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    • 2. 发明申请
    • Signal processing device for computing phase difference between alternating current signals
    • 信号处理装置,用于计算交流信号之间的相位差
    • US20060248138A1
    • 2006-11-02
    • US11406885
    • 2006-04-19
    • Ryohei TanakaToyokazu Kitano
    • Ryohei TanakaToyokazu Kitano
    • G06G7/00
    • G01R19/2506G01R25/00H03H21/0012
    • A signal processing device includes a converting unit, a filtering unit, a differential computing unit, and a phase difference computing unit. The converting unit samples two alternating signals with a predetermined period and converts the sampled level values into digital alternating signal data. The filtering unit filters the two digital alternating signal data generated by the converting unit so as to abstract digital alternating signal data having a predetermined frequency, and the filtering unit comprises an adaptive digital filter. The differential computing unit computes differentials of the digital alternating signal data generated by the filtering unit. The phase difference computing unit computes phase difference using the two digital alternating signal data generated by the filtering unit, and the two digital alternating signal data generated by the differential computing unit.
    • 信号处理装置包括转换单元,滤波单元,差分计算单元和相位差计算单元。 转换单元以预定周期对两个交替信号进行采样,并将采样的电平值转换为数字交替信号数据。 滤波单元对由转换单元产生的两个数字交替信号数据进行滤波,以抽出具有预定频率的数字交替信号数据,并且滤波单元包括自适应数字滤波器。 差分计算单元计算由滤波单元产生的数字交流信号数据的差分。 相位差计算单元使用由滤波单元生成的两个数字交替信号数据和由差分计算单元生成的两个数字交替信号数据来计算相位差。
    • 3. 发明授权
    • Adaptive digital filter
    • 自适应数字滤波器
    • US07492817B2
    • 2009-02-17
    • US11056449
    • 2005-02-11
    • Ryohei TanakaToyokazu Kitano
    • Ryohei TanakaToyokazu Kitano
    • H03H7/30
    • H03H21/0012
    • An adaptive digital filter includes a filtering circuit and a coefficient renewal circuit. The filtering circuit has a coefficient a defined by a fundamental formula: a[n+1]=a[n]+β·e[n]·q[n]/p[n]. β is a number greater than 0 and smaller than 2, e[n] is a difference between the input and the output of the filter, and q[n] and p[n] are formulas. The renewal circuit calculates a renewal value of the coefficient a. The coefficient renewal circuit calculates 2m (m is an integer) greater than p[n] in the fundamental formula, and also calculates the renewal value of the coefficient a in accordance with an execution formula: a[n+1]=a[n]+β·e[n]·q[n]/2m in place of the fundamental formula.
    • 自适应数字滤波器包括滤波电路和系数更新电路。 滤波电路具有由基本公式a [n + 1] = a [n] + beta.e [n] .q [n] / p [n]定义的系数α。 β是大于0且小于2的数,e [n]是滤波器的输入和输出之间的差,q [n]和p [n]是公式。 更新电路计算系数a的更新值。 系数更新电路在基本公式中计算大于p [n]的2m(m是整数),并且还根据执行公式计算系数a的更新值:a [n + 1] = a [n ] + beta.e [n] .q [n] / 2m代替基本公式。
    • 4. 发明授权
    • Signal processing device for computing phase difference between alternating current signals
    • 信号处理装置,用于计算交流信号之间的相位差
    • US07702702B2
    • 2010-04-20
    • US11406885
    • 2006-04-19
    • Ryohei TanakaToyokazu Kitano
    • Ryohei TanakaToyokazu Kitano
    • H03M1/00G06F1/02G06F17/10G01R25/00H03D13/00
    • G01R19/2506G01R25/00H03H21/0012
    • A signal processing device includes a converting unit, a filtering unit, a differential computing unit, and a phase difference computing unit. The converting unit samples two alternating signals with a predetermined period and converts the sampled level values into digital alternating signal data. The filtering unit filters the two digital alternating signal data generated by the converting unit so as to abstract digital alternating signal data having a predetermined frequency, and the filtering unit comprises an adaptive digital filter. The differential computing unit computes differentials of the digital alternating signal data generated by the filtering unit. The phase difference computing unit computes phase difference using the two digital alternating signal data generated by the filtering unit, and the two digital alternating signal data generated by the differential computing unit.
    • 信号处理装置包括转换单元,滤波单元,差分计算单元和相位差计算单元。 转换单元以预定周期对两个交替信号进行采样,并将采样的电平值转换为数字交替信号数据。 滤波单元对由转换单元产生的两个数字交替信号数据进行滤波,以抽出具有预定频率的数字交替信号数据,并且滤波单元包括自适应数字滤波器。 差分计算单元计算由滤波单元产生的数字交流信号数据的差分。 相位差计算单元使用由滤波单元生成的两个数字交替信号数据和由差分计算单元生成的两个数字交替信号数据来计算相位差。
    • 5. 发明申请
    • Adaptive digital filter
    • 自适应数字滤波器
    • US20050180497A1
    • 2005-08-18
    • US11056449
    • 2005-02-11
    • Ryohei TanakaToyokazu Kitano
    • Ryohei TanakaToyokazu Kitano
    • H03H17/04H03H21/00H03K5/159
    • H03H21/0012
    • An adaptive digital filter includes a filtering circuit and a coefficient renewal circuit. The filtering circuit has a coefficient a defined by a fundamental formula: a[n+1]=a[n]+β·e[n]·q[n]/p[n]. β is a number greater than 0 and smaller than 2, e[n] is a difference between the input and the output of the filter, and q[n] and p[n] are formulas. The renewal circuit calculates a renewal value of the coefficient a. The coefficient renewal circuit calculates 2m (m is an integer) greater than p[n] in the fundamental formula, and also calculates the renewal value of the coefficient a in accordance with an execution formula: a[n+1]=a[n]+β·e[n]·q[n]/2m in place of the fundamental formula.
    • 自适应数字滤波器包括滤波电路和系数更新电路。 滤波电路具有由基本公式a [n + 1] = a [n] + beta.e [n] .q [n] / p [n]定义的系数α。 β是大于0且小于2的数,e [n]是滤波器的输入和输出之间的差,q [n]和p [n]是公式。 更新电路计算系数a的更新值。 系数更新电路计算基本公式中大于p [n]的2(m是整数),并且还根据执行公式计算系数a的更新值:a [ n + 1] = a [n] + beta.e [n] .q [n] / 2 代替基本公式。
    • 7. 发明申请
    • High-frequency power source
    • 高频电源
    • US20060220656A1
    • 2006-10-05
    • US11391115
    • 2006-03-28
    • Ryohei TanakaHiroshi Matoba
    • Ryohei TanakaHiroshi Matoba
    • G01R27/00
    • H05H1/46H01J37/32082H01J37/32174H01J37/32935H03H7/40
    • A high-frequency power source supplies high-frequency power to a load whose reflection characteristic for the power varies with time. The power source includes a frequency-variable power generator, a power detector for detecting the power into the load and the power from the load, a reflection coefficient calculator for calculating a reflection coefficient based on the detection of the power into and from the load, a frequency detector causing the power generator to generate high-frequency powers at various frequencies within a predetermined frequency range for obtaining the frequency that gives a minimum value to the calculated reflection coefficient, and a power supply controller for causing the power generator to generate a high-frequency power of the frequency obtained by the frequency detector and for supplying the high-frequency power to the load.
    • 高频电源向负载的反射特性随时间变化的负载提供高频电力。 电源包括可变功率发生器,用于检测负载的功率和来自负载的功率的功率检测器,反射系数计算器,用于基于对负载的功率的检测来计算反射系数, 频率检测器,其使所述发电机在预定频率范围内以各种频率产生高频功率,以获得给出所计算的反射系数的最小值的频率;以及电源控制器,用于使所述发电机产生高电平 由频率检测器获得的频率的频率功率和用于向负载提供高频功率。
    • 8. 发明授权
    • High-frequency power source
    • 高频电源
    • US07292047B2
    • 2007-11-06
    • US11391115
    • 2006-03-28
    • Ryohei TanakaHiroshi Matoba
    • Ryohei TanakaHiroshi Matoba
    • G01R27/00
    • H05H1/46H01J37/32082H01J37/32174H01J37/32935H03H7/40
    • A high-frequency power source supplies high-frequency power to a load whose reflection characteristic for the power varies with time. The power source includes a frequency-variable power generator, a power detector for detecting the power into the load and the power from the load, a reflection coefficient calculator for calculating a reflection coefficient based on the detection of the power into and from the load, a frequency detector causing the power generator to generate high-frequency powers at various frequencies within a predetermined frequency range for obtaining the frequency that gives a minimum value to the calculated reflection coefficient, and a power supply controller for causing the power generator to generate a high-frequency power of the frequency obtained by the frequency detector and for supplying the high-frequency power to the load.
    • 高频电源向负载的反射特性随时间变化的负载提供高频电力。 电源包括可变功率发生器,用于检测负载的功率和来自负载的功率的功率检测器,反射系数计算器,用于基于对负载的功率的检测来计算反射系数, 频率检测器,其使所述发电机在预定频率范围内以各种频率产生高频功率,以获得给出所计算的反射系数的最小值的频率;以及电源控制器,用于使所述发电机产生高电平 由频率检测器获得的频率的频率功率和用于向负载提供高频功率。
    • 9. 发明授权
    • Plasma processing system
    • 等离子体处理系统
    • US07489145B2
    • 2009-02-10
    • US11636389
    • 2006-12-08
    • Hiroshi MatobaRyohei TanakaShuji OmaeShigeki Amadatsu
    • Hiroshi MatobaRyohei TanakaShuji OmaeShigeki Amadatsu
    • G01R27/08
    • H05H1/46H01J37/321H01J37/32174H01J37/32935
    • A high-frequency measurement unit includes a signal detector for detecting a high-frequency signal, and a calibration coefficient storage for storing calibration coefficients Cmin and Cmax used to calibrate a value Amin detected at the lowest limit frequency fmin and a value Amax detected at the uppermost limit frequency fmax to a proper measurement value Asmin and to a proper measurement value Asmax, respectively. The high-frequency measurement unit further includes a frequency detection unit for detecting a frequency fm of the high-frequency signal, a calibration coefficient calculation unit for calculating a calibration coefficient Cm for the frequency fm, and a calibration unit for calibrating the value Am detected by the signal detector to a proper measurement value Asm by using the calibration coefficient Cm calculated by the calibration coefficient calculation unit.
    • 高频测量单元包括用于检测高频信号的信号检测器和用于存储校准系数Cmin和Cmax的校准系数存储器,用于校准在最低限频率fmin处检测到的值A a和 分别为适当的测量值Asmin和适当的测量值Asmax的最上限频率fmax。 高频测量单元还包括用于检测高频信号的频率fm的频率检测单元,用于计算频率fm的校准系数Cm的校准系数计算单元和用于校准检测到的值Am的校准单元 通过使用由校准系数计算单元计算出的校准系数Cm,通过信号检测器到适当的测量值Asm。