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    • 1. 发明授权
    • Display device and a method for manufacturing the same
    • 显示装置及其制造方法
    • US07193238B2
    • 2007-03-20
    • US10983683
    • 2004-11-09
    • Takeo ShibaMutsuko HatanoShinya YamaguchiSeong-kee Park
    • Takeo ShibaMutsuko HatanoShinya YamaguchiSeong-kee Park
    • H01L29/04
    • G02F1/13454G02F2202/104H01L27/12H01L27/1285H01L29/04H01L29/78621H01L29/78675
    • An image display device which includes a display pixel block and circuit blocks peripheral thereto. Each block has a circuit made of high-performance thin film transistors. The display pixel block and the peripheral circuit blocks including the four corners of the display device are formed on an image display device substrate of circuit-built-in type thin film transistors having a small circuit occupation surface area. A circuit including thin film transistors of a polycrystalline silicon film anisotropically crystal-grown and having crystal grains aligned in its longitudinal direction with a current direction is provided in the whole or partial surface of the display pixel block and circuit blocks. The longitudinal direction is aligned with a horizontal or vertical direction within the block, and blocks aligned in the horizontal and vertical directions can be arranged as mixed when viewed from an identical straight line.
    • 一种图像显示装置,包括显示像素块和与其周边的电路块。 每块具有由高性能薄膜晶体管制成的电路。 显示像素块和包括显示装置的四个角的外围电路块形成在具有小电路占用表面积的电路内置型薄膜晶体管的图像显示装置基板上。 在显示像素块和电路块的整个或部分表面上设置包括各向异性晶体生长并且在其纵向方向上与电流方向对齐的晶粒的多晶硅薄膜的薄膜晶体管的电路。 纵向方向与块内的水平或垂直方向对准,并且在从相同的直线观察时,在水平和垂直方向上排列的块可以被布置成混合。
    • 3. 发明授权
    • Thin film semiconductor device containing polycrystalline Si—Ge alloy and method for producing thereof
    • 含有多晶Si-Ge合金的薄膜半导体器件及其制造方法
    • US06716726B2
    • 2004-04-06
    • US10277140
    • 2002-10-22
    • Shinya YamaguchiTakeo ShibaMutsuko HatanoSeong-Kee Park
    • Shinya YamaguchiTakeo ShibaMutsuko HatanoSeong-Kee Park
    • H01L2120
    • H01L29/78696H01L29/66757H01L29/78675H01L29/78684Y10S438/933
    • The present invention relates to a thin film transistor, in a low-temperature poly-Si thin film becoming an elemental material of the thin film transistor, an object of the invention is to provide the thin film transistor suitable for realizing an image display device having a high performance and a large area at low cost by realizing a poly-crystalline thin film having a crystal structure restraining current scattering in a grain boundary, lessening surface roughness, and capable of realizing high mobility even to a positive hole current. The object described above is achieved by realizing a TFT with high mobility by restraining a current scattering factor in a grain boundary of crystal with an introduction of Ge into the poly-crystalline Si thin film and with a difference in ratios of Ge compositions between an interior grain of crystal and a grain boundary of crystal resulted from a phase separation involved in crystallization, and by restraining surface roughness using a difference in volumes in a crystal.
    • 薄膜晶体管本发明涉及一种成为薄膜晶体管的元素材料的低温多晶硅薄膜中的薄膜晶体管,其目的在于提供一种薄膜晶体管,其适用于实现具有 通过实现具有抑制晶界中的电流散射的晶体结构的多晶薄膜,降低表面粗糙度,并且即使对于空穴电流也能实现高迁移率,因此具有高性能和大面积的低成本。目的描述 通过在晶体的晶界中抑制电流散射因子,通过在多晶Si薄膜中引入Ge并且在晶体的内部晶粒之间的Ge组成的比率的差异来实现具有高迁移率的TFT, 并且晶体的晶界由结晶涉及的相分离产生,并且通过使用差异来抑制表面粗糙度 在一个水晶体积。
    • 4. 发明授权
    • Display device and a method for manufacturing the same
    • 显示装置及其制造方法
    • US06713324B2
    • 2004-03-30
    • US10187999
    • 2002-07-03
    • Takeo ShibaMutsuko HatanoShinya YamaguchiSeong-kee Park
    • Takeo ShibaMutsuko HatanoShinya YamaguchiSeong-kee Park
    • H01L2100
    • G02F1/13454G02F2202/104H01L27/12H01L27/1285H01L29/04H01L29/78621H01L29/78675
    • An image display device which includes a display pixel block and circuit blocks peripheral thereto. Each block has a circuit made of high-performance thin film transistors. The display pixel block and the peripheral circuit blocks including the four corners of the display device are formed on an image display device substrate of circuit-built-in type thin film transistors having a small circuit occupation surface area. A circuit including thin film transistors of a polycrystalline silicon film anisotropically crystal-grown and having crystal grains aligned in its longitudinal direction with a current direction is provided in the whole or partial surface of the display pixel block and circuit blocks. The longitudinal direction is aligned with a horizontal or vertical direction within the block, and blocks aligned in the horizontal and vertical directions can be arranged as mixed when viewed from an identical straight line.
    • 一种图像显示装置,包括显示像素块和与其周边的电路块。 每块具有由高性能薄膜晶体管制成的电路。 显示像素块和包括显示装置的四个角的外围电路块形成在具有小电路占用表面积的电路内置型薄膜晶体管的图像显示装置基板上。 在显示像素块和电路块的整个或部分表面上设置包括各向异性晶体生长并且在其纵向方向上与电流方向对齐的晶粒的多晶硅薄膜的薄膜晶体管的电路。 纵向方向与块内的水平或垂直方向对准,并且在从相同的直线观察时,在水平和垂直方向上排列的块可以被布置成混合。