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1. 发明申请

US20070022827A1 Angular velocity sensor 审中-公开
标题翻译：角速度传感器
公开(公告)号：US20070022827A1
公开(公告)日：2007-02-01
申请号：US11492090
申请日：2006-07-25
申请人： Hiroshi Ishikawa , Satoshi Sano , Takashi Katsuki , Yuji Takahashi , Fumihiko Nakazawa , Takayuki Yamaji
发明人： Hiroshi Ishikawa , Satoshi Sano , Takashi Katsuki , Yuji Takahashi , Fumihiko Nakazawa , Takayuki Yamaji
IPC分类号： G01L3/18
CPC分类号： G01C19/5719
摘要： An angular velocity sensor includes a first gimbal portion, a second gimbal portion connected to the first gimbal portion by first torsion bars provided at opposing sides of the first gimbal portion, a frame portion connected to the second gimbal portion by second torsion bars provided at the opposing sides of the second gimbal portion, first electrostatic coupling portions provided at the opposing sides of the first gimbal portion to electrostatically couple the first gimbal portion and the second gimbal portion, and second electrostatic coupling portions provided at the opposing sides of the second gimbal portion to electrostatically couple the second gimbal portion and the frame portion. In the first gimbal portion, a maximum width of sides of a direction of the first torsion bars is greater than that of the sides where the first torsion bars are provided.
摘要翻译：角速度传感器包括第一万向架部分，第一万向架部分，通过设置在第一万向架部分的相对侧的第一扭杆连接到第一万向节部分;框架部分，通过设置在第一万向节部件上的第二扭杆连接到第二万向节部分第二万向节部分的相对侧，设置在第一万向架部分相对侧的第一静电耦合部分，以静电耦合第一万向节部分和第二万向节部分;以及设置在第二万向节部分的相对侧的第二静电耦合部分以静电耦合第二万向节部分和框架部分。在第一万向节部分中，第一扭杆的方向的最大宽度的宽度大于设置第一扭杆的侧面的最大宽度。

2. 发明申请

US20070035016A1 Semiconductor device 审中-公开
标题翻译：半导体器件
公开(公告)号：US20070035016A1
公开(公告)日：2007-02-15
申请号：US11500427
申请日：2006-08-08
申请人： Takayuki Yamaji , Hiroshi Ishikawa , Takashi Katsuki , Yuji Takahashi , Fumihiko Nakazawa , Satoshi Sano
发明人： Takayuki Yamaji , Hiroshi Ishikawa , Takashi Katsuki , Yuji Takahashi , Fumihiko Nakazawa , Satoshi Sano
IPC分类号： H01L23/34
CPC分类号： G01C19/5719 , B81B2201/0242 , B81B2201/042 , B81B2207/097 , B81C1/00301 , H01L2224/48137 , H01L2224/73265 , H01L2924/30107 , H01L2924/00
摘要： A semiconductor device includes a chip having a base semiconductor layer, an insulation layer provided on the base semiconductor layer, and an upper semiconductor layer provided on the insulation layer; a mounting substrate on which the chip is mounted at the base semiconductor layer; and a connecting portion that electrically couples first terminals provided on the mounting substrate and a surface or second terminals provided thereon of the base semiconductor layer.
摘要翻译：半导体器件包括具有基底半导体层的芯片，设置在基底半导体层上的绝缘层和设置在绝缘层上的上半导体层; 安装基板，芯片安装在基板半导体层上; 以及连接部，其电连接设置在安装基板上的第一端子和设置在该基底半导体层上的表面或第二端子。

3. 发明申请

US20070256497A1 Angular velocity sensor 审中-公开
标题翻译：角速度传感器
公开(公告)号：US20070256497A1
公开(公告)日：2007-11-08
申请号：US11785458
申请日：2007-04-18
申请人： Hiroshi Ishikawa , Takayuki Yamaji , Akira Imai , Shoji Ogasawara , Takashi Katsuki , Yuji Takahashi , Fumihiko Nakazawa , Hiroaki Takagi
发明人： Hiroshi Ishikawa , Takayuki Yamaji , Akira Imai , Shoji Ogasawara , Takashi Katsuki , Yuji Takahashi , Fumihiko Nakazawa , Hiroaki Takagi
IPC分类号： G01P15/08
CPC分类号： G01C19/5607 , G01C19/5628
摘要： An angular velocity sensor includes multiple tuning-fork vibrators, each of which respectively includes a base portion and multiple arm portions extending from the base portion, and a difference in a resonance frequency between the multiple tuning-fork vibrators is at least 2 percent of an average of resonance frequencies of the multiple tuning-fork vibrators.
摘要翻译：角速度传感器包括多个音叉振动器，每个音叉振动器分别包括基部和从基部延伸的多个臂部分，并且多个音叉振动器之间的谐振频率的差异为至少2％多音叉振动器的共振频率的平均值。

4. 发明申请

US20070256498A1 Angular velocity sensor 审中-公开
标题翻译：角速度传感器
公开(公告)号：US20070256498A1
公开(公告)日：2007-11-08
申请号：US11785459
申请日：2007-04-18
申请人： Takayuki Yamaji , Hiroshi Ishikawa , Akira Imai , Shoji Ogasawara , Takashi Katsuki , Yuji Takahashi , Fumihiko Nakazawa , Hiroaki Takagi
发明人： Takayuki Yamaji , Hiroshi Ishikawa , Akira Imai , Shoji Ogasawara , Takashi Katsuki , Yuji Takahashi , Fumihiko Nakazawa , Hiroaki Takagi
IPC分类号： G01P15/08
CPC分类号： G01C19/5607
摘要： An angular velocity sensor includes multiple tuning-fork vibrators, each of which respectively includes a base portion and multiple arm portions extending from the base portion, and a difference in length of the arm portions between the multiple tuning-fork vibrators is at least 1 percent of an average of lengths of the multiple arm portions of the multiple tuning-fork vibrators.
摘要翻译：角速度传感器包括多个音叉振动器，每个音叉振动器分别包括基部和从基部延伸的多个臂部，多个音叉振动器之间的臂部分的长度差异至少为1％多个音叉振动器的多个臂部的平均长度的平均值。

5. 发明申请

US20070256496A1 Angular velocity sensor 审中-公开
标题翻译：角速度传感器
公开(公告)号：US20070256496A1
公开(公告)日：2007-11-08
申请号：US11785457
申请日：2007-04-18
申请人： Takayuki Yamaji , Hiroshi Ishikawa , Takashi Katsuki , Yuji Takahashi , Fumihiko Nakazawa , Hiroaki Takagi
发明人： Takayuki Yamaji , Hiroshi Ishikawa , Takashi Katsuki , Yuji Takahashi , Fumihiko Nakazawa , Hiroaki Takagi
IPC分类号： G01P15/08
CPC分类号： G01C19/5628
摘要： An angular velocity sensor includes: first and second tuning-fork vibrators, each of which respectively includes a base portion and multiple arm portions extending from the base portion; and a mounting portion mounting the first and second tuning-fork vibrators, and an end of an arm portion of the first tuning-fork vibrator opposes a side face of the second tuning-fork vibrator; and a first wire connecting the first tuning-fork vibrator and the mounting portion extends in a width direction of the first tuning-fork vibrator.
摘要翻译：角速度传感器包括：第一和第二音叉振动器，其分别包括基部和从基部延伸的多个臂部; 以及安装所述第一和第二音叉振动器的安装部分，并且所述第一音叉振子的臂部的一端与所述第二音叉振动器的侧面相对; 连接第一音叉振子和安装部的第一线在第一音叉振子的宽度方向上延伸。

6. 发明申请

US20080210007A1 Angular velocity sensor 审中-公开
标题翻译：角速度传感器
公开(公告)号：US20080210007A1
公开(公告)日：2008-09-04
申请号：US12010249
申请日：2008-01-23
申请人： Takayuki Yamaji , Hiroshi Ishikawa , Yuji Takahashi , Takashi Katsuki , Fumihiko Nakazawa , Hiroaki Inoue
发明人： Takayuki Yamaji , Hiroshi Ishikawa , Yuji Takahashi , Takashi Katsuki , Fumihiko Nakazawa , Hiroaki Inoue
IPC分类号： G01P9/04
CPC分类号： G01C19/5712 , G01C19/5628
摘要： An angular velocity sensor includes: a first tuning-fork vibrator having a first base and first aims extending from the first base in a first direction; a second tuning-fork vibrator having a second bass and second arms extending from the second base in a second direction; and a double gimbal portion mat has a drive gimbal portion vibrating about an axis extending in a fourth direction, and a sense gimbal portion vibrating about an axis extending in a fifth direction and senses an angular velocity about an axis extending in a third direction.
摘要翻译：角速度传感器包括：第一音叉振子，具有第一基座和第一目标，从第一基座沿第一方向延伸; 具有第二低音和第二臂的第二音叉振子，所述第二音叉和第二臂在第二方向上从所述第二基座延伸; 并且双云母部分垫具有绕围绕第四方向延伸的轴线振动的驱动万向节部分和围绕沿第五方向延伸的轴线振动的感测万向节部分，并感测围绕在第三方向延伸的轴线的角速度。

7. 发明申请

US20080105051A1 Vibration sensor and method for manufacturing the same 审中-公开
标题翻译：振动传感器及其制造方法
公开(公告)号：US20080105051A1
公开(公告)日：2008-05-08
申请号：US11907432
申请日：2007-10-12
申请人： Takayuki Yamaji , Hiroshi Ishikawa , Yuji Takahashi , Takashi Katsuki , Fumihiko Nakazawa , Hiroaki Inoue
发明人： Takayuki Yamaji , Hiroshi Ishikawa , Yuji Takahashi , Takashi Katsuki , Fumihiko Nakazawa , Hiroaki Inoue
IPC分类号： G01P15/097 , H01S4/00
CPC分类号： G01C19/5607 , H03H9/0519 , H03H9/1021 , H03H9/21 , Y10T29/49002
摘要： A vibration sensor includes a tuning-fork vibrator having a base and arms extending from the base, a mounting portion for mounting the tuning-fork vibrator, and a supporting member that mounts the tuning-fork vibrator on the mounting portion and has a narrow portion.
摘要翻译：振动传感器包括音叉振子，其具有从基座延伸的基部和臂，用于安装音叉振动器的安装部分和将音叉振动器安装在安装部分上并具有狭窄部分的支撑部件。

8. 发明申请

US20080053227A1 Vibration sensor 审中-公开
标题翻译：振动传感器
公开(公告)号：US20080053227A1
公开(公告)日：2008-03-06
申请号：US11892839
申请日：2007-08-28
申请人： Takayuki Yamaji , Hiroshi Ishikawa , Takashi Katsuki , Yuji Takahashi , Fumihiko Nakazawa
发明人： Takayuki Yamaji , Hiroshi Ishikawa , Takashi Katsuki , Yuji Takahashi , Fumihiko Nakazawa
IPC分类号： G01C19/56
CPC分类号： G01C19/5607
摘要： A vibration sensor includes a tuning-fork vibrator having a base and arms extending from the base, a mounting portion for,mounting the tuning-fork vibrator, and multiple supporting members that mount the tuning-fork vibrator on the mounting portion.
摘要翻译：振动传感器包括具有底座和从基座延伸的臂的音叉振动器，用于安装音叉振子的安装部分和将音叉振动器安装在安装部分上的多个支撑构件。

9. 发明申请

US20090139328A1 Packaged micro movable device and method for making the same 审中-公开
标题翻译：包装微动移动装置及其制造方法
公开(公告)号：US20090139328A1
公开(公告)日：2009-06-04
申请号：US12071862
申请日：2008-02-27
申请人： Hiroaki Inoue , Fumihiko Nakazawa , Hiroshi Ishikawa , Takashi Katsuki , Takayuki Yamaji
发明人： Hiroaki Inoue , Fumihiko Nakazawa , Hiroshi Ishikawa , Takashi Katsuki , Takayuki Yamaji
IPC分类号： G01P15/00 , B32B38/00 , C23F1/00 , B23K37/00
CPC分类号： G01P15/125 , G01C19/5719 , G01P1/023 , G01P15/0802 , H01L23/041 , H01L2924/0002 , Y10T156/1052 , H01L2924/00
摘要： A method is provided for making packaged micro-devices each including a micro movable element, a first packaging member formed with a recess, and a second packaging member formed with another recess. The micro movable element has a movable part. In accordance with the method, a device wafer is prepared for forming a plurality of micromovable elements. A first packaging wafer, formed with a plurality of recesses corresponding in position to the movable parts of the respective movable elements, is bonded to one surface of the device wafer. A second packaging wafer, formed with a plurality of recesses, is bonded to the other surface of the device wafer. The resulting laminate assembly is cut into separate products.
摘要翻译：提供一种用于制造包括微型可移动元件，形成有凹部的第一包装构件和形成有另一凹部的第二包装构件的包装微型装置的方法。微动元件具有可动部。根据该方法，制备用于形成多个微型可移动元件的器件晶片。形成有与相应可移动元件的可移动部分相对应的多个凹部的第一封装晶片被结合到器件晶片的一个表面。形成有多个凹部的第二封装晶片被接合到器件晶片的另一个表面。将所得的层压组件切割成单独的产品。

10. 发明申请

US20070277614A1 Vibration sensor 审中-公开
标题翻译：振动传感器
公开(公告)号：US20070277614A1
公开(公告)日：2007-12-06
申请号：US11808138
申请日：2007-06-06
申请人： Yuji Takahashi , Fumihiko Nakazawa , Hiroshi Ishikawa , Masanori Yachi , Takayuki Yamaji , Minoru Ohta
发明人： Yuji Takahashi , Fumihiko Nakazawa , Hiroshi Ishikawa , Masanori Yachi , Takayuki Yamaji , Minoru Ohta
IPC分类号： G01H11/06 , G01P9/04 , G01P1/04
CPC分类号： G01H11/08
摘要： A vibration sensor includes a vibration body, a drive circuit that vibrates the vibration body, a sense circuit that refers to a reference signal associated with a drive signal for the drive circuit and detects a physical state of the vibration body on the basis of a sense signal related to vibration of the vibration body, and a capacitor provided between the drive circuit and ground. The capacitor has a temperature characteristic of a capacitance value defined so as to compensate for at least a part of the temperature characteristic of a sensitivity of the sense signal to the vibration of the vibration body.
摘要翻译：振动传感器包括：振动体，使振动体振动的驱动电路;感测电路，其参考与驱动电路的驱动信号相关联的参考信号，并根据感觉检测振动体的物理状态与振动体的振动有关的信号，以及设置在驱动电路和地之间的电容器。电容器具有电容值的温度特性，其定义为补偿感测信号对振动体的振动的灵敏度的温度特性的至少一部分。

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