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    • 7. 发明授权
    • Method of manufacturing an organic electroluminescence display device
    • 制造有机电致发光显示装置的方法
    • US08871537B2
    • 2014-10-28
    • US13613812
    • 2012-09-13
    • Daisuke YoshitokuNobuhiko Sato
    • Daisuke YoshitokuNobuhiko Sato
    • H01L21/00H01L31/036H01L29/04H01L27/32H01L51/00
    • H01L27/3211H01L51/0018
    • Provided is a method of manufacturing an organic electroluminescence display device which enables production of a high-resolution organic electroluminescence display device in which display failure is suppressed. The method of manufacturing an organic electroluminescence display device includes multiple organic electroluminescence elements each including an organic compound layer that includes at least an emission layer, the method including: forming the organic compound layer on a substrate; sequentially forming an intermediate layer and a resist layer on the organic compound layer; removing a part of the resist layer by a photolithography method; and selectively removing, by dry etching, the intermediate layer and the organic compound layer in a region in which the part of the resist layer is removed, the light shielding layer having a function of blocking light having a wavelength of 190 nm or more and 360 nm or less.
    • 提供一种制造有机电致发光显示装置的方法,其能够制造抑制显示不良的高分辨率有机电致发光显示装置。 制造有机电致发光显示装置的方法包括多个有机电致发光元件,每个有机电致发光元件包括至少包含发射层的有机化合物层,该方法包括:在基板上形成有机化合物层; 在有机化合物层上依次形成中间层和抗蚀剂层; 通过光刻法去除一部分抗蚀剂层; 并且通过干蚀刻在去除抗蚀剂层的一部分的区域中通过干蚀刻选择性地除去具有阻挡波长为190nm以上的光的功能的遮光层和360nm nm以下。