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1. 发明授权

US06524429B1 Method of forming buried wiring, and apparatus for processing substratum 失效
标题翻译：掩埋布线的形成方法，底层处理装置
公开(公告)号：US06524429B1
公开(公告)日：2003-02-25
申请号：US09652262
申请日：2000-08-30
申请人： Takeshi Nogami , Naoki Komai , Koichi Ikeda , Takashi Kinoshita , Kohei Suzuki , Nobuyuki Kawakami , Yoshito Fukumoto
发明人： Takeshi Nogami , Naoki Komai , Koichi Ikeda , Takashi Kinoshita , Kohei Suzuki , Nobuyuki Kawakami , Yoshito Fukumoto
IPC分类号： H01L2100
CPC分类号： H01L21/02126 , H01L21/02203 , H01L21/02216 , H01L21/02282 , H01L21/02304 , H01L21/02343 , H01L21/31695 , H01L21/76801 , H01L21/7682 , H01L21/76826 , H01L21/76885 , H01L2221/1047
摘要： A method of forming a buried wiring comprising the steps of: (A) forming a wiring and a first insulating layer filled between the wirings on a substratum, (B) immersing the first insulating layer in a fluid which can dissolve the first insulating layer, to dissolve the first insulating layer into the fluid, (C) substituting, for the fluid, a raw material solution containing a raw material for forming a second insulating layer, without bringing the wiring into contact with a gas, and (D) filling a second insulating layer formed by gelation in the raw material solution at least between the wirings, and then, drying off the raw material solution, thereby to form the second insulating layer at least between the wirings.
摘要翻译：一种形成掩埋布线的方法，包括以下步骤：（A）形成布线和填充在基底上的布线之间的第一绝缘层，（B）将第一绝缘层浸入可溶解第一绝缘层的流体中，将第一绝缘层溶解到流体中，（C）将流体包含含有用于形成第二绝缘层的原料的原料溶液，而不使布线与气体接触，（D）填充至少在布线之间在原料溶液中凝胶形成的第二绝缘层，然后干燥原料溶液，从而至少在布线之间形成第二绝缘层。

2. 发明授权

US06777321B2 Method of forming buried wiring 失效
标题翻译：埋地线形成方法
公开(公告)号：US06777321B2
公开(公告)日：2004-08-17
申请号：US10298665
申请日：2002-11-19
申请人： Takeshi Nogami , Naoki Komai , Koichi Ikeda , Takashi Kinoshita , Kohei Suzuki , Nobuyuki Kawakami , Yoshito Fukumoto
发明人： Takeshi Nogami , Naoki Komai , Koichi Ikeda , Takashi Kinoshita , Kohei Suzuki , Nobuyuki Kawakami , Yoshito Fukumoto
IPC分类号： H01L2144
CPC分类号： H01L21/02126 , H01L21/02203 , H01L21/02216 , H01L21/02282 , H01L21/02304 , H01L21/02343 , H01L21/31695 , H01L21/76801 , H01L21/7682 , H01L21/76826 , H01L21/76885 , H01L2221/1047
摘要： A method of forming a buried wiring comprising the steps of: (A) forming a wiring and a first insulating layer filled between the wirings on a substratum, (B) immersing the first insulating layer in a fluid which can dissolve the first insulating layer, to dissolve the first insulating layer into the fluid, (C) substituting, for the fluid, a raw material solution containing a raw material for forming a second insulating layer, without bringing the wiring into contact with a gas, and (D) filling a second insulating layer formed by gelation in the raw material solution at least between the wirings, and then, drying off the raw material solution, thereby to form the second insulating layer at least between the wirings.
摘要翻译：一种形成掩埋布线的方法，包括以下步骤：（A）形成布线和填充在基底上的布线之间的第一绝缘层，（B）将第一绝缘层浸入可溶解第一绝缘层的流体中，将第一绝缘层溶解到流体中，（C）将流体包含含有用于形成第二绝缘层的原料的原料溶液，而不使布线与气体接触，（D）填充至少在布线之间在原料溶液中凝胶形成的第二绝缘层，然后干燥原料溶液，从而至少在布线之间形成第二绝缘层。

3. 发明授权

US06364953B1 Method and apparatus for making aerogel film 失效
标题翻译：制造气凝胶膜的方法和装置
公开(公告)号：US06364953B1
公开(公告)日：2002-04-02
申请号：US09577028
申请日：2000-05-23
申请人： Nobuyuki Kawakami , Yoshito Fukumoto , Kenichi Inoue , Kohei Suzuki , Takashi Kinoshita , Katsuhiro Uehara
发明人： Nobuyuki Kawakami , Yoshito Fukumoto , Kenichi Inoue , Kohei Suzuki , Takashi Kinoshita , Katsuhiro Uehara
IPC分类号： B05C1100
CPC分类号： H01L21/6715 , C01B33/1585 , H01L21/02126 , H01L21/02203 , H01L21/02216 , H01L21/02282 , H01L21/02337 , H01L21/02343 , H01L21/31058 , H01L21/3121 , H01L21/31695 , Y02P20/544
摘要： A method for making an aerogel film includes the steps of performing a gelation reaction of a metal alkoxide on a substrate to prepare a substrate with a wet-gel film, and converting the wet-gel film into an aerogel film by a supercritical or sub-critical drying process of the substrate with the wet-gel film, wherein the degree of gelation of the wet-gel film is controlled to be a predetermined value at the start of the supercritical or sub-critical drying process. Aerogel films having uniform qualities are produced by the supercritical or sub-critical drying process in one lot.
摘要翻译：制备气凝胶膜的方法包括以下步骤：在基材上进行金属醇盐的凝胶化反应，以制备具有湿凝胶膜的基材，并且通过超临界或亚临界转移将湿凝胶膜转化成气凝胶膜，使用湿凝胶膜对基材进行临界干燥处理，其中在超临界或亚临界干燥过程开始时将湿凝胶膜的凝胶化程度控制在预定值。具有均匀性质的气凝胶膜通过超临界或亚临界干燥工艺生产。

4. 发明申请

US20090017255A1 Dielectric line and production method therefor 审中-公开
标题翻译：介电线及其制造方法
公开(公告)号：US20090017255A1
公开(公告)日：2009-01-15
申请号：US12230689
申请日：2008-09-03
申请人： Masakatsu Maruyama , Nobuyuki Kawakami , Yoshito Fukumoto , Takayuki Hirano
发明人： Masakatsu Maruyama , Nobuyuki Kawakami , Yoshito Fukumoto , Takayuki Hirano
IPC分类号： B32B7/00
CPC分类号： H01P3/165 , H01P11/006 , Y10T428/24182
摘要： A dielectric line having a sufficient ensured strength and being suitable for mass production and a production method therefor are provided. The production method is a method for manufacturing a dielectric line having a dielectric strip which is provided between two conductive plates approximately parallel to each other and which has a width smaller than that of the conductive plates, and dielectric medium layers which are filled between the conductive plates other than the dielectric strip and which is composed of a porous material having a dielectric constant smaller than that of the dielectric strip. The dielectric line (NRD guide) is produced by film forming steps S11 and S12 in which a film of a dielectric raw material is formed on one of the conductive plates, a strip exposure step S13 in which a part of the above film having a shape corresponding to the dielectric strip is exposed to predetermined light, beams, or vapor, and pore forming steps S15 and S16 in which the entire film of the dielectric raw material is made porous.
摘要翻译：提供具有足够的确保强度并适合于批量生产的介质线及其制造方法。该制造方法是制造具有介电条的介质线的方法，该介质条设置在彼此大致平行的两个导电板之间，其宽度小于导电板的宽度，以及填充在导电性除了介质条之外的板，其由介电常数小于介质条的介电常数的多孔材料构成。介质线（NRD导向件）是通过在其中一个导电板上形成电介质原料的薄膜形成步骤S11和S12来制造的，条带曝光步骤S13，其中上述薄膜的一部分具有形状相当于电介质条被暴露于预定的光，光束或蒸汽，以及孔形成步骤S15和S16，其中电介质原料的整个膜被制成多孔的。

5. 发明授权

US07432038B2 Dielectric line and production method therefor 失效
标题翻译：介电线及其制造方法
公开(公告)号：US07432038B2
公开(公告)日：2008-10-07
申请号：US10543135
申请日：2004-01-05
申请人： Masakatsu Maruyama , Nobuyuki Kawakami , Yoshito Fukumoto , Takayuki Hirano
发明人： Masakatsu Maruyama , Nobuyuki Kawakami , Yoshito Fukumoto , Takayuki Hirano
IPC分类号： G03F7/20 , G03F7/26
CPC分类号： H01P3/165 , H01P11/006 , Y10T428/24182
摘要： A dielectric line having a sufficient ensured strength and being suitable for mass production and a production method therefor are provided. The production method is a method for manufacturing a dielectric line having a dielectric strip which is provided between two conductive plates approximately parallel to each other and which has a width smaller than that of the conductive plates, and dielectric medium layers which are filled between the conductive plates other than the dielectric strip and which is composed of a porous material having a dielectric constant smaller than that of the dielectric strip. The dielectric line (NRD guide) is produced by film forming steps S11 and S12 in which a film of a dielectric raw material is formed on one of the conductive plates, a strip exposure step S13 in which a part of the above film having a shape corresponding to the dielectric strip is exposed to predetermined light, beams, or vapor, and pore forming steps S15 and S16 in which the entire film of the dielectric raw material is made porous.
摘要翻译：提供具有足够的确保强度并适合于批量生产的介质线及其制造方法。该制造方法是制造具有介电条的介质线的方法，该介质条设置在彼此大致平行的两个导电板之间，其宽度小于导电板的宽度，以及填充在导电性除了介质条之外的板，其由介电常数小于介质条的介电常数的多孔材料构成。电介质线（NRD导向件）通过其中在一个导电板上形成电介质原料的薄膜形成步骤S11和S12来制造，条带曝光步骤S13，其中部分上述膜具有与介质条相对应的形状暴露于预定的光，光束或蒸汽，以及孔形成步骤S 15和S 16，其中电介质原料的整个膜是多孔的。

6. 发明申请

US20060102937A1 Dielectric line and production method therefor 失效
标题翻译：介电线及其制造方法
公开(公告)号：US20060102937A1
公开(公告)日：2006-05-18
申请号：US10543135
申请日：2004-01-05
申请人： Masakatsu Maruyama , Nobuyuki Kawakami , Yoshito Fukumoto , Takayuki Hirano
发明人： Masakatsu Maruyama , Nobuyuki Kawakami , Yoshito Fukumoto , Takayuki Hirano
IPC分类号： H01L29/80
CPC分类号： H01P3/165 , H01P11/006 , Y10T428/24182
摘要： A dielectric line having a sufficient ensured strength and being suitable for mass production and a production method therefor are provided. The production method is a method for manufacturing a dielectric line having a dielectric strip which is provided between two conductive plates approximately parallel to each other and which has a width smaller than that of the conductive plates, and dielectric medium layers which are filled between the conductive plates other than the dielectric strip and which is composed of a porous material having a dielectric constant smaller than that of the dielectric strip. The dielectric line (NRD guide) is produced by film forming steps S11 and S12 in which a film of a dielectric raw material is formed on one of the conductive plates, a strip exposure step S13 in which a part of the above film having a shape corresponding to the dielectric strip is exposed to predetermined light, beams, or vapor, and pore forming steps S15 and S16 in which the entire film of the dielectric raw material is made porous.
摘要翻译：提供具有足够的确保强度并适合于批量生产的介质线及其制造方法。该制造方法是制造具有介电条的介质线的方法，该介质条设置在彼此大致平行的两个导电板之间，其宽度小于导电板的宽度，以及填充在导电性除了介质条之外的板，其由介电常数小于介质条的介电常数的多孔材料构成。电介质线（NRD导向件）通过其中在一个导电板上形成电介质原料的薄膜形成步骤S11和S12来制造，条带曝光步骤S13，其中部分上述膜具有与介质条相对应的形状暴露于预定的光，光束或蒸汽，以及孔形成步骤S 15和S 16，其中电介质原料的整个膜是多孔的。

7. 发明申请

US20060050003A1 Feed antenna including dielectric waveguide 有权
标题翻译：馈电天线包括介质波导
公开(公告)号：US20060050003A1
公开(公告)日：2006-03-09
申请号：US11000975
申请日：2004-12-02
申请人： Masakatsu Maruyama , Chitaka Manabe , Yoshito Fukumoto , Nobuyuki Kawakami , Takayuki Hirano
发明人： Masakatsu Maruyama , Chitaka Manabe , Yoshito Fukumoto , Nobuyuki Kawakami , Takayuki Hirano
IPC分类号： H01Q13/00
CPC分类号： H01Q9/045 , H01Q9/0407
摘要： A feed antenna includes a pair of conductive members, a dielectric waveguide placed therebetween, a dielectric member that is placed between the conductive members and located close to the dielectric waveguide, and a plurality of dielectric binding sections for binding the dielectric waveguide to the dielectric member. One of the conductive members has a plurality of openings.
摘要翻译：馈电天线包括一对导电构件，介于其间的电介质波导，介于导电构件之间并位于电介质波导附近的电介质构件，以及用于将电介质波导结合到电介质构件。导电构件中的一个具有多个开口。

8. 发明申请

US20050119360A1 Method for producing porous material 审中-公开
标题翻译：多孔材料的制造方法
公开(公告)号：US20050119360A1
公开(公告)日：2005-06-02
申请号：US10995234
申请日：2004-11-24
申请人： Nobuyuki Kawakami , Takayuki Hirano , Yoshito Fukumoto
发明人： Nobuyuki Kawakami , Takayuki Hirano , Yoshito Fukumoto
IPC分类号： H01B3/08 , C01B33/113 , C08J9/00 , H01L21/316
CPC分类号： H01L21/31695 , H01L21/02126 , H01L21/02203 , H01L21/02216 , H01L21/02282 , H01L21/02343
摘要： A method for producing a porous material exhibiting temporal stability includes the step of forming a primary material containing a matrix precursor for forming the matrix of the porous material and a porogen for forming pores; the step of removing the porogen from the primary material to form reactive sites exposed at the surface of the matrix; and the step of reacting the reactive sites with an inactivation promoter to inactivate the reactive sites. For a porous material hard to shrink even after heat treatment, the method includes the step of forming a primary material including a matrix formed of a matrix precursor and a pore-forming portions formed of a porogen; the step of supplying an additional matrix precursor for growing the matrix, dissolved in a supercritical or subcritical fluid; and the step of removing the porogen from the pore-forming portions.
摘要翻译：具有时间稳定性的多孔材料的制造方法包括形成含有形成多孔质体的基质的基体前体的主材料和形成孔的致孔剂的工序; 从原料除去致孔剂以形成暴露在基体表面的反应性位点的步骤; 以及使反应性位点与失活启动子反应以使反应性位点失活的步骤。对于即使在热处理后难以收缩的多孔材料，该方法包括形成包括由基质前体形成的基体和由致孔剂形成的成孔部分的基材的步骤; 提供用于生长基质的另外的基质前体溶解在超临界或亚临界流体中的步骤; 以及从孔隙形成部分除去致孔剂的步骤。

9. 发明授权

US07209088B2 Feed antenna including dielectric waveguide 有权
标题翻译：馈电天线包括介质波导
公开(公告)号：US07209088B2
公开(公告)日：2007-04-24
申请号：US11000975
申请日：2004-12-02
申请人： Masakatsu Maruyama , Chitaka Manabe , Yoshito Fukumoto , Nobuyuki Kawakami , Takayuki Hirano
发明人： Masakatsu Maruyama , Chitaka Manabe , Yoshito Fukumoto , Nobuyuki Kawakami , Takayuki Hirano
IPC分类号： H01Q13/00
CPC分类号： H01Q9/045 , H01Q9/0407
摘要： A feed antenna includes a pair of conductive members, a dielectric waveguide placed therebetween, a dielectric member that is placed between the conductive members and located close to the dielectric waveguide, and a plurality of dielectric binding sections for binding the dielectric waveguide to the dielectric member. One of the conductive members has a plurality of openings.
摘要翻译：馈电天线包括一对导电构件，介于其间的电介质波导，介于导电构件之间并位于电介质波导附近的电介质构件，以及用于将电介质波导结合到电介质构件。导电构件中的一个具有多个开口。

10. 发明申请

US20070077409A1 Porous substrate with smooth surface and production method thereof 审中-公开
标题翻译：表面光滑的多孔基材及其制备方法
公开(公告)号：US20070077409A1
公开(公告)日：2007-04-05
申请号：US11520738
申请日：2006-09-14
申请人： Takayuki Hirano , Nobuyuki Kawakami , Takeharu Tanaka , Tetsuo Suzuki , Yoshito Fukumoto , Kazuki Nakanishi , Kazuyoshi Kanamori
发明人： Takayuki Hirano , Nobuyuki Kawakami , Takeharu Tanaka , Tetsuo Suzuki , Yoshito Fukumoto , Kazuki Nakanishi , Kazuyoshi Kanamori
IPC分类号： B01J13/00 , B32B3/26 , B01D21/01 , C08J3/02 , C09K3/00
CPC分类号： H05K3/0011 , B32B21/04 , H05K1/024 , H05K1/0306 , H05K2201/0116 , Y10T428/249953 , Y10T428/249969
摘要： The porous substrate, comprises: three-dimensional-network skeletal solid phase inside the substrate, and a skin layer same in quality as the skeletal solid phase formed on at least one surface of the substrate, and a production method thereof, comprising: forming a wet gel having a three-dimensional-network skeletal solid phase and a fluid phase rich in solvent that are separated from each other in a space between a pair of flat plates by sol-gel reaction, removing the solvent in the wet gel by drying, and removing at least one flat plate of the pair of flat plates.
摘要翻译：多孔基材包括：基材内部的三维网状骨架固相，和在基材的至少一个表面上形成的骨架固相质量相同的皮肤层及其制造方法，其特征在于，湿凝胶，其具有通过溶胶 - 凝胶反应在一对平板之间的空间中彼此分离的富含溶剂的三维网络骨架固相和流体相，通过干燥除去湿凝胶中的溶剂，以及去除所述一对平板中的至少一个平板。

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