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1. 发明授权

US08396596B2 Robot with load sensor 有权
标题翻译：带负载传感器的机器人
公开(公告)号：US08396596B2
公开(公告)日：2013-03-12
申请号：US12832018
申请日：2010-07-07
申请人： Takenori Oka , Manabu Okahisa
发明人： Takenori Oka , Manabu Okahisa
IPC分类号： G05B15/00 , B25J9/06 , B25J13/08
CPC分类号： B25J9/1694 , B25J9/1633 , Y10T74/20305 , Y10T74/20311 , Y10T74/20317
摘要： A robot includes an arm including a plurality of joints, arm members that form the arm, each arm member supporting a load, actuators that drive the joints and that are supported by the arm members, a load sensor embedded in at least one of the arm members to measure the load applied to the at least one of the arm members, a controller that controls movements of the actuators on the basis of a result of the measurement performed by the load sensor, and a wire hole through which a sensor line extend from a space inside the at least one of the arm members to a space inside the arm, the sensor line connecting the load sensor to the controller.
摘要翻译：一种机器人包括：臂，包括多个接头，形成臂的臂构件，支撑负载的每个臂构件，驱动接头并由臂构件支撑的致动器，嵌入至少一个臂的负载传感器用于测量施加到所述至少一个臂构件的负载的控制器，控制器，其基于由所述负载传感器执行的测量结果来控制所述致动器的运动;以及线孔，所述传感器线从所述线孔延伸所述至少一个臂构件内的空间到所述臂内的空间，所述传感器线将所述负载传感器连接到所述控制器。

2. 发明授权

US09095982B2 Drive apparatus and robot 有权
标题翻译：驱动装置和机器人
公开(公告)号：US09095982B2
公开(公告)日：2015-08-04
申请号：US13405359
申请日：2012-02-27
申请人： Takenori Oka , Masato Itou , Yusuke Kinoshita , Manabu Okahisa
发明人： Takenori Oka , Masato Itou , Yusuke Kinoshita , Manabu Okahisa
IPC分类号： H02K7/14 , H02P5/00 , B25J17/00 , B25J17/02
CPC分类号： B25J17/0283 , Y10T74/19079 , Y10T74/19107 , Y10T74/20335
摘要： This drive apparatus includes a first rotation mechanism portion including a first driven gear portion rotated by a first drive gear portion rotating about a first axis and a second rotation mechanism portion including a second driven gear portion rotated by a second drive gear portion rotating about the first axis.
摘要翻译：该驱动装置包括：第一旋转机构部，包括由围绕第一轴线旋转的第一驱动齿轮部旋转的第一从动齿轮部;第二旋转机构部，具有第二从动齿轮部，轴。

3. 发明授权

US08650965B2 Robot, robot system, robot control device, and state determining method 有权
标题翻译：机器人，机器人系统，机器人控制装置和状态确定方法
公开(公告)号：US08650965B2
公开(公告)日：2014-02-18
申请号：US13221868
申请日：2011-08-30
申请人： Yukio Hashiguchi , Shingo Ando , Takuya Fukuda , Takenori Oka , Shinji Murai , Takeomi Hidaka , Manabu Okahisa
发明人： Yukio Hashiguchi , Shingo Ando , Takuya Fukuda , Takenori Oka , Shinji Murai , Takeomi Hidaka , Manabu Okahisa
IPC分类号： G01L1/00
CPC分类号： B25J9/1633 , B25J9/0087 , B25J13/085
摘要： A robot according to an embodiment includes an arm, a strain sensor, one or more actuator, and a sensor fixing jig. The strain sensor includes a piezoelectric body that has a natural frequency higher than a natural frequency of a structural material forming the arm. The one or more actuators are provided in the arm to drive the arm. The sensor fixing jig is provided in a base of the actuator, among the actuators in the arm, closest to a base end of the arm. The strain sensor is provided in the sensor fixing jig.
摘要翻译：根据实施例的机器人包括臂，应变传感器，一个或多个致动器和传感器固定夹具。应变传感器包括具有比形成臂的结构材料的固有频率高的固有频率的压电体。一个或多个致动器设置在臂中以驱动臂。传感器固定夹具设置在致动器的基部中，臂中的致动器最靠近臂的基端。应变传感器设置在传感器固定夹具中。

4. 发明申请

US20120048027A1 ROBOT, ROBOT SYSTEM, ROBOT CONTROL DEVICE, AND STATE DETERMINING METHOD 有权
标题翻译：机器人，机器人系统，机器人控制装置和状态确定方法
公开(公告)号：US20120048027A1
公开(公告)日：2012-03-01
申请号：US13221868
申请日：2011-08-30
申请人： Yukio HASHIGUCHI , Shingo Ando , Takuya Fukuda , Takenori Oka , Shinji Murai , Takeomi Hidaka , Manabu Okahisa
发明人： Yukio HASHIGUCHI , Shingo Ando , Takuya Fukuda , Takenori Oka , Shinji Murai , Takeomi Hidaka , Manabu Okahisa
IPC分类号： G01L1/16
CPC分类号： B25J9/1633 , B25J9/0087 , B25J13/085
摘要： A robot according to an embodiment includes arm and a strain sensor. The strain sensor includes a piezoelectric body that has a natural frequency higher than a natural frequency of a structural material forming the arm.
摘要翻译：根据实施例的机器人包括臂和应变传感器。应变传感器包括具有比形成臂的结构材料的固有频率高的固有频率的压电体。

5. 发明申请

US20090291566A1 Substrate Processing Apparatus, Coolant Gas Supply Nozzle and Semiconductor Device Manufacturing Method 有权
标题翻译：基板处理装置，冷却剂气体供给喷嘴和半导体装置制造方法
公开(公告)号：US20090291566A1
公开(公告)日：2009-11-26
申请号：US11989698
申请日：2006-07-19
申请人： Masaaki Ueno , Akira Hayashida , Masakazu Shimada , Takenori Oka
发明人： Masaaki Ueno , Akira Hayashida , Masakazu Shimada , Takenori Oka
IPC分类号： H01L21/477 , C23C16/00
CPC分类号： H01L21/67769 , C23C16/463 , C23C16/54 , H01L21/67109
摘要： A substrate processing apparatus comprises a processing chamber for storing a boat supporting multiple substrates and for processing the multiple substrates, a heater unit installed around the processing chamber for heating the substrates, and a coolant gas supply nozzle including a pipe section extending perpendicular to a main surface of the substrate supported in the boat stored in the processing chamber, and a spray hole formed on the pipe section for spraying coolant gas to at least two of the multiple substrates, wherein the coolant gas supply nozzle is formed so that the cross sectional area of the pipe section in the area where the spray hole is formed is larger than the total opening area of the spray hole.
摘要翻译：基板处理装置包括：处理室，用于存储支撑多个基板并用于处理多个基板的船;加热器单元，安装在处理室周围用于加热基板;以及冷却剂气体供给喷嘴，其包括垂直于主体的管段支撑在存储在处理室中的舟皿中的基板的表面，以及形成在管段上用于将冷却剂气体喷射到多个基板中的至少两个的喷射孔，其中冷却剂气体供给喷嘴形成为横截面积在喷孔形成区域中的管段大于喷孔的总开口面积。

6. 发明授权

US08148271B2 Substrate processing apparatus, coolant gas supply nozzle and semiconductor device manufacturing method 有权
标题翻译：基板加工装置，冷却剂气体供给喷嘴和半导体装置的制造方法
公开(公告)号：US08148271B2
公开(公告)日：2012-04-03
申请号：US11989698
申请日：2006-07-19
申请人： Masaaki Ueno , Akira Hayashida , Masakazu Shimada , Takenori Oka
发明人： Masaaki Ueno , Akira Hayashida , Masakazu Shimada , Takenori Oka
IPC分类号： H01L21/302
CPC分类号： H01L21/67769 , C23C16/463 , C23C16/54 , H01L21/67109
摘要： A substrate processing apparatus comprises a processing chamber for storing a boat supporting multiple substrates and for processing the multiple substrates, a heater unit installed around the processing chamber for heating the substrates, and a coolant gas supply nozzle including a pipe section extending perpendicular to a main surface of the substrate supported in the boat stored in the processing chamber, and a spray hole formed on the pipe section for spraying coolant gas to at least two of the multiple substrates, wherein the coolant gas supply nozzle is formed so that the cross sectional area of the pipe section in the area where the spray hole is formed is larger than the total opening area of the spray hole.
摘要翻译：基板处理装置包括：处理室，用于存储支撑多个基板并用于处理多个基板的船;加热器单元，安装在处理室周围用于加热基板;以及冷却剂气体供给喷嘴，其包括垂直于主体的管段支撑在存储在处理室中的舟皿中的基板的表面，以及形成在管段上用于将冷却剂气体喷射到多个基板中的至少两个的喷射孔，其中冷却剂气体供给喷嘴形成为横截面积在喷孔形成区域中的管段大于喷孔的总开口面积。

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