aiko NakagawaTakeshi Sakamoto
    • Aiko NakagawaTakeshi Sakamoto
    • H01L21/268B23K26/00
    • H01L23/562B23K26/046B23K26/38B23K26/40B23K26/53B23K2101/40B23K2103/50H01L21/67092H01L2924/0002H01L2924/00
    • While reliably cutting an object to be processed, the strength of the resulting chips is improved. An object to be processed 1 is irradiated with laser light L, so as to form modified regions 17, 27, 37, 47 extending along lines to cut 5 and aligning in the thickness direction in the object 1. Here, modified regions 17 are formed such that modified region formed parts 17a and modified region unformed parts 17b alternate along the lines, and modified regions 47 are formed such that modified region formed parts 47a and modified region unformed parts 47b alternate along the lines. This can inhibit formed modified regions 7 from lowering the strengths on the rear face 21 side and front face 3 side of chips obtained by cutting. On the other hand, modified regions 27, 37 located between the modified regions 17, 47 are formed continuously from one end side of the lines 5 to the other end side thereof, whereby the cuttability of the object 1 can be secured reliably.
    • 在可靠地切割待处理物体的同时,提高了所得到的芯片的强度。 用激光L照射待处理物体1,以形成沿着切割线5延伸并沿物体1的厚度方向对准的改质区域17,27,37,47。这里,形成改质区域17 使得改性区域形成部分17a和改质区域未成形部分17b沿着直线交替,并且改性区域47形成为使得改性区域形成部分47a和改质区域未成形部分47b沿着线交替。 这可以抑制形成的改质区域7降低通过切割获得的切屑的背面21侧和前面3侧的强度。 另一方面,位于改质区域17,47之间的改质区域27,37从管线5的一端侧到另一端侧连续地形成,能够可靠地确保物体1的切断性。
    • 3. 发明申请
    • LASER MACHINING METHOD AND CHIP
    • 激光加工方法和芯片
    • US20120119334A1
    • 2012-05-17
    • US13387261
    • 2010-08-17
    • Aiko NakagawaTakeshi Sakamoto
    • Aiko NakagawaTakeshi Sakamoto
    • H01L23/544H01L21/78
    • H01L23/562B23K26/046B23K26/38B23K26/40B23K26/53B23K2101/40B23K2103/50H01L21/67092H01L2924/0002H01L2924/00
    • While reliably cutting an object to be processed, the strength of the resulting chips is improved. An object to be processed 1 is irradiated with laser light L, so as to form modified regions 17, 27, 37, 47 extending along lines to cut 5 and aligning in the thickness direction in the object 1. Here, modified regions 17 are formed such that modified region formed parts 17a and modified region unformed parts 17b alternate along the lines, and modified regions 47 are formed such that modified region formed parts 47a and modified region unformed parts 47b alternate along the lines. This can inhibit formed modified regions 7 from lowering the strengths on the rear face 21 side and front face 3 side of chips obtained by cutting. On the other hand, modified regions 27, 37 located between the modified regions 17, 47 are formed continuously from one end side of the lines 5 to the other end side thereof, whereby the cuttability of the object 1 can be secured reliably.
    • 在可靠地切割待处理物体的同时,提高了所得到的芯片的强度。 用激光L照射待处理物体1,以形成沿着切割线5延伸并沿物体1的厚度方向对准的改质区域17,27,37,47。这里,形成改质区域17 使得改性区域形成部分17a和改质区域未成形部分17b沿着直线交替,并且改性区域47形成为使得改性区域形成部分47a和改质区域未成形部分47b沿着线交替。 这可以抑制形成的改质区域7降低通过切割获得的切屑的背面21侧和前面3侧的强度。 另一方面,位于改质区域17,47之间的改质区域27,37从管线5的一端侧到另一端侧连续地形成,能够可靠地确保物体1的切断性。