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    • 7. 发明申请
    • Semiconductor memory device
    • 半导体存储器件
    • US20060113581A1
    • 2006-06-01
    • US11289441
    • 2005-11-30
    • Takashi MikiHiroshige Hirano
    • Takashi MikiHiroshige Hirano
    • H01L29/94
    • H01L27/11502H01L23/564H01L27/11507H01L2924/0002H01L2924/00
    • A semiconductor memory device having a memory cell array in which plural memory transistors and plural memory call capacitors, which are components of memory cells, are arranged, comprises a first wiring layer formed on the memory cell array, and a second wiring layer formed above the first wiring layer, wherein a wiring density of the first wiring layer on the memory cell array is higher than a wiring density of the second wiring layer on the memory cell array. Therefore, a hydrogen barrier property for the capacitors is improved, and an adverse effect due to stress applied to the capacitors is reduced, thereby suppressing deterioration of capacitor characteristics.
    • 一种具有存储单元阵列的半导体存储器件,其中布置有作为存储单元的组件的多个存储晶体管和多个存储器调用电容器,包括形成在存储单元阵列上的第一布线层和形成在存储单元阵列上方的第二布线层 第一布线层,其中存储单元阵列上的第一布线层的布线密度高于存储单元阵列上的第二布线层的布线密度。 因此,电容器的氢阻挡性提高,并且由于施加到电容器的应力引起的不利影响降低,从而抑制电容器特性的劣化。