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1. 发明授权

US08107088B2 Displacement sensor 有权
标题翻译：位移传感器
公开(公告)号：US08107088B2
公开(公告)日：2012-01-31
申请号：US12646577
申请日：2009-12-23
申请人： Takahiro Suga , Hiroaki Takimasa
发明人： Takahiro Suga , Hiroaki Takimasa
IPC分类号： G01B11/14
CPC分类号： G01B11/026 , G01J1/0242 , G01J1/0448
摘要： This invention provides a displacement measurement device, a displacement measurement method, and a thickness measurement device capable of easily ensuring a conjugate relationship between the light source and the diaphragm and capable of accurately measuring the change in distance with the testing target. In the displacement measurement device, the light from the laser diode is collected towards the pin hole of the diaphragm plate at the collective lens, and then sent to the objective lens through the pin hole. The light is reflected at a surface of work, and detected by a photodiode through the objective lens, the pin hole, the collective lens, and the half mirror. That is, the pin hole becomes a substantial light source, and becomes a diaphragm with respect to the incident light on the work. The spot diameter collected on the pin hole by the collective lens is greater than the diameter of the pin hole. The light receiving quantity signal of the return light component on a diaphragm plate, shown with an outlined arrow, is removed by a high-pass filter.
摘要翻译：本发明提供一种位移测量装置，位移测量方法和厚度测量装置，其能够容易地确保光源和隔膜之间的共轭关系，并能够精确地测量与测试目标的距离变化。在位移测量装置中，来自激光二极管的光被聚集在聚光透镜的光阑板的针孔上，然后通过针孔被发送到物镜。光在工件表面反射，并通过物镜，针孔，集体透镜和半反射镜由光电二极管检测。也就是说，针孔成为实质的光源，并且相对于工件上的入射光成为隔膜。通过集体透镜收集在针孔上的光斑直径大于针孔的直径。通过高通滤波器去除用箭头所示的隔膜板上的返回光分量的光接收量信号。

2. 发明申请

US20100231925A1 DISPLACEMENT SENSOR 有权
标题翻译：位移传感器
公开(公告)号：US20100231925A1
公开(公告)日：2010-09-16
申请号：US12712475
申请日：2010-02-25
申请人： Takahiro OKUDA , Takahiro Suga , Hiroaki Takimasa , Shinsuke Yamakawa
发明人： Takahiro OKUDA , Takahiro Suga , Hiroaki Takimasa , Shinsuke Yamakawa
IPC分类号： G01B11/14
CPC分类号： G01B11/03 , G02B13/22
摘要： A focused image is taken around the focal point by a confocal displacement meter. In a measurement apparatus, a confocal displacement meter system OPT-A includes a laser diode 1, a collimator lens 4, an objective lens 6, a half mirror 3, a diaphragm plate 31, and a photodiode 2. An observation image imaging system OPT-B is a telecentric light receiving optical system, and the observation image imaging system OPT-B includes a white light source 94, an objective lens 6, a dichroic mirror 5, a diaphragm plate 81, an image formation lens 82, and an image sensor 9. The collimator lens 4 is swept by an oscillator 7 in a two-headed arrow direction. A diameter of a diaphragm hole of the diaphragm plate 81 is set such that a depth of field of the objective lens 6 is not lower than sweep amplitude of the collimator lens 4.
摘要翻译：通过共焦位移仪在焦点周围拍摄聚焦图像。在测量装置中，共焦位移计系统OPT-A包括激光二极管1，准直透镜4，物镜6，半反射镜3，光阑板31和光电二极管2.观察图像成像系统OPT -B是远心光接收光学系统，观察图像成像系统OPT-B包括白色光源94，物镜6，二向色镜5，光阑板81，成像透镜82和图像传感器9.准直透镜4以双向箭头方向由振荡器7扫描。隔膜板81的隔膜孔的直径被设定为使得物镜6的景深不低于准直透镜4的扫描幅度。

3. 发明授权

US08917900B2 Measurement apparatus 有权
标题翻译：测量装置
公开(公告)号：US08917900B2
公开(公告)日：2014-12-23
申请号：US12712530
申请日：2010-02-25
申请人： Yoshihiro Kanetani , Takahiro Suga , Hiroaki Takimasa , Naoya Nakashita , Yusuke Iida
发明人： Yoshihiro Kanetani , Takahiro Suga , Hiroaki Takimasa , Naoya Nakashita , Yusuke Iida
IPC分类号： G06K9/00 , G01B11/06 , G01B11/14 , G02B7/38
CPC分类号： G01B11/0608 , G01B11/14 , G02B7/38
摘要： In a measurement apparatus, higher-quality measurement is realized in measurement of measurement object displacement or imaging of a two-dimensional image. In a controller, a light receiving signal of a photodiode is supplied to a displacement measuring unit of a sensor head in order to measure a height of a measurement object, and the height of a surface of the measurement object is measured based on the light receiving signal. Then, in the controller, image obtaining timing is determined based on the height of the measurement object. Specifically, a focus adjustment value corresponding to the computed height of the measurement object is obtained from the table, and an image obtaining signal is transmitted to an imaging device at the timing the focus adjustment value is realized. Therefore, a length between two points on the measurement object is computed from the thus obtained image based on the height of the measurement object.
摘要翻译：在测量装置中，在测量对象位移或二维图像的成像的测量中实现更高质量的测量。在控制器中，将光电二极管的光接收信号提供给传感器头的位移测量单元，以便测量测量对象的高度，并且基于光接收来测量测量对象的表面的高度信号。然后，在控制器中，基于测量对象的高度来确定图像获取定时。具体地，从表中获得与测量对象的计算高度对应的焦点调整值，并且在实现焦点调整值的定时将图像获取信号发送到成像装置。因此，基于测量对象的高度，从由此获得的图像计算测量对象上两点之间的长度。

4. 发明授权

US08111407B2 Displacement sensor 有权
标题翻译：位移传感器
公开(公告)号：US08111407B2
公开(公告)日：2012-02-07
申请号：US12712012
申请日：2010-02-24
申请人： Hiroaki Takimasa , Takahiro Suga , Yoshihiro Yamashita
发明人： Hiroaki Takimasa , Takahiro Suga , Yoshihiro Yamashita
IPC分类号： G01N21/00
CPC分类号： G01B11/0608 , G02B27/0911 , G02B27/0955
摘要： A displacement is accurately measured at high speed to a measurement object having various surface states. In a displacement sensor including a confocal optical system in which an objective lens is moved along an optical axis, light emitted from a laser diode is formed into a slit beam by a cylindrical lens, a Y-axis side orthogonal to the optical axis is narrowed such that the light is collected on a surface of a measurement object, and an X-axis orthogonal to the optical axis is elongated in order to average a component of the light reflected from the surface. A photodiode receives the light reflected from the surface of the measurement object through an opening disposed in a position of conjugation with the laser diode. The opening is formed into a slit shape that is short in the Y-axis while being long in the X-axis. The displacement of the surface is measured from a position of the objective lens when a light receiving signal becomes the maximum.
摘要翻译：高精度地测量到具有各种表面状态的测量对象。在包括物镜沿着光轴移动的共焦光学系统的位移传感器中，从激光二极管发出的光通过柱面透镜形成为狭缝光束，与光轴正交的Y轴侧变窄使得光被收集在测量对象的表面上，并且与光轴正交的X轴被拉长以便平均从表面反射的光的分量。光电二极管通过设置在与激光二极管共轭的位置的开口接收从测量对象表面反射的光。该开口形成为在X轴上长而在Y轴上短的狭缝形状。当光接收信号变为最大值时，从物镜的位置测量表面的位移。

5. 发明申请

US20100171955A1 DISPLACEMENT SENSOR 有权
标题翻译：位移传感器
公开(公告)号：US20100171955A1
公开(公告)日：2010-07-08
申请号：US12646577
申请日：2009-12-23
申请人： Takahiro SUGA , Hiroaki Takimasa
发明人： Takahiro SUGA , Hiroaki Takimasa
IPC分类号： G01B11/14 , G01J4/00
CPC分类号： G01B11/026 , G01J1/0242 , G01J1/0448
摘要： This invention provides a displacement measurement device, a displacement measurement method, and a thickness measurement device capable of easily ensuring a conjugate relationship between the light source and the diaphragm and capable of accurately measuring the change in distance with the testing target. In the displacement measurement device, the light from the laser diode is collected towards the pin hole of the diaphragm plate at the collective lens, and then sent to the objective lens through the pin hole. The light is reflected at a surface of work, and detected by a photodiode through the objective lens, the pin hole, the collective lens, and the half mirror. That is, the pin hole becomes a substantial light source, and becomes a diaphragm with respect to the incident light on the work. The spot diameter collected on the pin hole by the collective lens is greater than the diameter of the pin hole. The light receiving quantity signal of the return light component on a diaphragm plate, shown with an outlined arrow, is removed by a high-pass filter.
摘要翻译：本发明提供一种位移测量装置，位移测量方法和厚度测量装置，其能够容易地确保光源和隔膜之间的共轭关系，并能够精确地测量与测试目标的距离变化。在位移测量装置中，来自激光二极管的光被聚集在聚光透镜的光阑板的针孔上，然后通过针孔被发送到物镜。光在工件表面反射，并通过物镜，针孔，集体透镜和半反射镜由光电二极管检测。也就是说，针孔成为实质的光源，并且相对于工件上的入射光成为隔膜。通过集体透镜收集在针孔上的光斑直径大于针孔的直径。通过高通滤波器去除用箭头所示的隔膜板上的返回光分量的光接收量信号。

6. 发明授权

US08040529B2 Displacement sensor 有权
标题翻译：位移传感器
公开(公告)号：US08040529B2
公开(公告)日：2011-10-18
申请号：US12712475
申请日：2010-02-25
申请人： Takahiro Okuda , Takahiro Suga , Hiroaki Takimasa , Shinsuke Yamakawa
发明人： Takahiro Okuda , Takahiro Suga , Hiroaki Takimasa , Shinsuke Yamakawa
IPC分类号： G01B11/14
CPC分类号： G01B11/03 , G02B13/22
摘要： A focused image is taken around the focal point by a confocal displacement meter. In a measurement apparatus, a confocal displacement meter system OPT-A includes a laser diode 1, a collimator lens 4, an objective lens 6, a half mirror 3, a diaphragm plate 31, and a photodiode 2. An observation image imaging system OPT-B is a telecentric light receiving optical system, and the observation image imaging system OPT-B includes a white light source 94, an objective lens 6, a dichroic mirror 5, a diaphragm plate 81, an image formation lens 82, and an image sensor 9. The collimator lens 4 is swept by an oscillator 7 in a two-headed arrow direction. A diameter of a diaphragm hole of the diaphragm plate 81 is set such that a depth of field of the objective lens 6 is not lower than sweep amplitude of the collimator lens 4.
摘要翻译：通过共焦位移仪在焦点周围拍摄聚焦图像。在测量装置中，共焦位移计系统OPT-A包括激光二极管1，准直透镜4，物镜6，半反射镜3，光阑板31和光电二极管2.观察图像成像系统OPT -B是远心光接收光学系统，观察图像成像系统OPT-B包括白色光源94，物镜6，二向色镜5，光阑板81，成像透镜82和图像传感器9.准直透镜4以双向箭头方向由振荡器7扫描。隔膜板81的隔膜孔的直径被设定为使得物镜6的景深不低于准直透镜4的扫描幅度。

7. 发明授权

US06995849B2 Displacement sensor 有权
公开(公告)号：US06995849B2
公开(公告)日：2006-02-07
申请号：US10366687
申请日：2003-02-14
申请人： Tetsuya Uno , Hiroaki Takimasa , Takahiro Suga
发明人： Tetsuya Uno , Hiroaki Takimasa , Takahiro Suga
IPC分类号： G01B11/24
CPC分类号： G01B11/026
摘要： A displacement sensor is provided with: a light-projection unit; a light-receiving unit having a light-shielding mask and a light-receiving element; a first light-converging element which converges luminous fluxes released from the light-projection unit on a measuring object; a second light-converging element which converges reflected luminous fluxes on the light-receiving unit; a first light-path control element which allows a projection-light light axis and a receiving-light light axis to be coaxially set on the measuring object side; and a light-path length sweeping mechanism which continuously changes a light-path length from the light-projection unit to the measuring object and a light-path length from the measuring object to the light-receiving unit.

8. 发明申请

US20130201490A1 DISPLACEMENT SENSOR 有权
标题翻译：位移传感器
公开(公告)号：US20130201490A1
公开(公告)日：2013-08-08
申请号：US13636003
申请日：2011-03-17
申请人： Yusuke Iida , Hiroaki Takimasa
发明人： Yusuke Iida , Hiroaki Takimasa
IPC分类号： G01B11/14
CPC分类号： G01B11/026 , G01B11/14 , G01S7/4918 , G01S17/48
摘要： A signal processing unit (C1, C2, C3) for processing a light reception signal from an imaging element (12) at different magnifications is provided in a light receiving unit (102) in a displacement sensor (1). This sensor (1) measures a displacement by using light receiving amount data generated by the signal processing unit (C1) for each detection processing by a light projecting unit (101) and the light receiving unit (102), and further adjusts sensitivity for next detection processing. In sensitivity adjustment processing, when a peak value in the light receiving amount data generated by the signal processing unit (C1) approximates to 0, a peak value extracted by the signal processing unit (C2) to which higher magnification is applied is employed. Alternatively, when a peak value in the light receiving amount data generated by the signal processing unit (C1) is saturated, a peak value extracted by the signal processing unit (C3) to which 1-fold magnification is applied is employed.
摘要翻译：用于在位移传感器（1）中的光接收单元（102）中提供用于以不同放大率处理来自成像元件（12）的光接收信号的信号处理单元（C1，C2，C3）。该传感器（1）通过使用由信号处理单元（C1）生成的用于由投光单元（101）和光接收单元（102）进行的每次检测处理的光接收量数据来测量位移，并进一步调节下一个检测处理。在灵敏度调整处理中，当由信号处理单元（C1）生成的光接收量数据中的峰值接近于0时，采用由应用较高倍率的信号处理单元（C2）提取的峰值。或者，当由信号处理单元（C1）产生的光接收量数据中的峰值饱和时，采用由施加1倍放大率的信号处理单元（C3）提取的峰值。

9. 发明授权

US08805643B2 Displacement sensor 有权
标题翻译：位移传感器
公开(公告)号：US08805643B2
公开(公告)日：2014-08-12
申请号：US13495478
申请日：2012-06-13
申请人： Hiroaki Takimasa , Yusuke Iida , Hideyoshi Nakamura , Hoshibumi Ichiyanagi
发明人： Hiroaki Takimasa , Yusuke Iida , Hideyoshi Nakamura , Hoshibumi Ichiyanagi
IPC分类号： G01B11/02
CPC分类号： G01B11/026 , G01B21/045 , G01C3/06 , G01C25/00 , G01S17/48 , G06F11/0736 , G06F11/076
摘要： Teaching processing using a model of a workpiece is performed by accepting at least one input of a target value for a response time and a tolerance value for a detection error as a parameter representing a condition for a displacement sensor to operate. A CPU during teaching processing determines a maximum exposure time while it causes repeated detection processing by a light projecting unit and a light receiving unit, calculates variation in measurement data of an amount of displacement, and derives the number of pieces of data of moving average calculation suitable for a value for the input parameter as a result of operation processing using the maximum exposure time and variation in measurement data. This number of pieces of data is registered in a memory and used for moving average calculation in a normal operation mode.
摘要翻译：通过接受用于响应时间的目标值的至少一个输入和用于检测误差的容差值作为表示位移传感器操作的条件的参数来执行使用工件模型的教学处理。教学处理期间的CPU在通过光投射单元和光接收单元进行重复检测处理的同时确定最大曝光时间，计算位移量的测量数据的变化，并导出移动平均计算数据的数量适合作为使用最大曝光时间和测量数据的变化的操作处理的结果的输入参数的值。该数量的数据被登记在存储器中，并用于在正常操作模式下的移动平均计算。

10. 发明授权

US08773668B2 Displacement sensor 有权
标题翻译：位移传感器
公开(公告)号：US08773668B2
公开(公告)日：2014-07-08
申请号：US13636003
申请日：2011-03-17
申请人： Yusuke Iida , Hiroaki Takimasa
发明人： Yusuke Iida , Hiroaki Takimasa
IPC分类号： G01B11/14 , G01B11/02 , G01S7/491 , G01S17/48
CPC分类号： G01B11/026 , G01B11/14 , G01S7/4918 , G01S17/48
摘要： A signal processing unit (C1, C2, C3) for processing a light reception signal from an imaging element (12) at different magnifications is provided in a light receiving unit (102) in a displacement sensor (1). This sensor (1) measures a displacement by using light receiving amount data generated by the signal processing unit (C1) for each detection processing by a light projecting unit (101) and the light receiving unit (102), and further adjusts sensitivity for next detection processing. In sensitivity adjustment processing, when a peak value in the light receiving amount data generated by the signal processing unit (C1) approximates to 0, a peak value extracted by the signal processing unit (C2) to which higher magnification is applied is employed. Alternatively, when a peak value in the light receiving amount data generated by the signal processing unit (C1) is saturated, a peak value extracted by the signal processing unit (C3) to which 1-fold magnification is applied is employed.
摘要翻译：用于在位移传感器（1）中的光接收单元（102）中提供用于以不同放大率处理来自成像元件（12）的光接收信号的信号处理单元（C1，C2，C3）。该传感器（1）通过使用由信号处理单元（C1）生成的用于由投光单元（101）和光接收单元（102）进行的每次检测处理的光接收量数据来测量位移，并进一步调节下一个检测处理。在灵敏度调整处理中，当由信号处理单元（C1）生成的光接收量数据中的峰值接近于0时，采用由应用较高倍率的信号处理单元（C2）提取的峰值。或者，当由信号处理单元（C1）产生的光接收量数据中的峰值饱和时，采用由施加1倍放大率的信号处理单元（C3）提取的峰值。

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