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    • 4. 发明申请
    • Vertical-type heat processing apparatus and method of controlling transfer mechanism in vertical-type heat processing apparatus
    • 垂直式热处理装置及垂直式热处理装置中传送机构的控制方法
    • US20070238062A1
    • 2007-10-11
    • US11723392
    • 2007-03-19
    • Satoshi AsariKiichi TakahashiKatsuhiko Oyama
    • Satoshi AsariKiichi TakahashiKatsuhiko Oyama
    • F27D5/00
    • F27D3/0084F27B17/0025H01L21/67265H01L21/67288H01L21/67781H01L21/68707
    • The present invention is a vertical-type heat processing apparatus comprising: a heat processing furnace; a holder capable of being loaded into the heat processing furnace and unloaded therefrom, with holding therein a plurality of objects to be processed at predetermined vertical intervals in a tier-like manner; a transfer mechanism including a base table capable of vertically moving and rotating, and a substrate supporter capable of horizontally moving on the base table; and a controller for controlling the transfer mechanism; wherein the transfer mechanism is adapted to transfer an object to be processed between a container containing a plurality of objects to be processed at predetermined intervals, and the holder; the substrate supporter includes a to-and-fro driving part for driving the substrate supporter in the horizontal direction, and a pitch-change driving part for changing a pitch at which the objects to be processed are supported; the controller is adapted to monitor an encoder value outputted from an encoder of the pitch-change driving part during an operation of the to-and-fro driving part of the substrate supporter; and the controller is adapted to judge upon a change of the encoder value that the transfer mechanism is abnormally driven, and then is adapted to stop the drive of the transfer mechanism.
    • 本发明是一种立式热处理装置,包括:加热炉; 能够被加载到热处理炉中并从其中卸载的保持器,其中以等级方式在其中以预定的垂直间隔保持多个要处理的物体; 包括能够垂直移动和旋转的基台的传送机构和能够在基台上水平移动的基板支撑件; 以及用于控制所述传送机构的控制器; 其中所述传送机构适于在预定间隔内容纳要处理的多个物体的容器和所述保持器之间传送待加工物体; 衬底支撑件包括用于在水平方向上驱动衬底支撑件的来回驱动部分和用于改变支撑待处理对象的间距的音调变化驱动部分; 控制器适于在衬底支撑件的来回驱动部分的操作期间监视从变桨驱动部分的编码器输出的编码器值; 并且所述控制器适于根据所述编码器值改变所述传送机构异常驱动,然后适于停止所述传送机构的驱动。
    • 5. 发明授权
    • Semiconductor device and manufacturing method therefor
    • 半导体装置及其制造方法
    • US07205670B2
    • 2007-04-17
    • US10649940
    • 2003-08-28
    • Katsuhiko Oyama
    • Katsuhiko Oyama
    • H01L23/48H01L23/52H01L23/29H01L23/02H01L29/40
    • H01L25/0657H01L2224/05568H01L2224/05573H01L2224/16H01L2224/32225H01L2224/73204H01L2225/06524H01L2225/06541H01L2225/06572H01L2924/00014H01L2224/05599
    • A semiconductor device is disclosed which comprises a plurality of semiconductor chips having a plurality of terminals, two chip mounting bases on each of which at least one of the semiconductor chips is mounted and a plurality of chip interconnections electrically connected to the terminals of the mounted semiconductor chip are formed into substantially the same pattern and which are stacked in two layers, one interconnection base which is interposed between the two chip mounting bases and on which a plurality of intermediate interconnections electrically connected to the chip interconnections are formed into a pattern different from the pattern of the chip interconnections, and a plurality of interlevel interconnections which are formed in a plurality of through holes extending through the chip mounting bases and the interconnection base at once along a stacking direction and electrically connect the chip interconnections and the intermediate interconnections.
    • 公开了一种半导体器件,其包括具有多个端子的多个半导体芯片,其上安装有至少一个半导体芯片的两个芯片安装基座以及电连接到所安装的半导体的端子的多个芯片互连 芯片形成为基本相同的图案并且堆叠成两层,一个互连基座,其插入在两个芯片安装基座之间,并且其上电连接到芯片互连件的多个中间互连形成为不同于 芯片互连的图案,以及多个层间互连,其形成在沿堆叠方向一次延伸穿过芯片安装基座和互连基座的多个通孔中并且电连接芯片互连和中间互连。
    • 6. 发明申请
    • Vertical-type heat processing apparatus and method of controlling transfer mechanism in vertical-type heat processing apparatus
    • 垂直式热处理装置及垂直式热处理装置中传送机构的控制方法
    • US20070248439A1
    • 2007-10-25
    • US11723399
    • 2007-03-19
    • Satoshi AsariKiichi TakahashiKatsuhiko Oyama
    • Satoshi AsariKiichi TakahashiKatsuhiko Oyama
    • H01L21/677
    • H01L21/67098H01L21/67766H01L21/67781H01L21/68707
    • The present invention is a vertical-type heat processing apparatus comprising: a heat processing furnace; a holder capable of being loaded into the heat processing furnace and unloaded therefrom, with holding therein a plurality of objects to be processed at predetermined vertical intervals in a tier-like manner; a transfer mechanism including a base table capable of vertically moving and rotating, and a substrate supporter capable of horizontally moving on the base table; and a controller for controlling the transfer mechanism; wherein the transfer mechanism is adapted to transfer an object to be processed between a container containing a plurality of objects to be processed at predetermined intervals, and the holder; the substrate supporter includes a to-and-fro driving part for driving the substrate supporter in the horizontal direction, and a pitch-change driving part for changing a pitch at which the objects to be processed are supported; the controller is adapted to monitor at least one information of position, velocity and current fed back to a motor for driving the transfer mechanism; and the controller is adapted to judge, by comparing the monitored information with predetermined information corresponding to a normal drive, that the transfer mechanism is abnormally driven, and then is adapted to stop the drive of the transfer mechanism.
    • 本发明是一种立式热处理装置,包括:加热炉; 能够被加载到热处理炉中并从其中卸载的保持器,其中以等级方式在其中以预定的垂直间隔保持多个要处理的物体; 包括能够垂直移动和旋转的基台的传送机构和能够在基台上水平移动的基板支撑件; 以及用于控制所述传送机构的控制器; 其中所述传送机构适于在预定间隔内容纳要处理的多个物体的容器和所述保持器之间传送待加工物体; 衬底支撑件包括用于在水平方向上驱动衬底支撑件的来回驱动部分和用于改变支撑待处理对象的间距的音调变化驱动部分; 控制器适于监视反馈到电动机的位置,速度和电流的至少一个信息,以驱动传送机构; 并且所述控制器适于通过将所监视的信息与对应于正常驱动的预定信息进行比较来判断所述传送机构异常驱动,然后适于停止所述传送机构的驱动。
    • 7. 发明申请
    • Receiving container body for object to be processed
    • 接收被处理物体的容器体
    • US20050173358A1
    • 2005-08-11
    • US10516511
    • 2003-05-26
    • Katsuhiko Oyama
    • Katsuhiko Oyama
    • B65D85/86B65G49/00B65G49/07H01L21/673H01L21/677A47G19/08
    • H01L21/67369H01L21/67373H01L21/67379Y10S414/14
    • The present invention includes: a box case having a size capable of containing an open type of cassette that can hold a plurality of first objects to be processed and capable of containing a plurality of second objects to be processed, the second objects to be processed being larger than the first objects to be processed; a supporting part provided at an inside wall surface of the box case, the supporting part being capable of supporting the second objects to be processed in a tier-like manner; an open-close lid provided at an opening part of the box case in a removable and attachable manner; and a positioning-engaging part provided at a bottom part of the box case in a removable and attachable manner. The open-close lid is capable of sealing the box case. The positioning-engaging part is capable of engaging with a positioning part provided at a lower surface of a bottom part of the cassette to position the cassette.
    • 本发明包括:具有能够容纳能够容纳待处理的多个第一待处理对象的能够容纳多个待处理对象的开放式盒的大小的箱体,第二待处理对象为 大于第一个要处理的物体; 支撑部,其设置在所述盒壳体的内壁面上,所述支撑部能够以层状的方式支撑待处理的第二物体; 以可拆卸和可附接的方式设置在箱壳的开口部分处的开闭盖; 以及以可拆卸和可附接的方式设置在箱体的底部的定位接合部。 打开的盖子能够密封箱体。 定位接合部能够与设置在盒的底部的下表面处的定位部分接合以定位盒。