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    • 2. 发明申请
    • ION IMPLANTER
    • 离子植入物
    • US20080135777A1
    • 2008-06-12
    • US11870333
    • 2007-10-10
    • Takatoshi YamashitaTadashi IkejiriKohei TanakaWeijiang ZhaoHideyuki Tanaka
    • Takatoshi YamashitaTadashi IkejiriKohei TanakaWeijiang ZhaoHideyuki Tanaka
    • H01J3/14
    • H01J37/3171H01J37/05H01J2237/047H01J2237/055H01J2237/12H01J2237/15
    • The projection distances of connecting portions of a coil are reduced, thereby enabling the size and power consumption of an analyzing electromagnet to be reduced, and therefore the size and power consumption of an ion implanting apparatus are enabled to be reduced.[Means for Resolution] An analyzing electromagnet 200 constituting an ion implanting apparatus has a first inner coil 206, a second inner coil 212, three first outer coils 218, three second outer coils 224, and a yoke 230. The inner coils 206, 212 are saddle-shaped coils cooperating with each other to generate a main magnetic field which bends an ion beam in the X direction. Each of the outer coils 218, 224 is a saddle-shaped coil which generates a sub-magnetic field correcting the main magnetic field. Each of the coils has a configuration where a notched portion is disposed in a fan-shaped cylindrical stacked coil configured by: winding a laminations of an insulation sheet and a conductor sheet in multiple turn on an outer peripheral face of a laminated insulator; and forming a laminated insulator on an outer peripheral face,
    • 线圈的连接部分的投影距离减小,从而能够降低分析电磁铁的尺寸和功率消耗,从而能够减小离子注入装置的尺寸和功耗。 [分辨装置]构成离子注入装置的分析电磁体200具有第一内线圈206,第二内线圈212,三个第一外线圈218,三个第二外线圈224和轭230。 内部线圈206,212是彼此协作的鞍形线圈,以产生在X方向上弯曲离子束的主磁场。 外部线圈218,224中的每一个是产生校正主磁场的子磁场的鞍形线圈。 每个线圈具有其中凹口部分设置在扇形圆柱形堆叠线圈中的构造,该扇形圆柱形堆叠线圈通过以下方式构成:在层压绝缘体的外周面上多层卷绕绝缘片和导体片的叠层; 并在外周面上形成层压绝缘体,
    • 3. 发明授权
    • Ion beam measuring method and ion implanting apparatus
    • 离子束测量方法和离子注入装置
    • US07655929B2
    • 2010-02-02
    • US11583830
    • 2006-10-20
    • Sei UmisedoNariaki HamamotoTadashi IkejiriKohei Tanaka
    • Sei UmisedoNariaki HamamotoTadashi IkejiriKohei Tanaka
    • G21K5/10H01J37/08
    • H01J37/3171H01J37/244H01J37/304H01J2237/24405H01J2237/24507H01J2237/24535H01J2237/24564H01J2237/24578H01J2237/3045H01J2237/30483H01J2237/31703
    • A change of a beam current of an ion beam which passes an outside of the side of a forestage beam restricting shutter, and which is incident on a forestage multipoints Faraday is measured while the forestage beam restricting shutter is driven in a y direction by a forestage shutter driving apparatus in order to obtain a beam current density distribution in the y direction of the ion beam at a position of the forestage beam restricting shutter. A change of a beam current of the ion beam which passes an outside of the side of a poststage beam restricting shutter, and which is incident on a poststage multipoints Faraday is measured while the poststage beam restricting shutter is driven in the y direction by a poststage shutter driving apparatus in order to obtain a beam current density distribution in the y direction of the ion beam at a position of the poststage beam restricting shutter. By using these results, an angle deviation, a diverging angle, and/or a beam size in the y direction of the ion beam can be obtained.
    • 测量通过森林梁限制快门侧的外侧并入射在森林多点法拉第的离子束的射束电流的变化,同时森林光束限制快门通过森林遮挡板在ay方向上驱动 驱动装置,以便在森林光束限制快门的位置处获得离子束的y方向上的束电流密度分布。 在后级光束限制快门通过后台沿y方向驱动时,测量通过舞台前限制快门侧的外侧并且入射到后台多点法拉第的离子束的束电流的变化 快门驱动装置,以便在后级束限制快门的位置处获得离子束的y方向上的束电流密度分布。 通过使用这些结果,可以获得离子束的y方向上的角度偏差,发散角度和/或光束尺寸。
    • 5. 发明授权
    • Display device
    • 显示设备
    • US09001096B2
    • 2015-04-07
    • US13511967
    • 2010-11-30
    • Yasuhiro SugitaKohei TanakaChristopher Brown
    • Yasuhiro SugitaKohei TanakaChristopher Brown
    • G06F3/038G09G5/00H01L27/146G09G3/36
    • H01L27/14609G09G3/3648G09G2320/0233G09G2360/141G09G2360/148
    • Provided is a display device that has excellent accuracy in image capturing by improving linearity of sensitivity characteristics of a photodiode. An optical sensor provided on an active matrix substrate of the display device includes; a photodiode (D1a) for receiving incident light; a reset signal line (RSTa) for supplying a reset signal RST to the optical sensor; a readout signal line (RWSa) for supplying a readout signal RWS to the optical sensor; and a sensor switching element (M1a) for reading out a photoelectric current output from the photodiode (D1a), according to the readout signal, during a period from the supply of the reset signal to the supply of the readout signal. A potential VLS of a light shielding film (LS) provided on a back side of the photodiode (D1a) is caused to be a high level potential during a period that at least partially overlaps a period while the reset signal is supplied.
    • 提供了一种通过提高光电二极管的灵敏度特性的线性度而具有优异的图像捕获精度的显示装置。 提供在显示装置的有源矩阵基板上的光学传感器包括: 用于接收入射光的光电二极管(D1a) 复位信号线(RSTa),用于向光学传感器提供复位信号RST; 读出信号线(RWSa),用于向光学传感器提供读出信号RWS; 以及在从复位信号的供给到读出信号的供给期间,根据读出信号,读出从光电二极管(D1a)输出的光电流的传感器开关元件(M1a)。 设置在光电二极管(D1a)的背面的遮光膜(LS)的电位VLS在复位信号被提供期间至少部分地与周期重叠的时间段内变为高电平电位。
    • 6. 发明授权
    • Display device having a photosensor
    • 具有光电传感器的显示装置
    • US08772699B2
    • 2014-07-08
    • US13254422
    • 2010-01-07
    • Christopher BrownKohei TanakaHiromi Katoh
    • Christopher BrownKohei TanakaHiromi Katoh
    • H03F3/08G06F3/038
    • G06F3/0412G02F1/13338G02F2001/13312G06F3/042G09G3/3648
    • The present invention relates to a display device including a photosensor in a pixel region. The photosensor of the present invention includes a diode (D1) that receives incident light, reset signal wiring (RST) that supplies a reset signal, readout signal wiring (RWS) that supplies a readout signal, a storage node (INT) whose potential changes in accordance with the amount of light received by the photodetection element in a sensing period, the sensing period being from when the reset signal is supplied until when the readout signal is supplied, an amplification element (C1) that amplifies the potential of the storage node in accordance with the readout signal, and a sensor switching element (M2) for reading out the potential amplified by the amplification element to output wiring (OUT) as sensor circuit output.
    • 本发明涉及包括像素区域中的光电传感器的显示装置。 本发明的光传感器包括接收入射光的二极管(D1),提供复位信号的复位信号布线(RST),提供读出信号的读出信号布线(RWS),其电位变化的存储节点(INT) 根据在检测周期中由光检测元件接收的光量,检测周期是从提供复位信号直到提供读出信号时的放大元件(C1)放大存储节点的电位 以及用于读出由放大元件放大的电位以输出布线(OUT)作为传感器电路输出的传感器开关元件(M2)。
    • 8. 发明申请
    • DISPLAY DEVICE
    • 显示设备
    • US20120293475A1
    • 2012-11-22
    • US13511967
    • 2010-11-30
    • Yasuhiro SugitaKohei TanakaChristopher Brown
    • Yasuhiro SugitaKohei TanakaChristopher Brown
    • G09G5/00
    • H01L27/14609G09G3/3648G09G2320/0233G09G2360/141G09G2360/148
    • Provided is a display device that has excellent accuracy in image capturing by improving linearity of sensitivity characteristics of a photodiode. An optical sensor provided on an active matrix substrate of the display device includes; a photodiode (D1a) for receiving incident light; a reset signal line (RSTa) for supplying a reset signal RST to the optical sensor; a readout signal line (RWSa) for supplying a readout signal RWS to the optical sensor; and a sensor switching element (M1a) for reading out a photoelectric current output from the photodiode (D1a), according to the readout signal, during a period from the supply of the reset signal to the supply of the readout signal. A potential VLS of a light shielding film (LS) provided on a back side of the photodiode (D1a) is caused to be a high level potential during a period that at least partially overlaps a period while the reset signal is supplied.
    • 提供了一种通过提高光电二极管的灵敏度特性的线性度而具有优异的图像捕获精度的显示装置。 提供在显示装置的有源矩阵基板上的光学传感器包括: 用于接收入射光的光电二极管(D1a) 复位信号线(RSTa),用于向光学传感器提供复位信号RST; 读出信号线(RWSa),用于向光学传感器提供读出信号RWS; 以及在从复位信号的供给到读出信号的供给期间,根据读出信号,读出从光电二极管(D1a)输出的光电流的传感器开关元件(M1a)。 设置在光电二极管(D1a)的背面的遮光膜(LS)的电位VLS在复位信号被提供期间至少部分地与周期重叠的时间段内变为高电平电位。