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    • 10. 发明授权
    • Nonvolatile memory device
    • 非易失性存储器件
    • US06653685B2
    • 2003-11-25
    • US09988725
    • 2001-11-20
    • Kozo KatayamaYoshiaki KamigakiShinichi Minami
    • Kozo KatayamaYoshiaki KamigakiShinichi Minami
    • H01L29792
    • H01L27/115G11C16/0475G11C16/10G11C16/14G11C16/26H01L29/7923
    • A nonvolatile memory device has a plurality of nonvolatile memory cells in which a memory gate electrode is formed over a first semiconductor region with a gate insulating film and a gate nitride film interposed therebetween. First and second switch gate electrodes, and first and second signal electrodes used as source/drain electrodes are formed on both sides of the memory gate electrode. Electrons are injected into the gate nitride film from the source side to store information in the memory cells. The memory gate electrode and the switch gate electrodes extend in the same direction. The application of a high electric field to a memory cell which is not selected for writing can be avoided owing to the switch gate electrodes being held in a cut-off state.
    • 非易失性存储器件具有多个非易失性存储单元,其中存储栅极电极形成在第一半导体区域上,栅极绝缘膜和栅极氮化物膜介于其间。 第一和第二开关栅电极以及用作源/漏电极的第一和第二信号电极形成在存储栅电极的两侧。 从源极将电子注入到栅极氮化物膜中,以将信息存储在存储单元中。 存储栅电极和开关栅电极沿相同方向延伸。 由于开关栅极被保持在截止状态,因此可以避免对未被选择用于写入的存储单元施加高电场。