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    • 10. 发明申请
    • Acceleration sensor with redundant contact holes
    • 具有冗余接触孔的加速度传感器
    • US20060156817A1
    • 2006-07-20
    • US11325336
    • 2006-01-05
    • Takayuki Kai
    • Takayuki Kai
    • G01P15/00
    • G01P15/18G01P15/123G01P2015/084
    • An acceleration sensor includes a mass and a supporting member linked by a flexible beam. A strain detector having low-resistance areas at both ends is formed near a boundary between the beam and the mass or between the beam and the supporting member. A dielectric film formed on the supporting member and the beam has multiple contact holes disposed over each low-resistance area. Wiring formed on the dielectric film is connected to the low-resistance areas through the contact holes. The provision of multiple contact holes for each low-resistance area extends the life of the acceleration sensor by preventing sensor failure due to the separation or other failure of any single contact.
    • 加速度传感器包括质量和由柔性梁连接的支撑构件。 在梁和质量块之间或梁与支撑构件之间的边界附近形成在两端具有低电阻区域的应变检测器。 形成在支撑构件和梁上的电介质膜具有设置在每个低电阻区域上的多个接触孔。 电介质膜上形成的布线通过接触孔连接到低电阻区域。 为每个低电阻区域提供多个接触孔通过防止由于任何单个触点的分离或其他故障导致的传感器故障来延长加速度传感器的寿命。