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    • 9. 发明授权
    • Method of manufacturing semiconductor device
    • 制造半导体器件的方法
    • US06991952B2
    • 2006-01-31
    • US10613624
    • 2003-07-03
    • Takashi MizunoMotonobu TakeyaTakeharu AsanoMasao Ikeda
    • Takashi MizunoMotonobu TakeyaTakeharu AsanoMasao Ikeda
    • H01L21/00
    • H01S5/0224H01S5/0021H01S5/02212H01S5/02224H01S5/02272H01S5/32341
    • Provided is a method of manufacturing a semiconductor device, which is adapted to prevent the deposition of a material on a laser light emitting edge, thereby enabling an improvement in longevity characteristics of a laser. A base having a laser chip mounted thereon is irradiated with an energy beam having a shorter wavelength than an oscillation wavelength of the laser chip. Photolysis and oxidation caused by the energy beam cause the removal of an adherent from the overall base or the deterioration thereof, and incidentally, the adherent is derived from an adhesive sheet used to attach the laser chip to the base, or the like. Preferably, laser light or ultraviolet light, for example, is used as the energy beam. Alternatively, the base having the laser chip mounted thereon may be irradiated with plasma so as to remove the adherent utilizing an ion cleaning effect of the plasma. After irradiation, a top is mounted to the base so as to shut off the laser chip from the outside.
    • 提供一种制造半导体器件的方法,其适于防止材料沉积在激光发射边缘上,从而能够提高激光器的寿命特性。 用具有比激光芯片的振荡波长短的波长的能量束照射安装有激光芯片的基座。 由能量束引起的光解和氧化导致从整个基底中去除附着物或其劣化,附带地,粘合剂衍生自用于将激光芯片附着到基底的粘合片等。 优选地,例如使用激光或紫外线作为能量束。 或者,可以用等离子体照射安装有激光芯片的基座,以便利用等离子体的离子清洁效果去除粘附剂。 照射后,将顶部安装在基座上,以从外部切断激光芯片。